Patent classifications
H05H1/4697
Reduction of molecular background emission and sample matrix management in a solution cathode glow discharge
A device and method to reduce molecular background emission and to increase matrix management in solution cathode glow discharge (SCGD). A purging device for purging atmospheric gases from a solution cathode glow discharge (SCGD) apparatus, comprising a hollow body that encloses a plasma generated between a solid anode and a solution cathode, wherein the body comprises at least one opening for release of water vapor generated by the plasma. A method for reducing matrix interferences from a SCGD comprising introducing an internal standard into a sample to be analyzed, wherein the sample comprises at least one element of interest; determining a spatial emission profile of the internal standard; using linear correlation between the spatial emission profile of the internal standard and the element of interest to predict a crossover point; and using the crossover point of the element of interest to select a vertical acquisition height for SCGD analysis.
Plasma cleaning device and process
Atmospheric pressure plasma devices and methods for preparing the surfaces of fasteners, e.g. nutplates, for adhesive bonding are disclosed. A device supports a fastener to dispose a contact surface of the fastener to receive an atmospheric pressure plasma flow, thereby activating the contact surface to be bonded. A spacer is used to properly support the fastener to receive the plasma treatment. A spacer can comprise beveled edges of a grounded enclosure which electrically connects the contact surface of the fastener to the plasma generator where plasma is formed in a gas flow along the electrodes. Alternately, a spacer can comprise a plurality of standoffs on a showerhead port comprising a ground electrode of the plasma generator where plasma is formed in a gas flow across the electrodes.
Symmetric Plasma Source to Generate Pie-Shaped Treatment
Plasma source assemblies comprising a housing with an RF hot electrode having a body and a plurality of source electrodes extending vertically from the RF hot electrode toward the opening in a front face of the housing are described. Processing chambers incorporating the plasma source assemblies and methods of using the plasma source assemblies are also described.
APPARATUS AND METHOD FOR ENHANCING SIGNAL INTENSITY OF RADIO FREQUENCY GLOW DISCHARGE MASS SPECTROMETRY
Regarding the problem of low signal intensity during material analysis using existing radio frequency glow discharge mass spectrometry, an apparatus and method for enhancing signal intensity of radio frequency glow discharge mass spectrometry are provided, so as to enhance the signal intensity during inorganic material analysis using a radio frequency glow discharge mass spectrometer. The apparatus comprises a sample introduction cell having a sample introduction rod and having a sample fixed thereon, and an array magnet enhancement portion having a housing shell and magnets arranged in an array. The array magnet enhancement portion is fixed between the sample introduction rod in the sample introduction cell and the sample and is tightly attached to the sample.
Symmetric plasma source to generate pie shaped treatment
Plasma source assemblies comprising a housing with an RF hot electrode having a body and a plurality of source electrodes extending vertically from the RF hot electrode toward the opening in a front face of the housing are described. Processing chambers incorporating the plasma source assemblies and methods of using the plasma source assemblies are also described.
HARMONIC COLD PLASMA DEVICE AND ASSOCIATED METHODS
A method for generating atmospheric pressure cold plasma inside a hand-held unit discharges cold plasma with simultaneously different rf wavelengths and their harmonics. The unit includes an rf tuning network that is powered by a low-voltage power supply connected to a series of high-voltage coils and capacitors. The rf energy signal is transferred to a primary containment chamber and dispersed through an electrode plate network of various sizes and thicknesses to create multiple frequencies. Helium gas is introduced into the first primary containment chamber, where electron separation is initiated. The energized gas flows into a secondary magnetic compression chamber, where a balanced frequency network grid with capacitance creates the final electron separation, which is inverted magnetically and exits through an orifice with a nozzle. The cold plasma thus generated has been shown to be capable of accelerating a healing process in flesh wounds on animal laboratory specimens.
METHOD OF INCREASING PARTICULATE SIZE
This invention relates to a method of increasing the size of particulates in a gas comprising particulates, e.g. a gas that is formed from the combustion of fuels. The method comprises mixing an ionised gas stream with the gas comprising particulates.
GLOW PLASMA STABILIZATION
Provided are methods, apparatus and systems for stabilization of a glow discharge from a plasma. Also provided are methods, apparatus and systems for processing optical signals from a stabilised glow plasma with enhanced signal to noise recovery. A first method comprises: generating an electric field within a plasma cell using an alternating excitation voltage to excite particles within the cell, to produce a glow discharge from a plasma in the plasma cell in a resonant condition; monitoring, in each excitation cycle of the alternating excitation voltage, one or more signals that correlate with glow discharge optical emissions from the plasma in the plasma cell; and, in response to said monitoring, controlling one or more operating conditions for the plasma cell to maintain the glow discharge emissions from the plasma within a desired operating range in each excitation cycle of the alternating excitation voltage. A relatively stable glow discharge optical emission is maintained via dynamic resonant feedback control of operating conditions such as the electric field that is used to excite particles within the plasma cell. The stabilization of the glow plasma can be used in glow discharge optical emission spectroscopy (GD-OES) for gas analysis and in other applications.
LOW PRESSURE PLASMA MODE
A helium plasma characterised by an emission spectrum dominated by the 1s3p .sup.1P.sub.1 to 1s2 .sup.1S.sub.0 501.5 nm transmission line, and a pressure less than 510.sup.3 mbar. Methods and apparatus for igniting the plasma, and for using the plasma for pre-ionisation and glow discharge cleaning are also disclosed.
Methods for controlling plasma glow discharge in a plasma chamber
Methods for controlling glow discharge in a plasma chamber are disclosed. One method includes connecting a radio frequency (RF) generator to a top electrode of a chamber, the chamber having chamber walls coupled to ground and connecting the RF generator to a bottom electrode of the chamber. Identifying a process operation of deposition to be performed in the chamber and setting an RF signal from the RF generator to be supplied to the top electrode at a first phase. And, setting the RF signal from the RF generator to be supplied to the bottom electrode at a second phase. The first phase and the second phase being adjustable to a phase difference to cause the plasma glow discharge to be controllably positioned within the chamber based on the phase difference.