The present disclosure relates to systems and methods for ionizing a surface. In one implementation, an ionization source may include a microhollow cathode plasma or micro cavity plasma (MCP)-based ion source having a cavity and generating a plasma. A gas stream may pass through the cavity and transport the plasma. The source may further include one or more conductive electrodes located downstream from the MCP and configured to have a potential relative to the MCP such that positive and negative ions included in the plasma are carried through the electrodes by the gas stream. In another implementation, a mixer may mix a dopant (e.g. water) with the gas stream (e.g. air) entering the discharge. The disclosure also relates to a surface ionization probe.

A device and method is described for analysing the elemental composition of a liquid sample utilizing a combination of electrochemical pre-concentration followed by spectrochemical analysis of analytes in a single device. The device consists of two electrodes for the purpose of pre-concentration of the analyte ions by electrodeposition, a DC power supply/potentiostat/galvanostat, a high voltage power supply capable of creating an electrical discharge such as arc, spark, glow discharge or plasma, a spectrometer capable of recording a spectrum generated during such discharges as well as a pump(s) for pumping the analyte containing solution. Such a device is autonomous, field-deployable and capable of providing online analysis.

A device and method is described for analysing the elemental composition of a liquid sample utilizing a combination of electrochemical pre-concentration followed by spectrochemical analysis of analytes in a single device. The device consists of two electrodes for the purpose of pre-concentration of the analyte ions by electrodeposition, a DC power supply/potentiostat/galvanostat, a high voltage power supply capable of creating an electrical discharge such as arc, spark, glow discharge or plasma, a spectrometer capable of recording a spectrum generated during such discharges as well as a pump(s) for pumping the analyte containing solution. Such a device is autonomous, field-deployable and capable of providing online analysis.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.

A solution-cathode glow discharge (SCGD) spectrometry apparatus may comprise an SCGD source and a mass or ion mobility spectrometer. A method for ionizing a molecular analyte may comprise contacting the molecular analyte with a plasma discharge to form ions and separating the ions in a mass spectrometer or ion mobility spectrometer. The contacting step may occur under atmospheric pressure and/or ambient conditions. The molecular analyte may be fragmented by the plasma discharge.

The invention relates to an ion source for generating ions for calibrating a mass spectrometer and methods for calibrating the mass spectrometer using the generated ions. The ion source includes a container used for containing a sample; an ionization device used for ionizing a sample by plasma discharge to generate ions for calibrating the mass spectrometer, where the ionization device operates at atmospheric pressure; and a delivery device for delivering the sample from the container to the ionization device. The method includes generating ions by plasma discharge at atmospheric pressure using a sample; inputting at least one part of the ions into the mass spectrometer to obtain a mass spectrogram; and calibrating the mass spectrometer according to the mass spectrogram.

The invention relates to an ion source for generating ions for calibrating a mass spectrometer and methods for calibrating the mass spectrometer using the generated ions. The ion source includes a container used for containing a sample; an ionization device used for ionizing a sample by plasma discharge to generate ions for calibrating the mass spectrometer, where the ionization device operates at atmospheric pressure; and a delivery device for delivering the sample from the container to the ionization device. The method includes generating ions by plasma discharge at atmospheric pressure using a sample; inputting at least one part of the ions into the mass spectrometer to obtain a mass spectrogram; and calibrating the mass spectrometer according to the mass spectrogram.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

A mass spectrometer is disclosed comprising a glow discharge device within the initial vacuum chamber of the mass spectrometer. The glow discharge device may comprise a tubular electrode located within an isolation valve, which is provided in the vacuum chamber. Reagent vapour may be provided through the tubular electrode, which is then subsequently ionised by the glow discharge. The resulting reagent ions may be used for Electron Transfer Dissociation of analyte ions generated by an atmospheric pressure ion source. Other embodiments are contemplated wherein the ions generated by the glow discharge device may be used to reduce the charge state of analyte ions by Proton Transfer Reaction or may act as lock mass or reference ions.