The present invention is directed to a method for manufacturing an ultrasonic fingerprint sensor by using a nanorod structure, the method including: a conductive mold generating step of generating a plurality of rod generation holes; a nanorod generating step of generating nanorods by filling the plurality of rod generation holes with a nano-piezoelectric material; a side electrode generation portion marking step of marking side electrode generation portions; a conductive mold etching step of generating nanorods and side electrodes by performing primary etching on the conductive mold; an insulating material filling step of filling portions with an insulating material; a lower electrode forming step of performing secondary etching and forming lower electrodes; a dummy substrate bonding step of bonding a dummy substrate to a surface on which the lower electrodes are formed; and an upper electrode forming step of removing the conductive substrate base and forming upper electrodes.

A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

A piezoelectric sensor includes an elastic body, a piezoelectric element which is disposed at a position where the piezoelectric element has contact with the elastic body, and which is configured to output a voltage signal when deforming in accordance with a deformation of the elastic body, and a detector configured to detect the voltage signal output from the piezoelectric element, wherein the detector detects kinetic frictional force generated between the object and the elastic body based on a variation in the voltage signal due to the relative movement of the object to the elastic body.

The present disclosure provides a piezoelectric sensor, a pressure detecting device, their manufacturing methods and a detection method. The piezoelectric sensor comprises a thin film transistor located on a substrate and comprising an active layer, and a piezoelectric layer that is in contact with the active layer of the thin film transistor.

A very small piezoelectric sensor capable of being mass produced includes a core, a piezoelectric layer on a surface of the core; and a conductive layer on a surface of the piezoelectric layer away from the core. The core is flexible and threadlike, the core is a first electrode of the piezoelectric sensor, and the conductive layer is a second electrode of the piezoelectric sensor. An array of such sensors allows the “skin” of a robot for example to simulate the sensitivity of hair-covered human skin. A method for making the piezoelectric sensor and an electronic device using the piezoelectric sensor are also disclosed.

A dielectric polymeric composition comprising a polymeric matrix comprising structural units derived from a polymerizable vinyl monomer; an ionic liquid comprising an organic cation and a balancing anion, wherein the ionic liquid is miscible or partially miscible with the polymerizable vinyl monomer, and wherein the concentration of ionic liquid in dielectric polymeric composition ranges from 0.5 to 30 wt. %; and less than 10 ppm of unreacted polymerizable vinyl monomer, based on the total weight of the composition, wherein an amount of unreacted polymerizable vinyl monomer in the composition is measured via HPLC. The polymeric matrix further comprises structural units derived from a polymerizable co-monomer comprising a functional group that has the ability to form hydrogen bonds within the polymeric matrix. The polymeric matrix further comprises a crosslinking agent, and wherein the polymeric matrix comprises covalent crosslinks between the crosslinking agent and the structural units derived from the polymerizable vinyl monomer.

Components of a device may transmit signals between one another using piezo electric transducers (PETs). In a basic system, a first PET may be coupled to and/or in contact with a first location on a member. A second PET may be coupled to and/or in contact with a second location on the member and separated from the first PET by a distance. The first PET may receive a signal (e.g., an electrical voltage) and convert the signal to a mechanical force/stress causing vibration of the member. The vibration may propagate through the member to other locations about the member. The second PET receive the vibration and may convert the vibration back to the signal, such as by converting mechanical force/stress to the electrical voltage (i.e., the signal). A similar process may be performed in reverse to enable the first and second PET to provide two-way communication.

A pseudo-piezoelectric d33 device includes a nano-gap, and a pair of integral and substantially parallel electrodes having a first sensing electrode and a second sensing electrode. The first sensing electrode and the second sensing electrode constitute a receiver. The nano-gap is disposed between the first sensing electrode and the second sensing electrode. An initial height of the nano-gap is smaller than or equal to 100 nanometers. The nano-gap is formed after a thermal reaction between a semiconductor material and a metal material to form a semiconductor-metal compound. The first sensing electrode of the receiver includes the semiconductor-metal compound to provide an integral capacitive sensing electrode to sense a capacitance change with the second sensing electrode and generate a sensing signal.

A flexible sensor is provided which has a flexible substrate of polymeric material, a bottom electrode layer arranged on the flexible substrate and configured to be a reference electrode, an active layer of piezoelectric material arranged on the bottom electrode layer, a top electrode layer arranged on the active layer and configured to be connected to a signal conductor, and a flexible coating layer of polymeric material that cooperates with the flexible substrate to encapsulate the bottom electrode layer, the active layer, and the top electrode layer. The flexible sensor has an additional layer of metal material arranged on the flexible coating layer and short-circuited to the bottom electrode layer, the additional layer and the bottom electrode layer acting as an electromagnetic shield for the flexible sensor.

A sensor system may have a force sensor formed from a piezoelectric film. The piezoelectric film may comprise a number of tuned microstructures that are configured to resonate at a particular frequency. In accordance with the tuning of the microstructures, frequency signals corresponding to the microstructure resonance may be mechanically amplified before being processed by associated processing electronics. The processing electronics may be configured to identify a type of biological vibration detected by the force sensor.