A carrier configured for holding and transporting a substrate in a transport direction in a vacuum processing system and a method for carrying a substrate in a transport direction during a deposition process in a deposition chamber with a carrier is described. The carrier includes two side edges opposing each other, a joining structure arranged between the side edges, having a flat structure comprising a plurality of apertures, each exposing the same substrate and an aperture ratio of at least 0.5, and a holding assembly configured for holding the substrate adjacent to the joining structure.

A drying box for storing solar cell chips includes a box body (1). Within the box body is installed a top cover (2) that is reversibly opened and divides an inner chamber of the box body into a storage chamber (13) at a lower part and a temporary storage chamber (14) at an upper part, and a side wall of the temporary storage chamber is provided with a purge hole (3). The drying box further includes a control cabinet (4) disposed at one end of the box body. The control cabinet is provided with a central controller as well as a purge controller and a drive device (5) electrically connected to the central controller. An inlet end of the purge controller is connected to a gas source and an outlet end is connected to the purge hole through a gas pipe. The drive device is connected to the top cover.

The present disclosure provides a fixing device and a method of manufacturing a display panel, the fixing device including a carrier plate provided with a fixing member, wherein the fixing member includes at least two opening regions, an area of the opening region is adjustable, the opening region is configured for accommodating the display panel.

A package structure comprises a backing plate supporting a target object, at least one pad disposed on the backing plate and fixing the target object, a frame disposed on a lower side of the backing plate, bonded to the backing plate, and supporting the backing plate to fix the pad onto the backing plate, and a side enclosing plate disposed around the backing plate and connected to the pad to fix the pad. The package structure further comprises a magnetic component disposed on the backing plate and attracting a magnetic coating on the target object.

Provided is a panel storage container that can suppress flexure of the middle portions of the panels. A panel storage container has: a container body for storing panels; and a panel support means for supporting the panels. The panel support means has: a panel support portion for supporting right and left edges of the panels; a central support portion for supporting each middle portion of the panels; and elastic bodies for contacting the panels, the elastic bodies being provided along a front and rear direction of the central support portion at a predetermined interval.

The present disclosure discloses a solar cell co-evaporation production line, which includes a base support transfer line, a substrate transfer line, and a master control room. The base support transfer line is provided with a base support upper line port and a base support lower line port. The substrate transfer line is connected to a co-evaporation device and is provided with a feed port and a discharge port. Both the feed port and the discharge port are connected to the base support transfer line. The master control room is used for controlling the base support transfer line and the substrate transfer line to act. The solar cell co-evaporation production line provided by the present disclosure implements automatic transferring and processing of a copper-indium-gallium-selenium (CIGS) thin-film cell in a co-evaporation process by arranging the base support transfer line and the substrate transfer line, also implements an automatic circulation of the base support, saves manpower, increases production efficiency, and saves production costs.

Various embodiments herein relate to carriers for supporting one or more substrate as the substrates are passed through a processing apparatus. In many cases, the substrates are oriented in a vertical manner The carrier may include a frame and vertical support bars that secure the glass to the frame. The carrier may lack horizontal support bars. The carrier may allow for thermal expansion and contraction of the substrates, without any need to provide precise gaps between adjacent pairs of substrates. The carriers described herein substantially reduce the risk of breaking the processing apparatus and substrates, thereby achieving a more efficient process. Certain embodiments herein relate to methods of loading substrates onto a carrier.

There is provided a substrate storage container 1 capable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container 1, and an device positioning member 4 as the functional member including: an attachment part 41 having a thick section 413 formed in thickness equal to a wall member of a container body 10 or a lid 20 and a thin section 410 decreasing in thickness as it approaches toward an outer edge from the thick section 413; and a body part 42 coupled to the attachment part 41, the device positioning member 4 being disposed on the container body 10 or the lid 20 so that a first surface 420 of the thick section 413 is flush with an inner surface of the wall member.

A calibration plate is arranged on a support surface of a table. The calibration plate has first and second alignment marks arranged in one direction, and third and fourth alignment marks arranged in another direction that is orthogonal to the one direction. The first and second alignment marks that move in a front-and-rear direction are imaged by a first camera. The one direction of the calibration plate is made parallel to a front-and-rear direction based on the image. The positions of second and third cameras are adjusted based on the third and fourth alignment marks. The second and third cameras, positions of which have been adjusted, are moved to positions below the transfer roller, and a reference line formed at the transfer roller is imaged by the second and third cameras. An orientation of a rotation shaft of the transfer roller is adjusted in a plane parallel to the support surface based on these images.

The present disclosure provides a support device for conveying at least one solar cell element in a transport direction, wherein the support device comprises a support element configured for supporting the at least one solar cell element and an electric arrangement configured for providing an electrostatic force for holding the at least one solar cell element on the support element.