An actuator includes a stack including: an elastomer layer; and an elastic electrode disposed on each surface of the elastomer layer, in which the stack is subjected to a pre-strain of 50% or more at least in one direction. The stack may have a round tubular shape with the elastic electrodes disposed on opposite surfaces of the elastomer layer in a radial direction of the stack.

An actuator that utilizes a Coulomb force is provided. An actuator (10) includes a base electrode (2), a counter electrode (4) opposing the base electrode (2), a first terminal (31) connected to the base electrode (2), and a second terminal (32) connected to the counter electrode (4). At least a surface (2c) of the base electrode (2) that opposes the counter electrode (4) is covered with an insulating layer (6). The counter electrode (4) includes a flexible electrical conductor being deformable by a Coulomb force acting between the base electrode (2) and the counter electrode (4) when a voltage is applied between the first terminal (31) and the second terminal (32).

A graded-index optical element may include a nanovoided material including a first surface and a second surface opposite the first surface. The nanovoided material may be transparent between the first surface and the second surface. Additionally, the nanovoided material may have a predefined change in effective refractive index in at least one axis due to a change in at least one of nanovoid size or nanovoid distribution along the at least one axis. Various other elements, devices, systems, materials, and methods are also disclosed.

Described is an electrically actuated, pneumatic driven motor. The pneumatic driven motor includes a body having first and second surfaces, the body having a chamber defined by an interior wall, a displacement cavity, and a passage that fluidly couples the displacement cavity to the chamber, a bleeder port and a bleeder port passage that fluidly couples the bleeder port to the chamber, a valve disposed in the passage between the displacement cavity and the chamber, an annular pushrod mechanism coupled to the valve, the annular pushrod mechanism having a pair of pawls that protrude from an inner surface of the annular pushrod mechanism, an axle disposed in the chamber; and a motor gear disposed about the axle, the motor gear having a plurality of teeth that selectively engage with the pawls on the pushrod mechanism according to displacement of the annular pushrod mechanism.

Proposed is an actuator using a bi-directional electrostatic force, which generates a bi-directional electrostatic force in order to amplify and vibrate the vibration of a vibrator. The actuator may include an upper electrostatic force generator configured to generate a first electrostatic force in response to a first high voltage signal, a lower electrostatic force generator configured to generate a second electrostatic force in response to a second high voltage signal having a phase difference with the first high voltage signal, and a vibration generator positioned in a space between the upper electrostatic force generator and the lower electrostatic force generator and configured to generate vibration in response to the first and second electrostatic forces.

According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.

An electro-hydraulic actuator includes a deformable shell defining an enclosed internal cavity and containing a liquid dielectric, first and second electrodes on first and second sides, respectively, of the enclosed internal cavity. An electrostatic force between the first and second electrodes upon application of a voltage to one of the electrodes draws the electrodes towards each other to displace the liquid dielectric within the enclosed internal cavity. The shell includes active and inactive areas such that the electrostatic forces between the first and second electrodes displaces the liquid dielectric within the enclosed internal cavity from the active area of the shell to the inactive area of the shell. The first and second electrodes, the deformable shell, and the liquid dielectric cooperate to form a self-healing capacitor, and the liquid dielectric is configured for automatically filling breaches in the liquid dielectric resulting from dielectric breakdown.

A nanovoided polymer-based material may include a bulk polymer material defining a plurality of nanovoids and an interfacial film disposed at an interface between each of the plurality of nanovoids and the bulk polymer material. The interfacial film may include one or more layers of material. A method of forming a nanovoided polymer-based material may include (1) forming a bulk polymer material defining a plurality of nanovoids and (2) forming an interfacial film at an interface between each of the plurality of nanovoids and the bulk polymer material. Various other methods, systems, and materials are also disclosed.

A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.

In some examples, a method includes forming a material layer on a substrate, partially polymerizing a component of the material layer, to form fluid-filled droplets within a partially polymerized matrix, deforming the material layer to form anisotropic fluid-filled droplets, and further polymerizing the partially polymerized matrix to form an anisotropic voided polymer, including anisotropic voids in a polymer matrix. The anisotropic voids may include anisotropic nanovoids. Example methods may further include depositing electrodes on the anisotropic voided polymer so that at least a portion of the anisotropic voided polymer is located between the electrodes. Examples may include forming electroactive elements including an anisotropic nanovoided polymer, and devices (such as sensors and/or actuators) including electroactive elements.