A method may include measuring an electrical parameter of an electromagnetic load having a moving mass during the absence of a driving signal actively driving the electromagnetic load, measuring a mechanical parameter of mechanical motion of a host device comprising the electromagnetic load, correlating a relationship between the mechanical parameter and the electrical parameter, and calibrating the electromagnetic load across a plurality of mechanical motion conditions based on the relationship.

A piezoelectric actuator 10 includes: a piezoelectric element 11; an external electrode 12 covering partially a first surface 11a of the piezoelectric element 11 in a first direction; a wiring member 14; and a conductive joining member 20 joining the wiring member 14 to the external electrode 12, wherein the conductive joining member 20 has an air gap 70 formed between the external electrode 12 and the wiring member 14 in a region overlapping with the wiring member 14 as viewed in the first direction, and wherein the conductive joining member 20 extends to an edge 21 of the external electrode 12 or extends to the first surface 11a of the piezoelectric element 11 beyond the edge 21 of the external electrode 12.

Various methods and systems are provided for a pulse circuit of a transmitter of an ultrasound system. In one example, the system may include a pulse circuit with transistors driving an ultrasound transducer of the ultrasound system, whereby the switching on and off of the transistors is mediated via one or more dynamic currents flowing from the gates of one or more of the transistors.

The proposed device comprises a plurality of electroactive material actuator units arranged as a set. Control data for driving individual units is transferred over three shared power lines. The electroactive material actuator of each unit is driven depending on control data received from the power lines via a demodulator, a controller, and a driver.

A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.

Provided is an ultrasound apparatus including: a transmitter configured to generate and output a transmission signal; an ultrasound probe configured to convert the transmission signal output from the transmitter into an ultrasound signal and transmit the ultrasound signal to a target object, and receive an echo signal reflected from the target object and output a reception signal on the basis of the echo-signal; a transmission/reception switch configured to attenuate the transmission signal output from the transmitter and output the attenuated transmission signal, and output the reception signal output from the ultrasound probe; and a receiver configured to receive the attenuated and output transmission signal and the output reception signal, and detect transmission waveform information on the basis of the attenuated transmission signal.

A pressure detection sensor having a piezoelectric film with a first region and a second region located outside the first region, the piezoelectric film being deformable by a pressing operation, a first electrode pair disposed on a first main surface and a second main surface in the first region of the piezoelectric film, and a second electrode pair formed on a first main surface and a second main surface in the second region of the piezoelectric film. When the piezoelectric film receives a pressing operation, the first electrode pair outputs a voltage having a polarity different from that of the second electrode pair.

In a vibration unit, a first electrode of a sensor circuit of a control unit is electrically connected to a first external electrode of a first piezoelectric element, a second electrode of the sensor circuit is electrically connected to a second external electrode of the first piezoelectric element, a first electrode of a drive circuit is electrically connected to a first external electrode of a second piezoelectric element, and a second electrode of the drive circuit is electrically connected to a second external electrode of the second piezoelectric element. Only a relatively small voltage induced by an electromotive force occurring due to the flexure of the first piezoelectric element is applied to the sensor circuit. In addition, only a relatively large drive voltage to be applied to the second piezoelectric element is applied to the drive circuit.

A piezoelectric sensor includes: a lower substrate; a plurality of sensing transistors that are disposed on the lower substrate; a lower electrode that is disposed to cover the plurality of sensing transistors; a piezoelectric material layer that is disposed on the lower electrode; and an upper electrode that is disposed on the piezoelectric material layer. The piezoelectric material layer has a first thickness in a plurality of first areas in which the plurality of sensing transistors are disposed and has a second thickness which is greater than the first thickness in a second area in which the plurality of sensing transistors are not disposed. Accordingly, it is possible to further accurately and finely detect various types of biometric information.

A projection exposure apparatus comprises a projection objective, and the projection objective comprises an optical device, wherein the optical device comprises an optical element having an optically effective surface and an electrostrictive actuator. The electrostrictive actuator is deformable by a control voltage being applied. The electrostrictive actuator is functionally connected to the optical element to influence the surface shape of the optically effective surface. A control device supplies the electrostrictive actuator with the control voltage. A measuring device is configured, at least at times while the electrostrictive actuator influences the optically effective surface of the optical element, to measure directly and/or to determine indirectly the temperature and/or a temperature change of the electrostrictive actuator and/or the surroundings thereof to take account of a temperature-dependent influence during driving of the electrostrictive actuator by the control device.