Patent classifications
H01J49/105
Laser Ablation Probe
A laser ablation probe comprises a tubular element adapted for conducting a carrier fluid in a substantially laminar flow. The tubular element comprises a fluid inlet and a fluid outlet arranged at opposite end portions of the tubular element for enabling the carrier fluid to flow through the tubular element. The tubular element further comprises a central portion having an aperture defined therein for admitting an aerosol generated by laser ablation from a material sample into the carrier fluid flow when this sample is positioned outside the tubular element at a distance in the range of 0 μm to 100 μm from the aperture.
Automated system for remote inline concentration and homogenization of ultra-low concentrations in pure chemicals
Systems and methods are described to concentrate and homogenize a remote sample for analysis. A sample concentration and homogenization system embodiment includes, but is not limited to, at least a first valve, at least a first column fluidically coupled to the first valve, a flow meter fluidically coupled with the first column when the first valve is in a first flow path configuration to measure an amount of the liquid sample passed through the first column, and a homogenization valve including a sample homogenizing loop in which the concentrated sample is homogenized.
Systems for integrated decomposition and scanning of a semiconducting wafer
Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.
Ion Source
A method of ionising a sample is provided, comprising providing a fluid sample, wherein the fluid sample contains an analyte, applying one or more pulses of acoustic energy to the fluid sample to cause a spray of the fluid sample to eject from the surface of the fluid sample, and applying an AC, RF or alternating voltage to the fluid sample using an electrode.
Method of manufacturing chemical fluid for manufacturing electronic material, pattern forming method, method of manufacturing semiconductor device, chemical fluid for manufacturing electronic material, container, and quality inspection method
In a method of manufacturing a chemical fluid for manufacturing an electronic material, a method of reducing particulate metal in the chemical fluid is selected according to a concentration of particulate metal including an iron atom, a concentration of particulate metal including a copper atom, and a concentration of particulate metal including a zinc atom which are measured by SP ICP-MS in the chemical fluid, and at least one of the concentration of particulate metal including an iron atom, the concentration of particulate metal including a copper atom, or the concentration of particulate metal including a zinc atom is reduced by using the selected reducing method.
Quadrupole mass spectrometer
A quadrupole mass spectrometer includes: a quadrupole mass filter with four rod electrodes arranged so as to surround a central axis; and a magnet that forms a magnetic field in at least a part of an inside of the quadrupole mass filter in a direction intersecting the central axis.
CHEMICAL DIGESTION METHODS OF QUANTIFICATION FOR WATER AND DEBRIS MIXTURES
With a water, particulate and fibre mixture, a method of quantifying fibre content may include providing a sample of the mixture, filtering the sample to produce a particulate and fibre mixture, burning the particulate and fibre mixture to produce a fibre sample, and dissolving the fibre sample to produce a fibre solution. The fibre solution may be analyzed to determine an elemental content of the fibre solution. The elemental content may be compared to a known elemental content to estimate the fibre content.
Stabilized ICP emission spectrometer and method of using
An ICP emission spectrometer is schematically configured to include an inductively coupled plasma generation unit, a light condensing unit, a spectroscope, a detector, and a controller. The detector includes a photomultiplier and has a detector controller and an input unit. The photomultiplier has voltage dividing resistors, which make an amplification factor not to become constant immediately due to a change in an application voltage applied to the photomultiplier, but the detector controller controls an idle voltage and an idle voltage application time so that a multiplication factor becomes constant, during a period from when analysis conditions are input to the input unit in advance until a sample containing an analysis-targeted element is introduced into the inductively coupled plasma generation unit.
METHOD FOR SUPPLYING GAS FOR PLASMA BASED ANALYTICAL INSTRUMENT
To achieve an effective gas filtering in a plasma spectrometric apparatus using a gas of a comparatively high consumption flow rate, and to improve the analytical ability, there is provided a plasma spectrometric apparatus containing a sample introducer for producing and delivering an injector gas containing an analyte sample, a plasma generator for generating plasma into which the injector gas is introduced, and an analyzer disposed subsequent to the plasma generator for analyzing the analyte sample. The plasma spectrometric apparatus contains a first gas line for supplying gas to the sample introducer, a second gas line for supplying gas to the plasma generator, and a filter located in the first gas line for removing impurities contained in the gas.
Radio-frequency ionization of chemicals
Methods and systems for performing ionization, including applying radio frequency energy to a chemical compound so that at least one ion of the compound or of a compound fragment is generated, and detecting at least one such ion.