Patent classifications
H01L29/76
SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME
Disclosed are semiconductor devices and electronic systems including the same. The semiconductor device may include a stack structure extending in a first direction and including gate electrodes vertically stacked on a substrate, selection structures horizontally spaced apart on the stack structure, an upper isolation structure between the selection structure and extending in the first direction on the stack structure, and vertical structures penetrating the stack structure and the selection structures. The vertical structures include first vertical structures arranged along the first direction and penetrating portions of the upper isolation structure. Each selection structure includes a selection gate electrode and a horizontal dielectric pattern that surrounds top, bottom, and sidewall surfaces of the selection gate electrode. Each selection gate electrode includes a line part extending in the first direction, and an electrode part vertically protruding from the line part and surrounding at least a portion of each first vertical structure.
SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME
Semiconductor devices are provided. The semiconductor devices may include a peripheral circuit structure, a memory cell block arranged on the peripheral circuit structure and including strings, each of which includes a lower select transistor, memory cell transistors, and an upper select transistor connected in series and stacked in a vertical direction, and bit lines on the memory cell block. The bit lines may include a first bit line electrically connected to first to third strings of the strings. The lower select transistors of the first to third strings include first to third lower select gate electrodes, respectively. The second lower select gate electrode may be arranged at a different vertical level from the first lower select gate electrode, and the third lower select gate electrode may be arranged at the same vertical level as the first lower select gate electrode.
SEMICONDUCTOR DEVICE AND DATA STORAGE SYSTEM INCLUDING THE SAME
A semiconductor device and a data storage system including the same, the semiconductor device including a substrate structure; a stack structure; a vertical memory structure; a vertical dummy structure; and an upper separation pattern, wherein hen viewed on a plane at a first height level, higher than a height level of a lowermost end of the upper separation pattern, the dummy channel layer includes a first dummy channel region facing the dummy data storage layer and a second dummy channel region facing the dummy data storage layer, the first dummy channel region having a thickness different from a thickness of the second dummy channel region.
SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE
There are provided a semiconductor memory device and a manufacturing method of the semiconductor memory device. The semiconductor memory device includes a metal pattern including a first line part extending in a first direction and a second line part which is connected to the first line part and extends in a second direction to intersect with the first line part, and a source structure which has a trench. The metal pattern is formed in the trench and the source structure is in contact with a sidewall of the metal pattern.
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
A semiconductor device includes a substrate, a 2-D material layer, source/drain contacts, and a gate electrode. The 2-D material layer is over the substrate, the 2-D material layer includes source/drain regions and a channel region between the source/drain regions, in which the 2-D material layer is made of a transition metal dichalcogenide (TMD). The source/drain contacts are in contact with source/drain regions of the 2-D material layer, in which a binding energy of transition metal atoms at the channel region of the 2-D material layer is different from a binding energy of the transition metal atoms at the source/drain regions of the 2-D material layer. The gate electrode is over the substrate.
Memory arrays and methods used in forming a memory array comprising strings of memory cells
A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The operative channel-material strings in the laterally-spaced memory blocks comprise part of a memory plane. An elevationally-extending wall is in the memory plane laterally-between immediately-laterally-adjacent of the memory blocks and that completely encircles an island that is laterally-between immediately-laterally-adjacent of the memory blocks in the memory plane. Other embodiments, including method are disclosed.
Frame-array interconnects for integrated-circuit packages
Disclosed embodiments include frame-array interconnects that have a ledge portion to accommodate a passive device. A seated passive device is between at least two frame-array interconnects for semiconductor package-integrated decoupling capacitors.
Monolithic multi-FETS
A monolithic multi-FET transistor comprises an epitaxial layer disposed on a dielectric layer. The epitaxial layer comprises a crystalline semiconductor material and a multi-FET area. An isolation structure surrounds the multi-FET area and divides the multi-FET area into separate FET portions. A gate disposed on a gate dielectric extends over each FET portion. A source and a drain are each disposed on opposite sides of the gate on the epitaxial layer within each FET portion. Each gate, source, and drain comprise a separate electrical conductor and the gate, source, drain, and epitaxial layer within each FET portion form a field-effect transistor. Gate, source, and drain contacts electrically connect the gates, sources, and drains of the separate FET portions, respectively. At least the sources or drains of two neighboring FET portions are disposed in common over at least a portion of the isolation structure dividing the two neighboring FET portions.
THREE-DIMENSIONAL STORAGE AND METHOD FOR MANUFACTURING SAME
A method for manufacturing a three-dimensional storage includes: providing a substrate; forming a first connecting layer and a first sacrificial layer; etching part of the first sacrificial layer to form first grooves and second grooves; forming first connecting structures in the first grooves and second connecting structures in the second grooves; forming a second connecting layer on the first sacrificial layer, the second connecting layer filling up the first and second grooves; forming a stacked structure on a surface of the second connecting layer; forming a channel structure and a gate line slit penetrating the stacked structure and extending to the first sacrificial layer; removing the first sacrificial layer and a part of the channel structure corresponding to the first sacrificial layer by the gate line slit to form an opening region; and forming an epitaxial structure layer in the opening region through the gate line slit.
TWO-DIMENSIONAL SEMICONDUCTOR TRANSISTOR HAVING REDUCED HYSTERESIS AND MANUFACTURING METHOD THEREFOR
A two-dimensional semiconductor transistor includes a gate electrode, a gate insulating layer disposed on the gate electrode, an organic dopant layer disposed on the gate insulating layer and comprising an organic material including electrons, a two-dimensional semiconductor layer disposed on the organic dopant layer, a source electrode disposed on the two-dimensional semiconductor layer, and a drain electrode disposed on the two-dimensional semiconductor layer and spaced apart from the source electrode. A hysteresis of the two-dimensional semiconductor transistor is reduced due to the two-dimensional semiconductor transistor including the organic dopant layer.