An actuator as a piezoelectric device has a bonding layer including titanium, a lower electrode including platinum, a piezoelectric thin film, and an upper electrode formed in this order on a substrate. Ti particles precipitate from the bonding layer onto the lower electrode. Pt that forms the lower electrode has a crystal grain size of 75 nm to 150 nm.

An ultrasound transducer used in an ultrasound system and a manufacturing method thereof includes: a backing block; a piezoelectric layer placed on the backing block; a matching layer placed on the piezoelectric layer; and a ground layer placed between the piezoelectric layer and the matching layer. The backing layer includes a connector that connects a transmitting unit and a receiving unit of an ultrasound system, and a wiring area that connects the piezoelectric layer and the connector. The wiring area is formed by etching and filling with metal material.

The present invention relates to compositions obtained by mixing specific electroactive fluoro-terpolymers and specific electroactive fluorinated copolymers. The invention also concerns liquid formulations (inks) that can be used through conventional processing technologies for printed electronics and microelectronics in a safe environment, based on these compositions. Another aspect of this invention are the films manufactured using these formulations, and the devices comprising at least one layer of these films.

An ultrasound sensor includes: a diaphragm; a plurality of first electrodes; a plurality of second electrodes; and a plurality of piezoelectric layers which is provided between the first electrode and the second electrode, in which, in a Z-direction, a portion in which the first electrode, the piezoelectric layer and the second electrode are overlapped is referred to as an active portion, and a range to the extent that the diaphragm is oscillatable by driving the active portion is referred to as a movable portion, when a unit including one movable portion and the active portion which is provided within the one movable portion is referred to as one ultrasound element in plan view, two or more types of ultrasound elements in which a dimension of the active portion with respect to a dimension of the movable portion is different from each other in plan view are provided.

A piezoelectric element, in which a piezoelectric body, and a vibrating plate having [111]-oriented single crystal silicon as a vibrating material are laminated is provided. In addition, a manufacturing method of a piezoelectric element including: cutting out a vibrating material to be used in the vibrating plate from a [111]-oriented single crystal silicon wafer; and laminating a piezoelectric body and the vibrating plate is provided.

This disclosure provides systems, methods and apparatus for microspeaker devices. In one aspect, a microspeaker element may include a deformable dielectric membrane that spans a speaker cavity. The deformable dielectric membrane can include a piezoactuator and a dielectric layer. Upon application of a driving signal to the piezoactuator, the dielectric layer can deflect, producing sound. In some implementations, an array of microspeaker elements can be encapsulated between a glass substrate and a cover glass. Sound generated by the microspeaker elements can be emitted through a speaker grill formed in the cover glass.

A flexible ultrasonic sensor with an ultrasonic-driven liquid metal as a conductive material and a manufacturing method thereof are provided. The method includes: pumping a liquid metal into an inflow channel with a pre-embedded copper wire in an ultrasonic pumping mode; in a vacuum atmosphere, enabling a encapsulation film subjected to oxygen plasma treatment to slowly fall on the previously obtained material through a clamping apparatus; clamping a piezoelectric organic polymer by the obtained material and a liquid metal electrode bottom plate, enabling the piezoelectric organic polymer to be located at a central position through a positioning plate, and pasting a flexible encapsulation layer to a lower part of a whole device in the vacuum atmosphere; and sintering upper and lower layers of liquid metal electrodes by power ultrasound after heating to ensure electrical connectivity, thereby completing manufacturing of the flexible ultrasonic sensor.

A flexible ultrasonic sensor with an ultrasonic-driven liquid metal as a conductive material and a manufacturing method thereof are provided. The method includes: pumping a liquid metal into an inflow channel with a pre-embedded copper wire in an ultrasonic pumping mode; in a vacuum atmosphere, enabling a encapsulation film subjected to oxygen plasma treatment to slowly fall on the previously obtained material through a clamping apparatus; clamping a piezoelectric organic polymer by the obtained material and a liquid metal electrode bottom plate, enabling the piezoelectric organic polymer to be located at a central position through a positioning plate, and pasting a flexible encapsulation layer to a lower part of a whole device in the vacuum atmosphere; and sintering upper and lower layers of liquid metal electrodes by power ultrasound after heating to ensure electrical connectivity, thereby completing manufacturing of the flexible ultrasonic sensor.

A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.

A method for producing a plurality of piezoelectric ultrasound transducer elements, the method comprising providing or depositing a piezoelectric material on at least part of a surface of a sheet of substrate to form a layered member; and forming the one or more piezoelectric ultrasound transducer elements from the layered member.