Patent classifications
H01S3/027
CONTROLLING PRESSURE IN A CAVITY OF A LIGHT SOURCE
Methods and systems for controlling pressure in a cavity of a light source are provided. One system includes a barometric pressure sensor configured for measuring pressure in a cavity of a light source. The system also includes one or more gas flow elements configured for controlling an amount of one or more gases in the cavity. In addition, the system includes a control subsystem configured for comparing the measured pressure to a predetermined range of values for the pressure and, when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.
Method and system for compact efficient laser architecture
A laser amplifier module having an enclosure includes an input window, a mirror optically coupled to the input window and disposed in a first plane, and a first amplifier head disposed along an optical amplification path adjacent a first end of the enclosure. The laser amplifier module also includes a second amplifier head disposed along the optical amplification path adjacent a second end of the enclosure and a cavity mirror disposed along the optical amplification path.
SOLID STATE LASER APPARATUS
A solid state laser apparatus (1) is provided with a plurality of cold heads (20), a cooling apparatus (10), laser media (30) and a seed light source (40). The cooling apparatus cools the plurality of cold heads. The plurality of laser media are arranged in contact to each of the plurality of cold heads, amplify an irradiated first laser beam and reflects the first laser beam. The seed light source irradiates a first laser medium (30-1) of the plurality of laser media with the first laser beam. In addition, the plurality of laser media reflects the first laser beam irradiated to the first laser medium to a laser medium arranged to a cold head different from the cold head where the relevant laser medium is arranged. In addition, the plurality of cold heads cools the plurality of laser media.
Laser apparatus including heat transfer device for releasing heat inside housing to the outside
A laser apparatus includes a heat transfer device having a cooling fin at a temperature lower than that of a heat radiation jacket, and a cooling fan. A controller controls the cooling fan so as to be stopped when temperature detected by a temperature sensor is lower than a temperature reference value and humidity detected by a humidity sensor is higher than a humidity reference value. The controller controls the cooling fan so as to be driven when temperature detected by the temperature sensor is higher than the temperature reference value and humidity detected by the humidity sensor is lower than the humidity reference value.
WAVELENGTH CONVERTER
A wavelength converter including: A. a crystal holder configured to hold a nonlinear crystal configured to convert a wavelength of a laser beam incident thereon and output the wavelength-converted laser beam; B. a first container configured to accommodate the crystal holder and include a light incident window so provided as to intersect an optical path of the laser beam incident on the nonlinear crystal and a light exiting window so provided as to intersect the optical path of the laser beam having exited out of the nonlinear crystal; C. a second container configured to accommodate the first container; D. a position adjusting mechanism configured to adjust at least a position of the first container; and E. an isolation mechanism configured to spatially isolate the light incident window and the light exiting window from the position adjusting mechanism.
LASER SYSTEMS AND OPTICAL DEVICES FOR MANIPULATING LASER BEAMS
Various embodiments of a multi-laser system are disclosed. In some embodiments, the multi-laser system includes a plurality of lasers, a plurality of laser beams, a beam positioning system, a thermally stable enclosure, and a temperature controller. The thermally stable enclosure is substantially made of a material with high thermal conductivity such as at least 5 W/(m K). The thermally stable enclosure can help maintain alignment of the laser beams to a target object over a range of ambient temperatures. Various embodiments of an optical system for directing light for optical measurements such laser-induced fluorescence and spectroscopic analysis are disclosed. In some embodiments, the optical system includes a thermally conductive housing and a thermoelectric controller, a plurality of optical fibers, and one or more optical elements to direct light emitted by the optical fibers to illuminate a flow cell. The housing is configured to attach to a flow cell.
METHOD AND SYSTEM FOR COMPACT EFFICIENT LASER ARCHITECTURE
A laser amplifier module having an enclosure includes an input window, a mirror optically coupled to the input window and disposed in a first plane, and a first amplifier head disposed along an optical amplification path adjacent a first end of the enclosure. The laser amplifier module also includes a second amplifier head disposed along the optical amplification path adjacent a second end of the enclosure and a cavity mirror disposed along the optical amplification path.
LASER APPARATUS AND EUV LIGHT GENERATION SYSTEM
A laser apparatus includes: a plurality of envelope blocks each provided with an optical element and a first temperature sensor and covering part of a laser beam path, the optical element being disposed on the laser beam path, the first temperature sensor being configured to measure a first temperature of gas at a position away from the optical element; an envelope body including the envelope blocks and covering the laser beam path; and a control unit connected with each first temperature sensor and configured to specify an envelope block at which increase of the first temperature is measured in the envelope body as an envelope block at which anomaly is occurring.
Laser oscillator
A laser oscillator having a condensation prevention mechanism capable of extending the life span of a light emitting device while maintaining cost effectiveness as compared to the conventional technique is provided. The laser oscillator includes: a laser beam generating unit; a heat exchanger; a coolant bypass circuit; a coolant circuit connecting these components; a housing storing these components; a coolant circulating unit that circulates a coolant to the laser beam generating unit, the heat exchanger, and the coolant bypass circuit with the aid of the coolant circuit; a first valve that adjusts a flow rate of the coolant supplied to the laser beam generating unit; a second valve that adjusts a flow rate of the coolant supplied to the heat exchanger; a third valve that adjusts the flow rate of the coolant supplied to the coolant bypass circuit; a dew point measuring unit that measures a dew point inside the housing; a temperature measuring unit that measures a coolant temperature; and a control unit that controls the first, second, and third valves on the basis of the dew point and the coolant temperature.
LASER MEDIUM UNIT AND LASER DEVICE
Disclosed is a laser medium unit that includes a laser medium and a holding body. The laser medium has a pair of end surfaces. The holding body surrounds the laser medium when viewed form a direction intersecting with the pair of end surfaces and holds the laser medium. The holding body includes a deformation allowing portion that extends from the inside to the outside of the holding body when viewed from the direction intersecting with the pair of end surfaces. The laser medium and the holding body are in contact with each other. A contact region of the holding body with the laser medium has a width in the direction intersecting with the pair of end surfaces and extends along a side surface of the laser medium when viewed from the direction intersecting with the pair of end surfaces.