Provided is an X-ray generating tube with improved withstand voltage property by a simple structure, the X-ray generating tube including a cathode connected to one opening of an insulating tube and an anode connected to the other opening, in which a resistive film having a lower sheet resistance value than that of the insulating tube is disposed on an outer periphery of the insulating tube, and the cathode and the anode are electrically connected to each other via the resistive film.

Provided is an X-ray generating tube with improved withstand voltage property by a simple structure, the X-ray generating tube including a cathode connected to one opening of an insulating tube and an anode connected to the other opening, in which a resistive film having a lower sheet resistance value than that of the insulating tube is disposed on an outer periphery of the insulating tube, and the cathode and the anode are electrically connected to each other via the resistive film.

An X-ray source with optical indication of radiation, which can be used in various measuring devices for parameters control and visualization of structure of industrial and biological objects, is proposed. The source comprises a vacuum housing, an anode irradiated by electrons and generating the divergent flux of radiation, an exit window for X-ray radiation, means for optical indication of X-ray radiation beam including a source of optical radiation and an optical mirror. The anode is made composite in the form of a thin film and a radiolucent substrate luminescent in the optical range. The anode structure is an exit window of the source, and behind it the coaxially arranged means of collimation and focusing of X-ray and optical radiation and means of optical visualization of X-ray focus are mounted. The proposed device significantly increases the accuracy and informativity of optical indication of X-ray radiation parameters.

An X-ray source with optical indication of radiation, which can be used in various measuring devices for parameters control and visualization of structure of industrial and biological objects, is proposed. The source comprises a vacuum housing, an anode irradiated by electrons and generating the divergent flux of radiation, an exit window for X-ray radiation, means for optical indication of X-ray radiation beam including a source of optical radiation and an optical mirror. The anode is made composite in the form of a thin film and a radiolucent substrate luminescent in the optical range. The anode structure is an exit window of the source, and behind it the coaxially arranged means of collimation and focusing of X-ray and optical radiation and means of optical visualization of X-ray focus are mounted. The proposed device significantly increases the accuracy and informativity of optical indication of X-ray radiation parameters.

Provided is an X-ray generator including an electron passage in an electron-passage forming member; and a target on an insulative substrate. The transmission X-ray generator irradiates the target with electrons that have passed through the electron passage to generate X-rays. The target is provided at a central region of the substrate; the electron passage accommodates a secondary-X-ray generating section that generates X-rays by irradiation with electrons reflected from the target; the secondary-X-ray generating section and the target are disposed so that both of X-rays generated by direct irradiation of the target with the electrons and X-rays generated by irradiation of the secondary-X-ray generating section with the electrons reflected from the target are radiated to the outside; and at least part of the peripheral region of the substrate has higher transmittance for the X-rays generated at the secondary-X-ray generating section than the central region of the substrate.

A radiation window foil is provided for an X-ray radiation window. It includes a continuous window layer with a first side and a second side. A first mesh or grid layer is stacked on or bonded to the first side of the continuous window layer. A second mesh or grid layer is stacked on or bonded to the second side of the continuous window layer.

A radiation window foil is provided for an X-ray radiation window. It includes a continuous window layer with a first side and a second side. A first mesh or grid layer is stacked on or bonded to the first side of the continuous window layer. A second mesh or grid layer is stacked on or bonded to the second side of the continuous window layer.

For manufacturing a radiation window for an X-ray measurement apparatus, and etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a structural layer on an opposite side of said etch stop layer than said carrier. The combined structure comprising said carrier, said etch stop layer, and said structural layer is attached to a region around an opening in a support structure with said structural layer facing said support structure. The carrier is etched away.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

Disclosed is a high-voltage X-ray tank with a miniaturized shielding structure which includes an X-ray shielding part having a cylindrical structure in which an X-ray tube for radiating X-rays is accommodated and an X-ray radiation port is formed in one side surface thereof, a main block body having a box-shaped structure in which the X-ray shielding part is mounted on one side surface thereof and which is electrically connected to the X-ray shielding part, and a lens part having a structure which is mounted on the one side surface of the X-ray shielding part and focuses X-rays radiated through the X-ray radiation port on a preset position. According to the present invention, the high-voltage X-ray tank, in which insulating and shielding performance is improved and which has an ultra-small and ultra-light-shielding structure based on the improved insulating and shielding performance, can be provided.