An insulation film includes a first opening portion in at least one of a cell region and a termination region, and a second opening portion in an interface region. The second opening portion has an opening ratio lower than an opening ratio of the first opening portion. The semiconductor device includes a first impurity layer of a second conductivity type, and a second impurity layer of the second conductivity type. The first impurity layer is disposed on a surface of a semiconductor substrate below the first opening portion. The second impurity layer has impurity concentration lower than impurity concentration of the first impurity layer, and is disposed on the surface of the semiconductor substrate below the second opening portion.

A semiconductor device includes: a gate electrode disposed in the inside of a trench via a gate insulating film; a shield electrode positioned between the gate electrode and a bottom of the trench; an electric insulating region expanding between the gate electrode and the shield electrode, and further expanding along a side wall and the bottom of the trench so as to separate the shield electrode from the side wall and the bottom; a source electrode electrically connected to an n.sup.+-type source region, and electrically connected to the shield electrode on both end portions of the trench as viewed in a plan view, wherein the shield electrode has high resistance regions positioned at both end portions of the trench as viewed in a plan view, and a low resistance region positioned at a position sandwiched by the high resistance regions.

A semiconductor device includes a semiconductor body, a first electrode on a back surface of the semiconductor body, second and third electrodes provided on a front surface of the semiconductor body, a first film linking the second electrode and the third electrode, and a second film between the semiconductor body and the first film. The first film has a higher resistivity than the first semiconductor body, and the second film is insulative. The second film includes a first-film-thickness portion and a second-film-thickness portion. The first-film-thickness portion has a first film thickness along a first direction directed from the first electrode toward the second electrode. The second-film-thickness portion has a second film thickness along the first direction thicker than the first film thickness. The first-film-thickness portion and the second-film-thickness portion surround the second electrode. The first film extends along surfaces of the first-film-thickness portion and the second-film-thickness portion.

A semiconductor device includes a semiconductor layer on a first electrode. The semiconductor layer includes a first region of a first type, a second region of a second type, a third region of the second type, and a fourth region of the first type. The second region is above the first region. The third region surrounds the second region. The fourth region surrounds the third region. The second electrode includes a first portion above the second region and a second portion surrounding the first portion. The third electrode surrounds the second electrode and is electrically connected to the fourth region. The semi-insulating layer is electrically connected to the second electrode and the third electrode. A first end portion of the first insulating layer is above the third region.

Disclosed is a transistor device which includes a semiconductor body having a first surface, a source region, a drift region, a body region being arranged between the source region and the drift region, a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric. The field electrode includes a first layer and a second layer. The second layer includes a different conductive material as the first layer. A portion of the second layer is disposed above and directly contacts a portion of the first layer.

Disclosed is a transistor device and a method for producing a transistor device. The transistor device includes: a source region, a drift region, and a body region arranged between the source region and the drift region; a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric; and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric. The field electrode includes first and second layers.

A semiconductor structure including a substrate, a first well, a field oxide layer, a first conductive line and a second conductive line is provided. The substrate has a first conductivity type. The first well is formed on the substrate and has a second conductivity type. The field oxide layer is disposed on the first well. The first conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The second conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The first conductive line is spaced apart from the second conductive line.

The disclosed embodiments include an ESD robust transistor with a compound-SCR protection. The transistor may include a semiconductor substrate having a first conductivity type, a drain region coupled with the semiconductor substrate having a drain SCR component with a first drain region of the first conductivity type and a second drain region of the second conductivity type. The transistor may also include a source coupled with the semiconductor substrate, a channel region of the second conductivity type, and a gate coupled with the channel region having SCR components with a first gate region of the first conductivity type and a second gate region of the second conductivity type. The drain SCR components and the gate SCR components may create a low resistance discharge path along the channel region that activates in response to the ESD such that the ESD discharges through the transistor without causing damage to the transistor.

An integrated circuit (IC) includes an active area including at least one active fin-type field effect transistor (FinFET), and a trench isolation adjacent to the active area. At least one inactive gate is positioned over the trench isolation. A vertically extending resistor body is positioned adjacent the at least one inactive gate over the trench isolation. A lower end of the resistor is below an upper surface of the trench isolation. The resistor reduces interconnect layer thickness to improve yield, and significantly reduces resistor footprint to enable scaling.

A semiconductor structure including a substrate, a first well, a field oxide layer, a first conductive line and a second conductive line is provided. The substrate has a first conductivity type. The first well is formed on the substrate and has a second conductivity type. The field oxide layer is disposed on the first well. The first conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The second conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The first conductive line is spaced apart from the second conductive line.