In a switch in which one end portion of a blade is pivotally attached to a fixed contactor and another end portion of the blade is brought into pressure contact with a fixed contactor by rotational operation of the blade, at least one slit is provided in each of a conductive contact surface, with respect to the fixed contactor, of the one end portion of the blade and a conductive contact surface, with respect to the fixed contactor, of the other end portion of the blade, so as to divide each of the conductive contact surfaces, thereby achieving multi-point contact on each of the conductive contact surfaces, and a thickness of a contact-pressure spring fixing portion of the blade at which a contact-pressure spring for bringing the other end portion into pressure contact with the fixed contactor is made smaller than that of the other end portion.

A plasma processing method according to an exemplary embodiment includes applying a first direct-current voltage to a lower electrode of a substrate support provided in a chamber of a plasma processing apparatus, in a first period during generation of plasma in the chamber. The plasma processing method further includes applying a second direct-current voltage to the lower electrode in a second period different from the first period during generation of plasma in the chamber. The second direct-current voltage has a level different from a level of the first direct-current voltage. The second direct-current voltage has a same polarity as a polarity of the first direct-current voltage.

A plasma reactor includes a processing chamber having a lower processing portion having an axis of symmetry and an array of cavities extending upwardly from the lower processing portion. A gas distributor couples plural gas sources to a plurality of gas inlets of the cavities, and the gas distributor includes a plurality of valves with each valve selectively connecting a respective gas inlet to one of the plural gas sources. Power is applied by an array of conductors that includes a respective conductor for each respective cavity with each conductor adjacent and surrounding a cavity. A power distributor couples a power source and the array of conductors, and the power distributor includes a plurality of switches with a switch for each respective conductor.

A plasma reactor includes a processing chamber having a lower processing portion having an axis of symmetry and an array of cavities extending upwardly from the lower processing portion. A gas distributor couples plural gas sources to a plurality of gas inlets of the cavities, and the gas distributor includes a plurality of valves with each valve selectively connecting a respective gas inlet to one of the plural gas sources. Power is applied by an array of conductors that includes a respective conductor for each respective cavity with each conductor adjacent and surrounding a cavity. A power distributor couples a power source and the array of conductors, and the power distributor includes a plurality of switches with a switch for each respective conductor.

Provided is a handcart circuit breaker and a contact device thereof including a contact arm and a moving contact. Inner walls of a cylindrical contact finger base in axial direction respectively have a contact finger groove with a spring contact finger for plugging the contact arm and a fixed contact; a rear of the contact finger base sleeves with a front of the contact arm having a positioning groove larger than a fitting end of the support pin, the contact finger base has support pins extending into the contact finger base; a diameter of a circle corresponding to the fitting end of each support pin is larger than a diameter of a circle corresponding to a bottom of each positioning groove; the contact finger base connects with the contact arm and an elastic support structure is arranged between the contact arm and the inner wall of the contact finger base.

A medium or high voltage switch including a moveable contact element and a stationary contact element is described. Therein, a moveable-contact guiding portion of the moveable contact element and a stationary-contact guiding portion of the stationary contact element are shaped for establishing a spherical-bearing-type mechanical connection between each other, thereby aligning a center of the moveable-contact guiding portion with a center of the stationary-contact guiding portion while allowing an angular flexion between the moveable and stationary contact elements. Furthermore, at least one of the stationary-contact guiding portion and the moveable-contact guiding portion is electrically insulating.

A method, apparatus and system for initiating a plasma with a low pressure inductively coupled RF plasma to dissociate one or more gases, the method including supplying one or more gases from a source to an inductively coupled plasma discharge chamber; applying RF power to the plasma discharge chamber by capacitive coupling to dissociate the one or more gases and create a plasma; preventing increased contamination from the capacitive electrodes by confining the plasma with at least one constriction acting as an improved power density device; and withdrawing the dissociated one or more gases from the plasma discharge chamber through at least one constriction.

A rotary switch device includes a terminal base to which a center portion contact and a fixed contact member are fixed, a movable contact member, and a support portion. The movable contact member includes a contact protrusion part which is pressed in contact with the center portion contact at one end of the movable contact member and a first contact surface which is in contact with the fixed contact member at another end of the movable contact member, and which is operated to rotate around the center portion contact so as to short-circuit between the center portion contact and the fixed contact member at a conductive rotation position.

A rotary switch device includes a terminal base to which a center portion contact and a fixed contact member are fixed, a movable contact member, and a support portion. The movable contact member includes a contact protrusion part which is pressed in contact with the center portion contact at one end of the movable contact member and a first contact surface which is in contact with the fixed contact member at another end of the movable contact member, and which is operated to rotate around the center portion contact so as to short-circuit between the center portion contact and the fixed contact member at a conductive rotation position.

A capacitor capable of releasing reactive oxygen species and reactive nitrogen species after powering of claim 1 is composed of the dielectric material. A plurality of through holes are designed on the capacitor, the through holes being used as air gaps to supply plasma gas and blow a fan to increase the gas flow, and the voltage being connected to the two corresponding electrode edges of the capacitor so that the capacitor generating a heating temperature (lower than 200 degrees Celsius). Thereby, after the capacitor is perforated to form honeycomb shape and powered, the air surrounding the capacitor flowing through the capacitor is ionized to the oxygen ion and nitrogen ion via heating and charge-discharge, generates plasma at room temperature and atmospheric pressure and releases the reactive oxygen ions and reactive nitrogen ions healing and helpful for body healing.