Patent classifications
H01L29/417
Four point semiconductor nanowire-based sensors and related methods
The techniques relate to methods and apparatus for sensing an analyte. At least one sensor element is configured to sense an analyte, the at least one sensor element comprising a first portion and a second portion. A first current electrode is attached to the first portion and a second current electrode is attached to the second portion. A first measurement electrode is attached to the first portion and a second measurement electrode is attached to the second portion.
Selective thermal annealing method
A semiconductor body having a base carrier portion and a type III-nitride semiconductor portion is provided. The type III-nitride semiconductor portion includes a heterojunction and two-dimensional charge carrier gas. One or more ohmic contacts are formed in the type III-nitride semiconductor portion, the ohmic contacts forming an ohmic connection with the two-dimensional charge carrier gas. A gate structure is configured to control a conductive state of the two-dimensional charge carrier gas. Forming the one or more ohmic contacts comprises forming a structured laser-reflective mask on the upper surface of the type III-nitride semiconductor portion, implanting dopant atoms into the upper surface of the type III-nitride semiconductor portion, and performing a laser thermal anneal that activates the implanted dopant atoms.
SCHOTTKY BARRIER DIODE
A Schottky barrier diode includes a semiconductor substrate made of gallium oxide, a drift layer made of gallium oxide and formed on the semiconductor substrate, an anode electrode brought into Schottky contact with the drift layer, a cathode electrode brought into ohmic contact with the semiconductor substrate, an insulating film covering the inner wall of a trench formed in the drift layer, and a protective film covering the anode electrode, wherein a part of the protective film is embedded in the trench. The part of the protective film is thus embedded in the trench, so that adhesion performance between the anode electrode and protective film is enhanced. This makes it possible to prevent peeling at the boundary between the anode electrode and the protective film.
TRENCH-GATE MOSFET WITH ELECTRIC FIELD SHIELDING REGION
A trench-gate MOSFET with electric field shielding region, has a substrate; a source electrode; a drain electrode; a semiconductor region with a first doping type formed on the substrate; a trench-gate, a plurality of electric field shielding regions with a second doping type formed under a surface of the semiconductor region, wherein the electric field shielding region intersects the trench-gate at an angle; a source electrode region formed on both sides of the trench-gate is divided into a plurality of source electrode sub-regions by the plurality of electric field shielding regions.
NITRIDE SEMICONDUCTOR DEVICE
A nitride semiconductor device includes a first nitride semiconductor layer, a second nitride semiconductor layer formed on the first nitride semiconductor layer, a third nitride semiconductor layer that is disposed on the second nitride semiconductor layer, has a ridge portion at least at a portion thereof, and contains an acceptor type impurity, a gate electrode that is disposed on the ridge portion, and a source electrode and a drain electrode that, on the second nitride semiconductor layer, are disposed across the ridge portion from each other, and has an active region and a nonactive region. The nonactive region has a first region and a film thickness of the second nitride semiconductor layer in the first region differs from a film thickness of the second nitride semiconductor layer in a region of the active region in which the ridge portion, the source electrode, and the drain electrode are not formed.
VERTICAL-STRUCTURE FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREFOR
A vertical-structure field-effect transistor comprises: a gate electrode, which is formed on a substrate and has a horizontal plane extending in the planar direction and a vertical plane extending in the height direction; a gate insulating layer for covering the gate electrode; a vertical channel which is formed on the gate insulating layer and has a channel formed in the height direction; a source electrode formed to make contact with one end of the vertical channel; and a drain electrode formed to make contact with the other end of the vertical channel and formed at a height level different from that of the source electrode, wherein channel on/off of the vertical channel is controlled by means of an electric field formed from the vertical plane of the gate electrode to the vertical channel, and the source electrode and/or the drain electrode can be non-overlapping on the gate electrode in the height direction of the gate electrode.
VERTICAL-STRUCTURE FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREFOR
A vertical-structure field-effect transistor comprises: a gate electrode, which is formed on a substrate and has a horizontal plane extending in the planar direction and a vertical plane extending in the height direction; a gate insulating layer for covering the gate electrode; a vertical channel which is formed on the gate insulating layer and has a channel formed in the height direction; a source electrode formed to make contact with one end of the vertical channel; and a drain electrode formed to make contact with the other end of the vertical channel and formed at a height level different from that of the source electrode, wherein channel on/off of the vertical channel is controlled by means of an electric field formed from the vertical plane of the gate electrode to the vertical channel, and the source electrode and/or the drain electrode can be non-overlapping on the gate electrode in the height direction of the gate electrode.
SEMICONDUCTOR DEVICE
A semiconductor includes an active pattern with a lower pattern and sheet patterns spaced apart from the lower pattern in a first direction, a source/drain pattern on the lower pattern, the source/drain pattern being in contact with the sheet patterns, and gate structures on opposite sides of the source/drain pattern, the gate structures being spaced apart from each other along a second direction and including gate electrodes that surround the sheet patterns, wherein the source/drain pattern includes a first epitaxial region having at least one of antimony and bismuth, the first epitaxial region having a bottom part in contact with the lower pattern, but not with the sheet patterns, and a thickness of the bottom part increasing and decreasing away from the gate structures in the second direction, and a second epitaxial region on the first epitaxial region, the second epitaxial region including phosphorus.
SEMICONDUCTOR DEVICE WITH TRIMMED CHANNEL REGION AND METHOD OF MAKING THE SAME
A semiconductor device includes an active area extending in a first direction over a substrate, the active area including at least one conductive path extending from a source region, through a channel region, to a drain region; and a gate dielectric on a surface of the at least one conductive path in the channel region. The semiconductor device also includes an isolating fin at a first side of the active area, the isolating fin having a first fin region having a first fin width adjacent to the source region, a second fin region having a second fin width adjacent to the channel region, and a third fin region having the first fin width adjacent to the drain region; and a gate electrode against the gate dielectric in the channel region.
SEAL RING PATTERNS
Integrated circuit (IC) chips are provided. An IC chip according to the present corner area between an outer corner of the device region and an inner corner of the ring region. The ring region includes a first active region extending along a first direction, a first source/drain contact disposed partially over the first active region and extending along the first direction, and first gate structures disposed completely over the first active region and each extending lengthwise along the first direction. The corner area includes a second active region extending along a second direction that forms an acute angle with the first direction, a second source/drain contact disposed partially over the second active region and extending along the second direction, and second gate structures disposed over the second active region and each extending along the first direction.