Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.

A flat active element (FAE) layer includes: a substrate including an active body area and a protruding arm; an electrode, formed on the substrate and including an active region for sensing or actuation formed on the active body area of the substrate and a connection region formed on the protruding arm of the substrate, wherein the electrode includes a first indented line around the periphery of the active region, extending into the connection region and reaching two respective edges of the connection region, wherein the first indented line totally penetrates the electrode to make the respective edges electrically isolated; and an insulator layer formed on the electrode covering the active region and partially covering the connection region, wherein the insulator layer fills the indented line of the electrode.

To provide a simply-structured multilayer electrostatic actuator that exhibits a sufficient stroke and a sufficient contraction force in a specific drive range, and rapidly hardens upon an attempt to widen the interval between electrodes beyond the drive range. A multilayer electrostatic actuator (1) is configured by a plurality of actuator parts (2a, 2b. 2c) each including: a first film (3a.sub.1, 3b.sub.1, 3c.sub.1) having a plurality of first connection regions (7a.sub.1, 7b.sub.1, 7c.sub.1) formed on one surface in a predetermined pattern; and a second film (3a.sub.2, 3b.sub.2, 3c.sub.2) connected to the first film via the first connection regions, and having a plurality of second connection regions (7a.sub.2, 7b.sub.2, 7c.sub.2) formed on a surface opposite to the first film in the identical pattern. The actuator parts are connected and layered via the second connection regions. On both the first film and the second film of one actuator part (2a, 2b. 2c), a non-connection region (15) is formed having a substantially fixed width between connection regions adjacent to each other as viewed in a layering direction (Z). The first connection regions and the second connection regions are arranged so as not to overlap each other as viewed in the layering direction. Axes of the patterns between two actuator parts (2a, 2b; 2b, 2c) connected intersect each other at a predetermined angle (θ, except θ =0°) as viewed in the layering direction. When the multilayer electrostatic actuator is pulled in the layering direction due to an external force, the non-connection region, in particular mainly the non-connection region of the second film, is bending-deformed to separate the first film and the second film, resulting in the multilayer electrostatic actuator extending in the layering direction. Further pulling makes the non-connection region tensile-deformed and hardened. When a voltage is applied, the multilayer electrostatic actuator contracts in the layering direction due to the electrostatic attractive force.

An artificial muscle includes a housing including an electrode region, an expandable fluid region, a first film layer, and a second film layer. The first film layer and the second film layer each include an inner protective layer having a first elasticity, an outer protective layer having a second elasticity, and a reinforcing layer provided between the inner protective layer and the outer protective layer, the reinforcing layer having a third elasticity greater than the first elasticity of the inner protective layer and the second elasticity of the outer protective layer. The artificial muscle further includes an electrode pair positioned in the electrode region of the housing and between the first film layer and the second film layer, and a dielectric fluid housed within the housing.

A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.

A micromechanical arm array is provided. The micromechanical arm array comprises: a plurality of micromechanical arms spaced from each other in a first horizontal direction and extending in a second horizontal direction, wherein each micromechanical arm comprises a protrusion at a top of each micromechanical arm and protruding upwardly in a vertical direction; a plurality of protection films, each protection film encapsulating one of the plurality of micromechanical arms; and a metal connection structure extending in the first horizontal direction. The metal connection structure comprises: a plurality of joint portions, each joint portion corresponding to and surrounding the protrusion of one of the plurality of micromechanical arms; and a plurality of connection portions extending in the first horizontal direction and connecting two neighboring joint portions.

A driving system (7) includes an actuator (71A) that performs at least one among translations in three directions orthogonal to one another and rotations about axes in the three directions, and a flexible wiring body (73A) that connects a semiconductor element (6) moving along with the actuator (71A) and a frame (72) positioned outer than the semiconductor element (6). The flexible wiring body (73A) is provided with a main part (731A) mounted with the semiconductor element (6) and electrically connected to the semiconductor element (6), and a plurality of arm parts (732A) extending from the main part (731A) toward the frame (72) and bent three-dimensionally.

An artificial muscle includes a housing including an electrode region and an expandable liquid region and a dielectric liquid housed within the housing. The artificial muscle further includes an electrode pair positioned in the electrode region of the housing, the electrode pair comprising a first electrode and a second electrode, wherein the electrode pair is configured to actuate between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state directs the dielectric liquid into the expandable liquid region, expanding the expandable liquid region. The artificial muscle also includes a composite electrical insulating layered structure in contact with at least one of the first electrode or the second electrode, wherein the composite electrical insulating layered structure that includes an electrical insulator layer surrounded by adhesive surfaces. The adhesive surfaces are located between one or more flexible electrical insulators.

A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

An actuator is provided, including a plurality of conducting layers and a plurality of electret layers. The electret layers are respectively sandwiched between the conducting layers, and form gaps between the conducting layers. Directions of preset electric fields of the adjacent electret layers are opposite, and the adjacent conducting layers are respectively electrically connected to a first voltage end and a second voltage end to receive a driving voltage.