H01L29/0657

FinFET thyristors for protecting high-speed communication interfaces

Fin field-effect transistor (FinFET) thyristors for protecting high-speed communication interfaces are provided. In certain embodiments herein, high voltage tolerant FinFET thyristors are provided for handling high stress current and high RF power handling capability while providing low capacitance to allow wide bandwidth operation. Thus, the FinFET thyristors can be used to provide electrical overstress protection for ICs fabricated using FinFET technologies, while addressing tight radio frequency design window and robustness. In certain implementations, the FinFET thyristors include a first thyristor, a FinFET triggering circuitry and a second thyristor that serves to provide bidirectional blocking voltage and overstress protection. The FinFET triggering circuitry also enhances turn-on speed of the thyristor and/or reduces total on-state resistance.

Integrated circuit and electrostatic discharge protection method

An integrated circuit includes a load circuit and an electrostatic discharge (ESD) circuit. The load circuit includes a first and a second I/O terminal. The ESD circuit is coupled to the first and the second I/O terminal. The ESD circuit includes a first protection circuit configured to conduct a first ESD current from the first to the second I/O terminal. The first protection circuit includes a first, a second, a third doped region, and a well. The first doped region is coupled to the first I/O terminal, and has a first conductive type. The well is coupled to the first doped region, and has a second conductive type different from the first conductive type. The second doped region is coupled to the well, and has the first conductive type. The third doped region couples the second doped region to the second I/O terminal, and has the second conductive type.

Dummy Fin Etch to Form Recesses in Substrate
20220367386 · 2022-11-17 ·

An integrated circuit structure includes a semiconductor substrate having a plurality of semiconductor strips, a first recess being formed by two adjacent semiconductor strips among the plurality of semiconductor strips, a second recess being formed within the first recess, and an isolation region being provided in the first recess and the second recess. The second recess has a lower depth than the first recess.

VERTICAL FIELD EFFECT TRANSISTOR AND METHOD FOR THE FORMATION THEREOF
20220367713 · 2022-11-17 ·

A vertical field effect transistor. The vertical field effect transistor includes: a drift area; a semiconductor fin on or above the drift area; a connection area on or above the semiconductor fin; and a gate electrode, which is formed adjacent to at least one side wall of the semiconductor fin, the semiconductor fin, in a first section, which is situated laterally adjacent to the gate electrode, having a lesser lateral extension than in a second section, which contacts the drift area, and/or than in a third section, which contacts the connection area.

HIGH-THRESHOLD POWER SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

The present invention discloses a high-threshold power semiconductor device and a manufacturing method thereof. The high-threshold power semiconductor device includes, in sequence from bottom to top: a metal drain electrode, a substrate, a buffer layer, and a drift region; further including: a composite column body which is jointly formed by a drift region protrusion, a columnar p-region and a columnar n-region on the drift region, a channel layer, a passivation layer, a dielectric layer, a heavily doped semiconductor layer, a metal gate electrode and a source metal electrode. The composite column body is formed by sequentially depositing a p-type semiconductor layer and an n-type semiconductor layer on the drift region and then etching same. The channel layer and the passivation layer are formed in sequence by deposition. Thus, the above devices are divided into a cell region and a terminal region. The dielectric layer, the heavily doped semiconductor layer, the metal gate electrode and the source metal electrode only exist in the cell region, and the passivation layer of the terminal region extends upwards and is wrapped outside the channel layer. This structure can increase a threshold voltage of the device, improve the blocking characteristics of the device and reduce the size of a gate capacitance.

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
20230057216 · 2023-02-23 ·

A semiconductor device and a method of manufacturing the semiconductor device to achieve both of a high breakdown voltage and a low on resistance are provided. A semiconductor substrate includes a convex portion protruding upward from a surface of the semiconductor substrate. An n-type drift region is arranged on the semiconductor substrate so as to be positioned between a gate electrode and an n.sup.+-type drain region in plan view, and has an impurity concentration lower than an impurity concentration of the n.sup.+-type drain region. A p-type resurf region is arranged in the convex portion and forms a pn junction with the n-type drift region.

GALLIUM NITRIDE (GAN) INTEGRATED CIRCUIT TECHNOLOGY WITH RESONATORS
20230057992 · 2023-02-23 ·

Gallium nitride (GaN) integrated circuit technology with resonators is described. In an example, an integrated circuit structure includes a layer or substrate including gallium and nitrogen. A first plurality of electrodes is over the layer or substrate. A resonator layer is on the first plurality of electrodes, the resonator layer including aluminum and nitrogen. A second plurality of electrodes is on the resonator layer. Individual ones of the second plurality of electrodes are vertically over and aligned with corresponding individual ones of the first plurality of electrodes.

Planar transistors with wrap-around gates and wrap-around source and drain contacts

Disclosed herein are IC structures, packages, and devices that include planar III-N transistors with wrap-around gates and/or one or more wrap-around source/drain (S/D) contacts. An example IC structure includes a support structure (e.g., a substrate) and a planar III-N transistor. The transistor includes a channel stack of a III-N semiconductor material and a polarization material, provided over the support structure, a pair of S/D regions provided in the channel stack, and a gate stack of a gate dielectric material and a gate electrode material provided over a portion of the channel stack between the S/D regions, where the gate stack at least partially wraps around an upper portion of the channel stack.

SILICON CARBIDE SEMICONDUCTOR DEVICE

A silicon carbide semiconductor device including a silicon carbide semiconductor substrate. The silicon carbide semiconductor substrate has an active region through which a main current flows, and a termination region surrounding a periphery of the active region in a top view of the silicon carbide semiconductor device. In the top view, the active region is of a rectangular shape, which has two first sides in a <11-20> direction and two second sides in a <1-100> direction. The two first sides are each of a first length, and the two second sides are each of a second length, the first length being longer than the second length.

DOUBLE-CHANNEL HEMT DEVICE AND MANUFACTURING METHOD THEREOF

An HEMT device, comprising: a semiconductor body including a heterojunction structure; a dielectric layer on the semiconductor body; a gate electrode; a drain electrode, facing a first side of the gate electrode; and a source electrode, facing a second side opposite to the first side of the gate electrode; an auxiliary channel layer, which extends over the heterojunction structure between the gate electrode and the drain electrode, in electrical contact with the drain electrode and at a distance from the gate electrode, and forming an additional conductive path for charge carriers that flow between the source electrode and the drain electrode.