A power generator includes layered-polymer piezoelectric element that is arranged on an object to be a heat source and a vibration source, and that generates electric power according to vibration transmitted from the object; a first heat conductor containing a flexible material that is arranged on the object, and that conducts heat from the object. The power generator includes a second heat conductor that is arranged on the first heat conductor and the layered-polymer piezoelectric element, and that conducts heat from the first heat conductor. Furthermore, the power generator includes a thermoelectric element that is arranged on the second heat conductor so as to be layered on the second heat conductor on the layered-polymer piezoelectric element, and that generates electric power according to inner temperature difference between temperature on a heat absorbing side obtained by the second heat conductor and temperature on a heat releasing side.

Provided herein is a method including bonding a first oxide layer on a handle substrate to a second oxide layer on a complementary metal oxide semiconductor (“CMOS”), wherein the fusion bonding forms a unified oxide layer including a diaphragm overlying a cavity on the CMOS. The handle substrate is removed leaving the unified oxide layer. A piezoelectric film stack is deposited over the unified oxide layer. Vias are formed in the piezoelectric film stack and the unified oxide layer. An electrical contact layer is deposited, wherein the electrical contact layer electrically connects the piezoelectric film stack to an electrode on the CMOS.

A piezoelectric device includes a first region for receiving a pressing operation and a second region located outside of the first region. A piezoelectric element outputs a stronger potential when a pressing operation is applied to the first region than when the pressing operation is applied to the second region.

A device (10) including a deformable shell (12) delimiting an inner space (14), and: a resilient band (18, 30, 32) suspended in the inner space (14) and including two ends secured to the deformable shell (12), said band (18, 30, 32) including a piezoelectric material (30, 32) to generate an electric voltage under the effect of the deformation of the shell (12) and two electrodes for collecting the voltage; and an electronic circuit (34) for processing the voltage, arranged on the resilient band (18, 30, 32) and connected to the electrodes of the resilient band (18, 30, 32).

A monolithically integrated multi-sensor (MIMS) is disclosed. A MIMs integrated circuit comprises a plurality of sensors. For example, the integrated circuit can comprise three or more sensors where each sensor measures a different parameter. The three or more sensors can share one or more layers to form each sensor structure. In one embodiment, the three or more sensors can comprise MEMs sensor structures. Examples of the sensors that can be formed on a MIMs integrated circuit are an inertial sensor, a pressure sensor, a tactile sensor, a humidity sensor, a temperature sensor, a microphone, a force sensor, a load sensor, a magnetic sensor, a flow sensor, a light sensor, an electric field sensor, an electrical impedance sensor, a galvanic skin response sensor, a chemical sensor, a gas sensor, a liquid sensor, a solids sensor, and a biological sensor.

A housing which is foldable along a folding position into a folded state. A displacement detection sensor is located in the housing and has a displacement detection film having a main surface. First and second electrodes are disposed on first and second spaced regions of the main surface, respectively. The displacement detection film is disposed in the housing so as to straddle the folding position with the first region of the main surface, and with it the first electrode, being located on a first side of the folding position and a second region of the main surface, and with it the second electrode, being located on a second, opposite side of the folding position.

A piezoelectric capacitor includes A) a composite article that has 1) a dry piezoelectric layer (dry PL); 2) a first dry electrode comprising a dry electrically-conductive layer arranged contiguously with a first opposing surface of the dry PL; and 3) a second dry electrode arranged contiguously with a second opposing surface of the dry PL. The dry electrically-conductive layer has essentially (a) an electrically-conductive material; and (b) particles having a Young's modulus that is different from the Young's modulus of the (a) electrically-conductive material by at least 10%. The capacitor also has B) electrical communication means attached to both electrodes for electrical communication of the composite article with an external electrical circuit.

A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the top membrane and the electrode and the interconnecting structure defines a spacing between the top membrane and the bottom membrane.

A vibrational multi-morph piezoelectric energy harvester includes a composite shim having a parallelepiped form with a thickness dimension made smaller than width and length dimensions, and having a stiffness shifting from one extremity to the other extremity to minimize mechanical constraints developed at a clamping area; a seismic mass mounted at an end opposite to the clamping area to mechanically match the system to the surrounding vibration resonance; one or more piezoelectric layers laminated on said composite shim; and electrodes plated onto the one or more piezoelectric layers for connection to an electronic harvesting circuit, a battery, or a super capacitor.

A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.