Patent classifications
H01L29/405
SHARED-DIELECTRIC MOSFET DEVICE WITH RESISTIVE-FIELD-PLATE AND PREPARATION METHOD THEREOF
A shared-dielectric MOSFET device with a resistive-field-plate and a preparation method are provided. In the shared-dielectric MOSFET device, the semi-insulating resistive-field-plate electrically connected to the trench gate structure and the drain structure is introduced in the drift region of the existing trench gate MOS devices, and when the trench gate structure controls the MOS channel to be turned on or turned off, the semi-insulating resistive-field-plate can adjust the doping concentration of the drift region, to modulate the conductance of the on-state drift region and the distribution of a off-state high-voltage blocking electric field, thereby obtaining a lower on-resistance. Meanwhile, in the preparation method of the present disclosure, the modern 2.5-dimensional processing technology based on deep trench etching is adopted, which is conducive to miniaturization designs and high density designs of the structure and is more suitable for the More than Moore development of modern integrated semiconductor devices.
Series resistor over drain region in high voltage device
Some embodiments relate to an integrated circuit. The integrated circuit includes a ring-shaped drain region having an inner edge and an outer edge. A channel region surrounds the ring-shaped drain region. A source region surrounds the channel region. The channel region separates the drain region from the source region. A gate electrode is arranged over the channel region and is separated from the channel region by a gate dielectric. An inner edge of the gate electrode is proximate to the drain region. A resistor structure is arranged over and spaced apart from an upper surface of the substrate. The resistor structure has a first end and a second end which are connected by a curved or polygonal path of resistive material. The first end is coupled to the ring-shaped drain. The resistor has an outer perimeter that is surrounded by the inner edge of the ring-shaped drain region.
Semiconductor device including trenches formed in transistor or diode portions
A semiconductor device that allows easy hole extraction is provided. The semiconductor device includes: a semiconductor substrate having drift and base regions; a transistor portion formed in the semiconductor substrate; and a diode portion formed adjacent to the transistor portion and in the semiconductor substrate. In the transistor portion and the diode portion: a plurality of trench portions each arrayed along a predetermined array direction; and a plurality of mesa portions formed between respective trench portions are formed, among the plurality of mesa portions, at least one boundary mesa portion at a boundary between the transistor portion and the diode portion includes a contact region at an upper surface of the semiconductor substrate and having a concentration higher than that of the base region, and an area of the contact region at the boundary mesa portion is greater than an area of the contact region at another mesa portion.
Transistor device with a field electrode that includes two layers
Disclosed is a transistor device which includes a semiconductor body having a first surface, a source region, a drift region, a body region being arranged between the source region and the drift region, a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric. The field electrode includes a first layer and a second layer. The second layer includes a different conductive material as the first layer. A portion of the second layer is disposed above and directly contacts a portion of the first layer.
Semiconductor device
A semiconductor device includes a semiconductor substrate having a major surface and both an element-forming region and an outer peripheral voltage-withstanding region that are provided on the major surface side of the semiconductor substrate. The element-forming region includes both a cell region for forming a power element and a circuit element region for forming at least one circuit element. The circuit element region is interposed between the outer peripheral voltage-withstanding region and the cell region. The outer peripheral voltage-withstanding region includes a boundary region that adjoins the element-forming region. In the boundary region, there is provided one or more voltage-withstanding regions. At least one of the one or more voltage-withstanding regions has a withstand voltage lower than both the withstand voltages of the cell region and the circuit element region.
Vertical resistor adjacent inactive gate over trench isolation
An integrated circuit (IC) includes an active area including at least one active fin-type field effect transistor (FinFET), and a trench isolation adjacent to the active area. At least one inactive gate is positioned over the trench isolation. A vertically extending resistor body is positioned adjacent the at least one inactive gate over the trench isolation. A lower end of the resistor is below an upper surface of the trench isolation. The resistor reduces interconnect layer thickness to improve yield, and significantly reduces resistor footprint to enable scaling.
SEMICONDUCTOR DEVICE
According to one embodiment, a semiconductor device includes first, second, and third electrodes, first, second, and third semiconductor regions, a plurality of ring-shaped regions, and a semi-insulating layer. The second semiconductor region is provided on the first semiconductor region. The third semiconductor region surrounds the second semiconductor region, and is provided on the first semiconductor region. The ring-shaped regions surround the second semiconductor region. The second electrode is provided on the second semiconductor region. The third electrode is provided on the third semiconductor region. The semi-insulating layer contacts the first semiconductor region, the second electrode, the ring-shaped regions, and the third electrode. The ring-shaped regions include first and second ring-shaped regions provided between the first ring-shaped region and the third semiconductor region. A length of the second ring-shaped region in a diametrical direction is shorter than a length of the first ring-shaped region in the diametrical direction.
Semiconductor device including an isolation region having an edge being covered and manufacturing method for the same
The present disclosure provides a semiconductor device, including a substrate, a first active region in the substrate, a second active region in the substrate and adjacent to the first active region, an isolation region in the substrate and between the first active region and the second active region, and a dummy gate overlapping with the isolation region, wherein an entire bottom width of the dummy gate is greater than an entire top width of the isolation region.
ESD PROTECTION
ESD protection devices and methods are provided. In at least one embodiment, a device includes a first stack that forms a Zener diode. The first stack includes a substrate of a first conductivity type having a first region of a second conductivity type located therein. The first area is flush with a surface of the substrate. A second stack forms a diode and is located on and in contact with the surface of the substrate. The second stack includes a first layer of the second conductivity type having a second region of the first conductivity type located therein. The second area is flush, opposite the first stack, with the surface of the first layer. A third stack includes at least a second layer made of an oxygen-doped material, on and in contact with the second stack.
Semiconductor device including a semi-insulating layer contacting a first region at a first surface of a semiconductor layer
A semiconductor device includes a semiconductor layer on a first electrode. The semiconductor layer includes a first region of a first type, a second region of a second type, a third region of the second type, and a fourth region of the first type. The second region is above the first region. The third region surrounds the second region. The fourth region surrounds the third region. The second electrode includes a first portion above the second region and a second portion surrounding the first portion. The third electrode surrounds the second electrode and is electrically connected to the fourth region. The semi-insulating layer is electrically connected to the second electrode and the third electrode. A first end portion of the first insulating layer is above the third region.