Some embodiments include a capacitive unit having two or more capacitive tiers. Each of the capacitive tiers has first electrode material arranged in a configuration having laterally-extending first segments and longitudinally-extending second segments. The first and second segments join at intersection-regions. The first electrode material of the first and second segments is configured as tubes. The capacitive tiers are together configured as a stack having a first side. The first electrode material caps the tubes along the first side. Capacitor dielectric material lines the tubes. Second electrode material extends into the lined tubes. Columns of the second electrode material extend vertically through the capacitive tiers and are joined with the second electrode material within the lined tubes. A conductive plate extends vertically along the first side of the stack and is directly against the first electrode material. Some embodiments include methods of forming integrated assemblies.

Integrated circuitry comprises a first conductive line buried within semiconductive material of a substrate. The first conductive line comprises conductively-doped semiconductor material directly above and directly against metal material in a vertical cross-section. A second conductive line is above the semiconductive material and is laterally-spaced from the first conductive line in the vertical cross-section. The second conductive line comprises metal material in the vertical cross-section. Insulative material is directly above the first and second conductive lines. A first conductive via extends through the insulative material and through the conductively-doped semiconductor material to the metal material of the first conductive line. A second conductive via extends through the insulative material to the metal material of the second conductive line. Other embodiments and aspects, including method, are disclosed.

A method for manufacturing a high-profile capacitor with high capacity includes providing a substrate, forming a first mold layer, a first supporter layer, a second mold layer, and a second supporter layer on the substrate, where at least one of the first mold layer and the second mold layer are made of a dielectric material having a low or super low dielectric constant, defining at least one contact hole, where the now-surrounding first and second supporter layers reinforce the at least one contact hole and form first and second supporter patterns respectively, forming a lower electrode on an inner surface of the at least one contact hole, and removing the first mold layer and/or the second mold layer being made of the dielectric material by ashing.

A method for manufacturing a quantum electronic circuit includes etching a semiconducting layer so as to obtain: a plurality of pillars; and a qubit layer; oxidising the flank of each pillar; forming coupling rows and coupling columns; and depositing separation layers leaving a contact surface protrude from each pillar.

A 3D semiconductor device with a built-in-test-circuit (BIST), the device comprising: a first single-crystal substrate with a plurality of logic circuits disposed therein, wherein said first single-crystal substrate comprises a device area, wherein said plurality of logic circuits comprise at least a first interconnected array of processor logic, wherein said plurality of logic circuits comprise at least a second interconnected set of circuits comprising a first logic circuit, a second logic circuit, and a third logic circuit, wherein said second interconnected set of logic circuits further comprise switching circuits that support replacing said first logic circuit and/or said second logic circuit with said third logic circuit; and said built-in-test-circuit (BIST), wherein said first logic circuit is testable by said built-in-test-circuit (BIST), and wherein said second logic circuit is testable by said built-in-test-circuit (BIST).

A 3D semiconductor device with a built-in-test-circuit (BIST), the device comprising: a first single-crystal substrate with a plurality of logic circuits disposed therein, wherein said first single-crystal substrate comprises a device area, wherein said plurality of logic circuits comprise at least a first interconnected array of processor logic, wherein said plurality of logic circuits comprise at least a second interconnected set of circuits comprising a first logic circuit, a second logic circuit, and a third logic circuit, wherein said second interconnected set of logic circuits further comprise switching circuits that support replacing said first logic circuit and/or said second logic circuit with said third logic circuit; and said built-in-test-circuit (BIST), wherein said first logic circuit is testable by said built-in-test-circuit (BIST), and wherein said second logic circuit is testable by said built-in-test-circuit (BIST).

A memory unit having a plurality of memory chips comprises: the memory unit that has a plurality of memory chips that are stacked; and protruding terminals that are disposed protruding from a side surface along the stacking direction of the memory unit, wherein the protruding terminals have surfaces that are positioned in a direction orthogonal to the protrusion direction, and between said surfaces, the surface roughness of a surface facing one way is greater than the surface roughness of a surface facing the other way.

According to some embodiments, a semiconductor device may include gate structures on a substrate; first and second impurity regions formed in the substrate and at both sides of each of the gate structures; conductive line structures provided to cross the gate structures and connected to the first impurity regions; and contact plugs connected to the second impurity regions, respectively. For each of the conductive line structures, the semiconductor device may include a first air spacer provided on a sidewall of the conductive line structure; a first material spacer provided between the conductive line structure and the first air spacer; and an insulating pattern provided on the air spacer. The insulating pattern may include a first portion and a second portion, and the second portion may have a depth greater than that of the first portion and defines a top surface of the air spacer.

High-density metal-oxide semiconductor (MOS) capacitor (MOSCAP) cell circuits and MOS device array circuits are disclosed. A gate comprising a selected aspect ratio disposed in a MOSCAP cell circuit comprising a cell region is configured to increase a capacitive density by increasing an extent to which metal routing layers contribute to a total MOSCAP cell circuit capacitance. An area of a MOSCAP array circuit is also reduced. Also, bulk tie cells are disposed within a MOS device array circuit in array diffusion regions to increased MOS device array circuit density. The array diffusion regions include a first device region including MOS devices and a bulk tie region including the bulk tie cells. The bulk tie region is isolated from the first device region by a diffusion cut. A diffusion cut is between a first gate on the device region and a second gate on the bulk tie region.

In one example, an electronic device includes a layer of insulator on a substrate extending to a set of device elements. A first set of metal layers having a first thickness lithographically patterned and defined horizontally to the substrate on the layer of insulator. A second set of metal layers with a second thickness having a first portion defined horizontally to the substrate and patterned over and contacting the first set of metal layers, and a second portion defined vertically to the substrate and contacting the first portion and extending vertically through the layer of insulator to at least one device element and contacting the at least one device element with a width of the second thickness thereby creating at least one sub-lithographic film-edge top electrode.