A method of forming an integrated circuit structure includes forming a first magnetic layer, forming a first conductive line over the first magnetic layer, and coating a photo-sensitive coating on the first magnetic layer. The photo-sensitive coating includes a first portion directly over the first conductive line, and a second portion offset from the first conductive line. The first portion is joined to the second portion. The method further includes performing a first light-exposure on the first portion of the photo-sensitive coating, performing a second light-exposure on both the first portion and the second portion of the photo-sensitive coating, developing the photo-sensitive coating, and forming a second magnetic layer over the photo-sensitive coating.

Two approaches for on-chip ESD detection include variable dielectric width capacitor, and vertical metal-oxide-semiconductor (MOS) capacitor MOSCAP array. The variable dielectric width capacitor approach employs metal plates terminated with sharp corners to enhance local electric field and facilitate ready breakdown of a thin dielectric between the metal plates. The vertical MOSCAP array is composed of a capacitor array connected in series. Both approaches are incorporated in an example 22 nm fully depleted silicon-on-insulator. Vertical MOSCAP arrays detect ESD events starting from about 6 V with about 6 V granularity, while the variable dielectric width capacitor is suitable for detection of high ESD voltage from about 40 V and above.

An exemplary embodiment of the present disclosure provides a detector configured to output a signal associated with one or more interactions with subatomic particles. The detector comprises a sensor comprising a first diode comprising first semiconductor material abutting a first metal and forming a first junction, wherein the sensor is configured to be exposed to subatomic particles and a voltage reference member configured to generate a reference measurement. The sensor and the voltage reference member form a bandgap reference circuit. The present disclosure also provides methods for detecting subatomic particles from a solid-state detector comprising a first Schottky diode in electrical communication with a reference voltage member comprising a parallel circuit of two or more second Schottky diodes, wherein the first Schottky diode is configured to be exposed to subatomic particles and the second Schottky diodes of the reference voltage member are configured to generate a reference measurement.

A semiconductor device and semiconductor package, the device including a lower semiconductor chip including a lower through-electrode; an interposer mounted on the lower semiconductor chip, the interposer including an interposer substrate; a plurality of interposer through-electrodes penetrating through at least a portion of the interposer substrate in a vertical direction and electrically connected to the lower through-electrode; and at least one capacitor in the interposer substrate and electrically connected to at least one interposer through-electrode of the plurality of interposer through-electrodes; and an upper semiconductor chip mounted on the interposer and electrically connected to the interposer through-electrode.

Substrates for semiconductor packages, including hybrid substrates for decoupling capacitors, and associated devices, systems, and methods are disclosed herein. In one embodiment, a substrate includes a first pair and a second pair of electrical contacts on a first surface of the substrate. The first pair of electrical contacts can be configured to receive a first surface-mount capacitor, and the second pair of electrical contacts can be configured to receive a second surface-mount capacitor. The first pair of electrical contacts can be spaced apart by a first space, and the second pair of electrical contacts can be spaced apart by a second space. The first and second spaces can correspond to corresponding to first and second distances between electrical contacts of the first and second surface-mount capacitors.

A finger-type semiconductor capacitor array layout includes a first conductive structure and a second conductive structure. The first conductive structure includes longitudinal first conductive strips and lateral power supply strips. The second conductive structure includes longitudinal second conductive strips and P lateral power supply strip(s). The longitudinal first conductive strips and the longitudinal second conductive strips are alternately disposed in a first integrated circuit (IC) layer; and the longitudinal first conductive strips include a first row of strips and a second row of strips. The lateral power supply strips are located in a second IC layer, and coupled to the first and second rows of strips through vias. The P lateral power supply strip(s) is/are located in the second IC layer, and include(s) a first-capacitor-group power supply strip that is coupled to K strip(s) of the longitudinal second conductive strips through K via(s). The P and K are positive integers.

A semiconductor capacitor array layout generates parasitic capacitance toward an edge of the layout so as to reduce a capacitance difference between an outer capacitor unit and an inner capacitor unit. The semiconductor capacitor array layout includes a first conductive structure and a second conductive structure. The first conductive structure includes: longitudinal first conductive strips disposed in a first integrated circuit (IC) layer; and lateral first conductive strips disposed in a second IC layer. The longitudinal and lateral first conductive strips jointly form well-type structures including outer wells and inner wells that are electrically connected. The second conductive structure includes second conductors disposed in the first IC layer. The second conductors include outer conductors and inner conductors that are electrically disconnected and respectively disposed in the outer wells and the inner wells. The outer wells and the closest inner conductors jointly generate parasitic capacitance.

A capacitor structure includes a first metal structure, a second metal structure, and a dielectric material. The second metal structure is disposed below the first metal structure. Each of the first metal structure and the second metal structure includes at least three conductive components. The conductive components have a fish-bone shape. The dielectric material is disposed in a plurality of isolators of the first metal structure, in a plurality of isolators of the second metal structure, and between the first metal structure and the second metal structure.

A semiconductor device includes a composite pn-junction structure in a semiconductor substrate, wherein the composite pn-junction structure has a first junction grading coefficient m.sub.1, with m.sub.1≥0.50. The composite pn-junction structure includes a first partial pn-junction structure and a second partial pn-junction structure, wherein the first partial pn-junction structure has a first partial junction grading coefficient m.sub.11, and wherein the second partial pn-junction structure has a second partial junction grading coefficient m.sub.12. The first partial junction grading coefficient m.sub.11 is different to the second partial junction grading coefficient m.sub.12, with m.sub.11≠m.sub.12. At least one of the first and second partial junction grading coefficients m.sub.11, m.sub.12 is greater than 0.50, with m.sub.11 and/or m.sub.12>0.50. The first junction grading coefficient m.sub.1 of the composite pn-junction structure is based on a combination of the first and second partial junction grading coefficients m.sub.11, m.sub.12.

An apparatus includes a first plate, a second plate, a third plate, a ferroelectric dielectric, and a paraelectric dielectric. The ferroelectric dielectric is between the first plate and the second plate such that the first plate, the ferroelectric dielectric, and the second plate form a first capacitor. The paraelectric dielectric is between the second plate and the third plate such that the second plate, the paraelectric dielectric, and the third plate form a second capacitor.