Patent classifications
H05H2007/005
Portable information terminal, beam irradiation system, and program
A portable information terminal is separated from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam. The portable information terminal performs operation of a first operation item at a desired position and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating the first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.
Optical etendue matching methods for extreme ultraviolet metrology
An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.
FAST COOLING OF ION MOTION IN A LONG CHAIN USING LOCAL MODES
Aspects of the present disclosure describe techniques for fast cooling of ion motion in a long chain using local motional modes. For example, a method is described for cooling down ions in a chain of ions that includes performing a cooling down sequence in which phonons are removed from the ions in the chain of ions by exciting and de-exciting local motional modes associated with individual ions, wherein sideband transitions that are part of the cooling down sequence are driven faster for the local motional modes than for collective motional modes for the same chain of ions; and completing the cooling down sequence when the local motional modes reach a ground state. A corresponding system and computer-readable storage medium for fast cooling of ion motion in a long chain using local motional modes are also described.
Fast cooling of ion motion in a long chain using local modes
Aspects of the present disclosure describe techniques for fast cooling of ion motion in a long chain using local motional modes. For example, a method is described for cooling down ions in a chain of ions that includes performing a cooling down sequence in which phonons are removed from the ions in the chain of ions by exciting and de-exciting local motional modes associated with individual ions, wherein sideband transitions that are part of the cooling down sequence are driven faster for the local motional modes than for collective motional modes for the same chain of ions; and completing the cooling down sequence when the local motional modes reach a ground state. A corresponding system and computer-readable storage medium for fast cooling of ion motion in a long chain using local motional modes are also described.
CHARGE STRIPPING FILM FOR ION BEAM
A charge stripping method includes irradiating a charge stripping film with an ion beam. The charge stripping film includes a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25 C. of at least 800 W/mK, or a laminated body of the graphitic film. The charge stripping film has a thickness of not less than 100 nm and less than 10 m, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of not more than 110.sup.5/K, and an area of at least 4 cm.sup.2.
ELECTRON STRIPPER FOILS AND PARTICLE ACCELERATORS HAVING THE SAME
System includes a particle accelerator configured to direct a particle beam of charged particles along a designated path. The system also includes an extraction device positioned downstream from the particle accelerator. The extraction device includes a stripper foil and a foil holder that holds the stripper foil. The foil holder is configured to position the stripper foil across the designated path of the particle beam such that the particle beam is incident thereon. The stripper foil is configured to remove electrons from the charged particles, wherein the stripper foil includes a backing layer and a conductive layer stacked with respect to one another. The backing layer includes synthetic diamond.
PORTABLE INFORMATION TERMINAL, BEAM IRRADIATION SYSTEM, AND PROGRAM
Disclosed herein is a portable information terminal performing operation of a first operation item at a desired position. The portable information terminal is separated from a charged particle beam irradiation apparatus performing processing of a sample by irradiating the sample with a charged particle beam, and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.
CHARGE STRIPPING FILM FOR CHARGE STRIPPING DEVICE OF ION BEAM
A charge stripping film for a charge stripping device of ion beam is a carbon film produced by annealing a polymer film, and has a film thickness of 10 m to 150 m, an area of at least 4 cm.sup.2, and an atomic concentration of carbon of at least 97%. A charge stripping film for a charge stripping device of ion beam is a carbon film having a thermal conductivity in a film surface direction at 25 C. of at least 300 W/mK, and has a film thickness of 10 m to 150 m, an area of at least 4 cm.sup.2, and an atomic concentration of carbon of at least 97%.
CHARGE STRIPPING FILM FOR ION BEAM
A charge stripping film for an ion beam includes a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25 C. of at least 800 W/mK, or a laminated body of the graphitic film. The charge stripping film has a thickness of 100 nm to 10 m, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of at least 110.sup.5/K, and an area of at least 4 cm.sup.2.
Beam transport system and particle beam therapy system
A beam shaping device included in a beam transport system is provided with: a pre-stage quadrupole electromagnet that reduces a distribution width of x-angle components that are inclinations in the x-direction of the charged particles in the beam with respect to the traveling direction; a penumbra expander that moderates an end profile of a particle-number distribution of the x-angle components in the beam having passed through the pre-stage quadrupole electromagnet; and a post-stage quadrupole electromagnet that adjusts a betatron phase in a phase-space distribution in the x-direction, of the beam having passed through the penumbra expander; wherein the post-stage quadrupole electromagnet adjusts a phase advance angle of the betatron phase from the penumbra expander to the isocenter, to be in a range of an odd multiple of 90 degrees45 degrees.