Emergency stop pressure sensors 17 are installed on both side surfaces of a movable link 11 of a robot arm 14 of an assembly robot. When a worker S unintentionally walks in a swing range Ra of the robot arm 14 and contacts the emergency stop pressure sensor 17, a detection signal is transmitted to a control unit 19, and the control unit 19 shuts power transmission to a driving source swinging the robot arm. The emergency stop pressure sensor 17 has a first electrode and a second electrode constituting a pair of electrodes and an intermediate layer formed of rubber or a rubber composition, which is disposed between the pair of electrodes, the intermediate layer generating power upon deformation caused by contact with a contacted body (the worker). A side of the intermediate layer in a laminate direction undergoes surface modification treatment and/or inactivation treatment. With this treatment, the one side and the other side of the intermediate layer have different degrees of deformation to the same deformation adding force.

Disclosed are a flexible display panel, a flexible display device and a deformation detection method thereof, used for detecting deformation of the flexible display panel. The flexible display panel provided by embodiments of the present disclosure includes a flexible substrate, a display device and a piezoelectric sensor arranged in a stacked mode. The piezoelectric sensor includes a first electrode, a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode; the piezoelectric sensor is configured to generate an electrical signal under the action of stress produced by bending the flexible display panel; and a signal processing chip in the flexible display device is configured to determine deformation parameters of the flexible display panel according to the electrical signal.

A plurality of sensors and a controller are disposed in a marine seismic streamer. Each of the sensors comprises an enclosure having two opposing interior walls, first and second piezoelectric elements disposed on the opposing interior walls, a third piezoelectric element disposed on a flexible substrate within the enclosure between the opposing interior walls, a pressure signal output node and an acceleration signal output node disposed on the exterior surface of the enclosure. A combined pressure signal derived from the pressure signal output nodes of the plural sensors is coupled to a pressure signal input of the controller. A combined acceleration signal derived from the acceleration signal output nodes of the plural sensors is coupled to an acceleration signal input of the controller. The streamer may be towed, and the combined pressure and acceleration signals may be recorded in a computer-readable medium.

An ultrasonic sensor, a preparation method of the ultrasonic sensor, and a display apparatus are provided. The ultrasonic sensor includes a texture recognition region and a contrast region. The contrast region is located on at least one side of the texture recognition region. The texture recognition region includes at least one recognizing unit, and the contrast region includes at least one contrast unit. The at least one recognizing unit includes a first dielectric material layer, and the at least one contrast unit includes a second dielectric material layer. The first dielectric material layer and the second dielectric material layer are made of a same material. The first dielectric material layer exhibits piezoelectric properties. A piezoelectric strain constant of the first dielectric material layer is greater than a piezoelectric strain constant of the second dielectric material layer.

A method of making an acoustic sensor (e.g., a piezoelectric sensor for a piezoelectric microelectromechanical systems microphone) includes forming or depositing one or more piezoelectric layers to define a beam extending between a proximal portion and a distal tip (e.g., unsupported free end), the beam having a width in plan view that is greater at a location distal of the proximal portion than at the proximal portion. The method also comprises attaching the beam to a substrate in cantilever form so that the proximal portion of the beam is anchored to the substrate and the distal tip is a free unsupported end of the beam. One or more electrodes are disposed on or in the proximal portion of the beam.

An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.

A piezoelectric thin film 3 contains a metal oxide, the metal oxide contains bismuth, potassium, titanium, iron and element M, the element M is at least one of magnesium and nickel, at least a part of the metal oxide is a crystal having a perovskite structure, and a (001) plane, a (110) plane or a (111) plane of the crystal is oriented in a normal direction dn of the surface of the piezoelectric thin film 3.

A touch-sensitive assembly and method of making includes a first electrically conductive layer disposed on a first substrate and a second electrically conductive layer disposed on a second substrate. A piezoelectric film is disposed between the first electrically conductive layer and the second electrically conductive layer. The piezoelectric film includes a plurality of aligned piezoelectric particles disposed in a polymeric matrix and is characterized by a haze value of about 5% or less.

A display device that senses externally applied pressure and a change in the resonant frequency of a piezoelectric element. The display device includes a piezoelectric sensor layer including a piezoelectric sensor; and a display panel disposed on the piezoelectric sensor layer. The piezoelectric sensor includes: a piezoelectric element having a first electrode, a second electrode facing the first electrode, and a piezoelectric material disposed between the first electrode and the second electrode; an alternating current (AC) voltage generator connected to the first electrode and applies a voltage having a resonance frequency to the piezoelectric element. A sensing circuit connected to the second electrode is configured to measure a change in impedance of the piezoelectric element.

An ultrasonic sensor includes a piezoelectric body including first and second surfaces. First and second electrodes are respectively provided on the first and second surfaces. The second electrode is opposed to the first electrode with the piezoelectric body interposed therebetween. A third electrode is provided on the second surface. The third electrode is spaced apart from the second electrode. The third electrode is electrically connected to the first electrode. When viewed from a thickness direction in which the first surface and the second surface are arranged, the second electrode extends to both end edges of the second surface in a first direction and is spaced apart from both end edges of the second surface in a second direction orthogonal to the first direction.