The present disclosure discloses a thermal plasma treatment method for sulfur hexafluoride (SF.sub.6) degradation. In the thermal plasma treatment method for SF.sub.6 degradation, Ar is input into a thermal plasma generator as a carrier gas; annular electrodes are electrically connected to a direct current power supply to generate an arc plasma region in the presence of the carrier gas Ar; to-be-reacted SF.sub.6 and to-be-reacted H.sub.2 in a predetermined ratio are input into the arc plasma region to generate hydrogen radicals as well as fluorine radicals, and the hydrogen radicals and the fluorine radicals are bonded with each other to generate HF to inhibit the self-recovery reaction of SF.sub.6; and final products include HF and elemental S.

This invention relates to a method of increasing the size of particulates in a gas comprising particulates, e.g. a gas that is formed from the combustion of fuels. The method comprises mixing an ionised gas stream with the gas comprising particulates.

In some embodiments an apparatus for treating an exhaust gas in a foreline of a substrate processing system may include a dielectric tube configured to be coupled to the foreline of the substrate processing system to allow a flow of exhaust gases from the foreline through the dielectric tube; an RF coil wound about an outer surface of the dielectric tube, the RF coil having a first end to provide an RF input to the RF coil, the first end of the RF coil disposed proximate a first end of the dielectric tube and a second end disposed proximate a second end of the dielectric tube; a tap coupled to the RF coil to provide an RF return path, the tap disposed between the first end of the dielectric tube and a central portion of the dielectric tube.

In a plasma generation device that generates electromagnetic wave plasma by emitting electromagnetic waves in a target space, the electromagnetic wave plasma is generated in a plurality of locations with a simple configuration and relatively low electromagnetic wave energy. The plasma generation device is provided with an antenna that emits electromagnetic waves supplied from an electromagnetic wave generator in the target space, a discharger that forcibly discharges free electrons from gas molecules in the target space, and an electric field concentration member that concentrates electric field of the electromagnetic wave emitted from the antenna. The electric field concentration member is arranged in non-contact relationship with the antenna. The plasma generation device causes the discharger to discharge free electrons and the antenna to emit electromagnetic waves, thereby generating electromagnetic wave plasma in the vicinity of the antenna and in the vicinity of the electric field concentration member.

A plasma control method for an exhaust gas treating apparatus includes providing an exhaust gas treating apparatus having a plasma discharge space, a coil disposed on an outer circumference of the plasma discharge space, an upper electrode, and a lower electrode; generating plasma in the plasma discharge space; controlling the state of the plasma generated in the plasma discharge space by generating a magnetic field in the plasma discharge space between the upper electrode and the lower electrode; and cooling the reaction tube using a water cooled jacket disposed around the reaction tube. The magnetic field is generated by applying a current to the coil.

An oxygen excitation system for increasing efficiency and minimizing pollutants of combustion is disclosed which comprises a power source, a radio frequency oscillator being in communication to the power source and configured to generate radio frequency, a radio frequency amplifier being in communication to the radio frequency oscillator and configured to amplify the radio frequency generated by said radio frequency oscillator, and an oxygen exciter being in communication to the radio frequency amplifier configured to convert a triplet oxygen into singlet oxygen to maximize fuel efficiency of internal or external combustion engines and minimizing pollutants from exhaust gases.

The present disclosure addresses the deficiencies described above by providing systems and methods for enhancing the efficiency and yield of alkene production. The methods and systems provide for the use of activated CO.sub.2 in a dehydrogenation reactor along with an alkane stream. Through the use of the methods and systems of the invention, catalyst deactivation by coke deposition is reduced and the selectivity and efficiency of the dehydrogenation reaction is improved.

This disclosure relates to a method of increasing the size of particulates in a gas comprising particulates, e.g. a gas that is formed from the combustion of fuels. The method comprises mixing an ionised gas stream with the gas comprising particulates.

Some embodiments are directed to a decomposing and collection apparatus for use with a fluid. The apparatus includes an assembly for generating ions via applying atmospheric pressure, low temperature plasma to the fluid and separating the generated ions. The assembly includes multiple plasma generator and separator units that are vertically stacked relative to each other. Each of the multiple plasma generator and separator units includes a plasma generator for generating the generating atmospheric pressure, low temperature plasma, and a separator disposed to receive the positively and negatively ions ejected from the plasma generator and configured to redirect the received positively charged ions in one direction and the received negatively charged ions are redirected to another direction different from the one direction. The apparatus also includes a collector configured to collect at least one of the redirected positively charged ions and the negatively charged ions.

A system for exhaust gas remediation includes an engine, a plasma reactor, and a pulse source. The engine emits exhaust gas that includes NO molecules and NOx molecules. The plasma reactor includes an internal chamber that is fluidly connected to the engine such that the exhaust gas flows into the internal chamber. An electrode is disposed within the internal chamber of the plasma reactor. The electrode is electrically coupled to an electrical pulse source. The electrical pulse source delivers electrical pulse to the electrode to form a plasma from the exhaust gas, which removes at least a portion of the NO molecules and at least a portion of the NOx molecules.