The present disclosure provides an ultrasonic transducer and a method for manufacturing an ultrasonic transducer, a display substrate and a method for manufacturing a display substrate. The method for manufacturing the ultrasonic transducer includes: forming a via hole in a substrate; forming a structural layer on a side of the substrate, the structural layer cover the via hole; and etching the structural layer from a side of the substrate away from the structural layer by using the substrate formed with the via hole as a blocking layer, to form a cavity at a position of the structural layer corresponding to that of the via hole.

A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.

Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.

A backlit haptic keyboard of an information handling system may comprise a contact foil placed between a coversheet and a support layer, operatively coupling an LED controller to an LED via metallic traces printed upon a top surface of the contact foil and operatively coupling a piezoelectric element to a keyboard controller via metallic traces printed upon a bottom surface of the contact foil. The system may further comprise the LED placed between the coversheet and the contact foil, and a piezoelectric element placed between the contact foil and support layer to receive an applied mechanical stress at a key and generate an electric actuation signal. A keyboard controller of the information handling system may receive an electric actuation signal from the piezoelectric element via the bottom metallic traces and send an electrical haptic response control signal to the piezoelectric element to cause it to generate haptic feedback at the key.

A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.

A method of manufacturing a semiconductor device includes: forming a first substrate includes a membrane stack over a first dielectric layer, the membrane stack having a first electrode, a second electrode over the first electrode and a piezoelectric layer between the first electrode and the second electrode, a third electrode over the first dielectric layer, and a second dielectric layer over the membrane stack and the third electrode; forming a second substrate, including: a redistribution layer (RDL) over a third substrate, the RDL having a fourth electrode; and a first cavity on a surface of the RDL adjacent to the fourth electrode; forming a second cavity in one of the first substrate and the second substrate; and bonding the first substrate to the second substrate.

A vibration device includes a protective cover that transmits light with a predetermined wavelength, a first cylindrical body that holds the protective cover at one end, a plate-shaped plate spring that supports the other end of the first cylindrical body, a second cylindrical body that supports, at one end, a portion of the plate spring in an outer side portion of a portion that supports the first cylindrical body, and a plurality of piezoelectric elements on side surfaces of the second cylindrical body and that vibrates in a direction perpendicular to a penetrating direction of the second cylindrical body.

The present application provides a human joint energy harvesting apparatus for capturing the biomechanical energy of a joint to generate electrical energy. The generated electrical energy may provide a real-time power supply to the wearable electronics. The apparatus employs a linear slide rail mechanism and cooperates with the user's first limb and second limb to form a slider-crank mechanism, which converts the rotating motion of the joint into a linear motion of the linear slide rail mechanism. The bending beam converts the linear motion of the linear slide rail mechanism into a bending motion. A piezoelectric film may be bonded to the upper and lower surfaces of the bending beam. During walking, the bending beam is deformed, causing the piezoelectric film to be stretched or compressed to generate electrical energy. To harvest more energy, the bending beam used in the apparatus is designed to be subjected to forced motion and free vibration, and a proof mass is attached to it. The present application also provides a wearable electronic device equipped with the human joint energy harvesting apparatus.

A piezoelectric element includes a first piezoelectric layer which has a first polarization axis direction in a thickness direction of the first piezoelectric layer and is made of AlN. A second piezoelectric layer made of GeAIN which is deposited on the first piezoelectric layer and has a second polarization axis direction opposite to the first polarization axis direction. A first electrode is provided on a side of the first piezoelectric layer which is opposite from a side where the second piezoelectric layer is disposed. A second electrode provided on a side of the second piezoelectric layer which is opposite from a side where the first piezoelectric layer is disposed.

Disclosed herein are energy harvesting devices and sensors, and methods of making and use thereof. The energy harvesting devices can comprise a membrane disposed on a substrate, wherein the membrane comprises a two-dimensional (2D) material and one or more ripples; and a component electrically, magnetically, and/or mechanically coupled to the membrane and/or the substrate, such that the component is configured to harvest energy from the membrane. The sensors can comprise a membrane disposed on a substrate, wherein the membrane comprises a two-dimensional material one or more ripples; and a component electrically, magnetically, and/or mechanically coupled to the membrane and/or the substrate, such that the component is configured to detect a signal from the membrane.