H01L21/6734

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

Various embodiments herein relate to carriers for supporting one or more substrate as the substrates are passed through a processing apparatus. In many cases, the substrates are oriented in a vertical manner. The carrier may include a frame and vertical support bars that secure the glass to the frame. The carrier may lack horizontal support bars. The carrier may allow for thermal expansion and contraction of the substrates, without any need to provide precise gaps between adjacent pairs of substrates. The carriers described herein substantially reduce the risk of breaking the processing apparatus and substrates, thereby achieving a more efficient process. Certain embodiments herein relate to methods of loading substrates onto a carrier.

Apparatus for manufacture of at least two solar cell arrangements, system for manufacture of at least two shingled solar cells, and method for manufacture of at least two solar cell arrangements

The present disclosure provides a support device for conveying at least one solar cell element in a transport direction, wherein the support device comprises a support element configured for supporting the at least one solar cell element and an electric arrangement configured for providing an electrostatic force for holding the at least one solar cell element on the support element.

APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE

An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.

Carrier with vertical grid for supporting substrates in coater
11424109 · 2022-08-23 · ·

Various embodiments herein relate to carriers for supporting one or more substrate as the substrates are passed through a processing apparatus. In many cases, the substrates are oriented in a vertical manner The carrier may include a frame and vertical support bars that secure the glass to the frame. The carrier may lack horizontal support bars. The carrier may allow for thermal expansion and contraction of the substrates, without any need to provide precise gaps between adjacent pairs of substrates. The carriers described herein substantially reduce the risk of breaking the processing apparatus and substrates, thereby achieving a more efficient process. Certain embodiments herein relate to methods of loading substrates onto a carrier.

Substrate storage container and method of manufacturing the same

There is provided a substrate storage container 1 capable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container 1, and an device positioning member 4 as the functional member including: an attachment part 41 having a thick section 413 formed in thickness equal to a wall member of a container body 10 or a lid 20 and a thin section 410 decreasing in thickness as it approaches toward an outer edge from the thick section 413; and a body part 42 coupled to the attachment part 41, the device positioning member 4 being disposed on the container body 10 or the lid 20 so that a first surface 420 of the thick section 413 is flush with an inner surface of the wall member.

ANTI-SLIP PAD AND TRAY INCLUDING SAME

A tray assembly includes a base tray, and an anti-slip pad disposed on the base tray, wherein the anti-slip pad has a friction coefficient in a range of about 0.5 to about 20 based on ASTM D1894, and a surface resistance in a range of about 10{circumflex over ( )}6 Ω/cm.sup.2 to about 10{circumflex over ( )}9 Ω/cm.sup.2 based on ASTM D257, and the anti-slip pad includes at least one of a thermoplastic olefinic elastomer (TPO), natural rubber, styrene-butadiene rubber (SBR), and polypropylene (PP).

Loading system

A loading system includes one or more adjusting mechanisms configured to adjust a position of the container held by the container holder, a controller configured to control operation of the one or more adjusting mechanisms, a transfer mechanism configured to move a loadable object into a holding space of the container with the container held by the container holder to transfer the loadable object to the container, and one or more position detectors. The one or more position detectors are located to detect a relative position of a loadable object when the loadable object is held by the transfer mechanism and is in the holding space. The controller is configured to perform an adjusting control in which the position of the container is adjusted to place the container in a proper position with respect to the loadable object, the adjusting control being performed based on detected information from the one or more position detectors, and being performed during at least a portion of a process of transferring the loadable object by the transfer mechanism, and being completed before the loadable object becomes supported by the container.

Materials rack
11158530 · 2021-10-26 · ·

A materials rack carrying support plates inside, and able to secure or release the support plates by lifting or dropping a handle at the top, includes a frame, a stop assembly, and an assembly for the handle. The stop assembly includes a stop rod, a first pressing plate on an end of the stop rod, and an elastic member resisting against the top frame and the first pressing plate. The handle assembly includes a rotating shaft, the handle and a second pressing plate being fixed to the rotating shaft. By the handle, the second pressing plate can be moved towards the first pressing plate to press down the first pressing plate or moved away from the first pressing plate to release a downward pressure of the first pressing plate.

Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method
11135623 · 2021-10-05 · ·

A wafer transport container interior atmosphere measurement device is arranged in wafer transport container. The device detects an atmosphere in the wafer transport container and communicates the atmosphere. The device includes a detector, a transmitter, and a power source. The detector detects the atmosphere in the wafer transport container. The transmitter wirelessly transmits a first information including a detection result by the detector to an external receiver. The power source supplies electric power to the detector and the transmitter.

Glass pallet for sputtering systems
11133158 · 2021-09-28 · ·

Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.