H10N30/508

Method for producing piezoelectric multi-layered components
10686121 · 2020-06-16 · ·

The present invention relates to a method for producing piezoelectric multi-layered components (2), which comprises the following steps: applying an electrode material (5) to green sheets (3) containing a piezoelectric material, applying a layer of a first auxiliary material (9) to at least one green sheet (3) containing the piezoelectric material, forming a stack (1), in which the green sheets (3), to which electrode material (5) is applied, are arranged one on top of another, wherein at least one ply of the green sheet (3), to which the layer of the first auxiliary material (9) is applied, is arranged in the stack (1), sintering the stack (1), wherein the layer of the first auxiliary material (9) is thinned, and firing the stack (1), wherein the stack (1) is singulated along the at least one ply into at least two multi-layered components (2).

Method for producing ceramic multi-layer components

A method can be used for producing ceramic multilayer components. The method includes providing green layers for the ceramic multilayer components, stacking the green layers into a stack, and subsequently compressing the stack to form a block. Furthermore, the method includes isolating the block into partial blocks that each have a longitudinal direction, thermally treating the partial blocks, subsequently mechanically machining surfaces of the partial blocks, and providing the partial blocks with outer electrodes and isolating the partial blocks in each case transversely to the longitudinal direction into individual ceramic multilayer components.

Piezoelectric element and liquid ejection head

A piezoelectric element includes a first electrode disposed over a substrate, an orientation control layer disposed over the first electrode and containing titanium, a piezoelectric layer disposed over the orientation control layer and having a perovskite crystal structure, and a second electrode disposed over the piezoelectric layer. The orientation control layer has a thickness in the range of 5.0 nm to 22.0 nm.

PIEZOELECTRIC FILM AND LAMINATED PIEZOELECTRIC ELEMENT
20240023449 · 2024-01-18 · ·

Provided is a piezoelectric film capable of suppressing a decrease in sound pressure even in a case of long-term use or repeated use. The piezoelectric film is a piezoelectric film including a piezoelectric layer consisting of a polymer-based piezoelectric composite material that contains piezoelectric particles in a matrix containing a polymer material, and electrode layers formed on both surfaces of the piezoelectric layer, in which in a case where a scratch test is performed on a surface of the piezoelectric layer with a load of 3 mN using an indenter having a tip curvature radius of 1 m, which vertically presses the surface, a scratch depth is 0.3 m or greater and 3.2 m or less.

Piezoelectric element

A piezoelectric element includes a piezoelectric body layer, a first electrode, a second electrode, a third electrode, and a first through-hole conductor. The piezoelectric body layer has rectangular first and second principal surfaces opposing each other, and includes a piezoelectric material. The first electrode is provided on the first principal surface. The second electrode is provided on the first principal surface in such a way that the second electrode is separated from the first electrode. The third electrode is provided on the second principal surface in such a way that the third electrode opposes the first electrode. The through-hole conductor penetrates the piezoelectric body layer and is connected to the second electrode and the third electrode. The first electrode has a round corner when seen in an opposing direction of the first and second principal surfaces.

Strain gauge driving piezoelectric device

A strain gauge driving piezoelectric device is disclosed. A piezoelectric element is arranged between a plurality of layers of first strain gauges correspondingly spaced from each other and a plurality of layers of second strain gauges correspondingly spaced from each other. The first strain gauges and the second strain gauges are arranged on different layers of the flexible circuit board. The first strain gauges and the second strain gauges generate a driving voltage according to variations of resistance values of the first strain gauges and the second strain gauges when a stress is applied to the flexible circuit board, and the driving voltage induces the piezoelectric effect of the piezoelectric element and then drives the piezoelectric element to generate an output voltage for haptic feedback.

METHOD OF MANUFACTURING AN INKJET PRINT HEAD AND AN INKJET PRINT HEAD WITH INDUCED CRYSTAL PHASE CHANGE ACTUATION
20200111947 · 2020-04-09 · ·

A method for manufacturing an inkjet print head includes determining a misfit strainelectric field crystal phase relation for at least one composition of a piezoelectric material; selecting a misfit strain value and a composition of the piezoelectric material based on the determined misfit strainelectric field crystal phase relation for said at least one composition; and based on the selected misfit strain and the selected composition of the piezoelectric material, forming a base layer and an actuator stack on the base layer, the actuator stack including the piezoelectric material, wherein the base layer and the actuator stack have predetermined properties providing the selected misfit strain value and the selected composition. Thus, an inkjet print head having a piezoelectric actuator that is operated on the basis of a crystal phase change is reliably manufacturable.

NOVEL INTEGRATION SCHEME FOR BREAKDOWN VOLTAGE ENHANCEMENT OF A PIEZOELECTRIC METAL-INSULATOR-METAL DEVICE

Various embodiments of the present disclosure are directed towards a piezoelectric metal-insulator-metal (MIM) device including a piezoelectric structure between a top electrode and a bottom electrode. The piezoelectric layer includes a top region overlying a bottom region. Outer sidewalls of the bottom region extend past outer sidewalls of the top region. The outer sidewalls of the top region are aligned with outer sidewalls of the top electrode. The piezoelectric layer is configured to help limit delamination of the top electrode from the piezoelectric layer.

Staggering of openings in electrodes for crack mitigation

A transducer comprising: at least one piezoelectric layer; a first patterned conductive layer that is patterned with a first opening; a second patterned conductive layer that is patterned with a second opening; wherein at least one piezoelectric layer is between the first and the second patterned conductive layers in a stack; and wherein a position of the first opening is staggered relative to a position of the second opening in the stack to mitigate an occurrence of crack propagation through the layers.

Hybrid structure and a method for manufacturing the same
11930710 · 2024-03-12 · ·

A hybrid structure and a method for manufacturing a hybrid structure comprising an effective layer of piezoelectric material having an effective thickness and disposed on a supporting substrate having a substrate thickness and a thermal expansion coefficient lower than that of the effective layer includes: a) a step of providing a bonded structure comprising a piezoelectric material donor substrate and the supporting substrate, b) a first step of thinning the donor substrate to form a thinned layer having an intermediate thickness and disposed on the supporting substrate, the assembly forming a thinned structure; c) a step of heat treating the thinned structure at an annealing temperature; and d) a second step, after step c), of thinning the thinned layer to form the effective layer. The method also comprises, prior to step b), a step a) of determining a range of intermediate thicknesses that prevent the thinned structure from being damaged during step c).