An X-ray generator includes an X-ray tube, an X-ray tube accommodation portion, and a power source unit having an internal substrate supplying a voltage to the X-ray tube sealed inside an insulating block. Insulating oil is enclosed in a space defined by an upper surface of the insulating block and an inner surface of the X-ray tube accommodation portion. A high-voltage power supply unit connected to a target support portion is disposed on the upper surface. At least one protrusion portion protruding to an insulating valve side beyond a boundary portion where the high-voltage power supply unit, the upper surface, and the insulating oil meet and surrounding the high-voltage power supply unit is provided on the upper surface. An apex portion of the protrusion portion is separated from an imaginary plane including an end portion of the insulating valve and extending in a direction orthogonal to a tube axis.

Various systems are provided for an X-ray system. In one example, the X-ray system comprising a high-voltage connector physically coupled to a cathode of an X-ray tube via a plurality of pins, wherein the pins comprise niobium.

Various systems are provided for an X-ray system. In one example, the X-ray system comprising a high-voltage connector physically coupled to a cathode of an X-ray tube via a plurality of pins, wherein the pins comprise niobium.

A charged particle device includes an electron emitting part for emitting electrons, an electron irradiated part configured to be irradiated with the electrons emitted from the electron emitting part, a container part configured to evacuate an interior thereof and contain the electron irradiated part in the interior thereof, an electric wire containing part configured to be inserted from an outside of the container part via an insertion part provided in the container part to contain an electric wire through which electricity is conducted to the electron irradiated part contained in the container part, and an insertion-part-side protrusion part configured to surround the electric wire containing part and protrude from a vicinity of the insertion part on an inner wall of the container part to an interior of the container part.

A receptacle for receiving a plug connector of a high-voltage cable for a microfocus X-ray tube with a cathode, which has a metal filament and grid cap. The receptacle has a ceramic insulator with three contiguous cavities. The first cavity near the filament includes electrical contacts for the filament and the grid cap. The second cavity includes spring contacts for supplying current to the filament and a center pin for supplying voltage to the grid. The third cavity receives the plug connector. The insulator has a removable grid mounting which is conductively connected to the grid cap of the cathode. The first and second cavities are surrounded in the radial direction by the grid mounting. An air gap extends radially between grid mounting and ceramic body. At the end of the grid mounting remote from the filament is a circumferential groove in the axial direction between the grid mounting and the ceramic insulator.

In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A.sub.1 between an anode axis 02 and an electron-beam axis 01 can be 10 and 80 and an angle A.sub.2 between the anode axis 02 and an x-ray axis 03 can be 10 and 80. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.

In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A.sub.1 between an anode axis 02 and an electron-beam axis 01 can be 10 and 80 and an angle A.sub.2 between the anode axis 02 and an x-ray axis 03 can be 10 and 80. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.

In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A.sub.1 between an anode axis 02 and an electron-beam axis 01 can be 10 and 80 and an angle A.sub.2 between the anode axis 02 and an x-ray axis 03 can be 10 and 80. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.

A target assembly for an x-ray emission apparatus, the apparatus assembly including: a vacuum chamber having at least one conductive wall; an insulating element projecting through the conductive wall; a conductive high voltage element extending along the insulating element from outside the chamber to an end portion of the insulating element furthest from the conductive wall; an x-ray-generating target arranged at the end portion of the insulating element and electrically connected to the high voltage element; and a suppressive electrode arranged at the end portion of the insulating element and configured to suppress acceleration toward the outer surface of the insulating element of electrons which are emitted from a junction between the outer surface of the insulating element and an inner surface of the conductive wall.

An X-ray source (10) for generating X-rays (11) is provided. The X-ray source (10) comprises an emitter arrangement (12) for generating electrons or for generating X-rays, at least one feedthrough (38) for supplying electrical power to the emitter arrangement (12), and an insulator (20) configured for isolating an electrical potential of the at least one feedthrough (38) from a ground potential. Therein, the at least one feedthrough (38) extends at least partly through the insulator (20), and at least a part of the insulator (20) is in thermal contact with at least a part of the emitter arrangement (12). Further, the insulator (20) comprises at least one cooling channel (28) formed completely in an interior volume (25) of the insulator (20) and configured to dissipate heat from the emitter arrangement (12), wherein a distance (29) between an outer surface (26) of the insulator (20) and the cooling channel (28) is at least as large as half of a thickness (27) of the cooling channel (20).