A gas laser according to an embodiment includes a gas serving as a laser medium, a thermal radiation source having wavelength selectivity and configured to emit excitation light for excitation of the gas by thermal radiation, and an optical resonator for causing emission light emitted from the gas in response to the excitation light to resonate.

A quasi-monolithic solid-state laser in which the optical components of the laser cavity are bonded to a common substrate via mounts. The optical components and their mounts are fixedly connected to each other and to the substrate by bonding. While the gain medium is bonded to a mount made of a different material with high thermal conductivity for heat sinking, the cavity's lens and mirror components and their mounts are all made of the same material as the substrate, or a different material that is thermally matched to the substrate, and fixedly mounted on the substrate solely with bonding. The bonding is achieved with adhesive bonding, or some other form of bonding such as molecular bonding, chemically activated direct bonding or hydroxide catalysis bonding.

A quasi-monolithic solid-state laser in which the optical components of the laser cavity are bonded to a common substrate via mounts. The optical components and their mounts are fixedly connected to each other and to the substrate by bonding. While the gain medium is bonded to a mount made of a different material with high thermal conductivity for heat sinking, the cavity's lens and mirror components and their mounts are all made of the same material as the substrate, or a different material that is thermally matched to the substrate, and fixedly mounted on the substrate solely with bonding. The bonding is achieved with adhesive bonding, or some other form of bonding such as molecular bonding, chemically activated direct bonding or hydroxide catalysis bonding.

A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.

A light emitting unit includes a light emitting sealed body and a voltage application circuit. The light emitting sealed body includes a container to which laser light for maintaining plasma is incident and from which light from the plasma is emitted, a first electrode which includes a first discharge portion, and a second electrode which includes a second discharge portion. An end portion of the first discharge portion has a shape in which a thickness is thinned as it goes toward the second discharge portion and an end surface of the second discharge portion extends along a plane perpendicular to an extending direction of the first discharge portion. The voltage application circuit controls a potential difference between the first electrode and the second electrode by adjusting a voltage applied to at least the first electrode.

A light emitting unit includes a light emitting sealed body and a voltage application circuit. The light emitting sealed body includes a container to which laser light for maintaining plasma is incident and from which light from the plasma is emitted, a first electrode which includes a first discharge portion, and a second electrode which includes a second discharge portion. An end portion of the first discharge portion has a shape in which a thickness is thinned as it goes toward the second discharge portion and an end surface of the second discharge portion extends along a plane perpendicular to an extending direction of the first discharge portion. The voltage application circuit controls a potential difference between the first electrode and the second electrode by adjusting a voltage applied to at least the first electrode.

A rotation driving device includes: a casing; a stator holding part; a cylindrical member; a flange extending from an end of the cylindrical member in the axial direction toward a rotating shaft, and facing an end of the stator holding part in the axial direction; and a fastening member fastened to the end of the stator holding part in the axial direction via the flange. The flange has a through-hole extending through the flange in the axial direction, and in which the fastening member is inserted. The through-hole has a diameter smaller than that of a head of the fastening member, and larger than that of a screw part of the fastening member. The rotating shaft, the rotor, the stator, the stator holding part, and the cylindrical member are arranged in this order in the radial direction in the casing, and are concentrically arranged.

An optical element for a deep-ultraviolet light source includes a crystalline substrate; a coating on an exterior surface of the crystalline substrate, the coating having a thickness along a direction that extends away from the exterior surface; and a structure on and/or in the coating, the structure including a plurality of features that extend away from the crystalline substrate along the direction. The features include an amorphous dielectric material and are arranged such that an index of refraction of the structure varies along the direction.

A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.

A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.