Patent classifications
H01S3/0404
Laser apparatus and EUV light generation system
A laser apparatus includes: a plurality of envelope blocks each provided with an optical element and a first temperature sensor and covering part of a laser beam path, the optical element being disposed on the laser beam path, the first temperature sensor being configured to measure a first temperature of gas at a position away from the optical element; an envelope body including the envelope blocks and covering the laser beam path; and a control unit connected with each first temperature sensor and configured to specify an envelope block at which increase of the first temperature is measured in the envelope body as an envelope block at which anomaly is occurring.
Laser device
A laser device includes a first laser medium and a second laser medium that have a first surface and a second surface opposite to the first surface, and receive input of excitation light and seed light from the first surface side to amplify the seed light, a holder that holds the first laser medium and the second laser medium; and a pair of cooling units that cool the first laser medium and the second laser medium according to change in volume of a refrigerant.
LASER OSCILLATOR WITH ENHANCED MAINTAINABILITY
A laser oscillator includes a first structure disposed with an optical section, a second structure disposed with a power source section, and an electric cable that electrically connects the optical section and the power source section. The first structure is removably coupled to the second structure, the electric cable is removably connected to at least one of the power source section and the optical section, and the optical section is allowed to be replaced.
LASER PROCESSOR AND LASER BEAM MACHINE
A laser processor includes a laser oscillator housed in a closed housing, an oscillator controller that controls the laser oscillator and is supplied with electric power by a first primary power supply, a dehumidifier that is housed in the closed housing and operates using electric power supplied from a second primary power supply, and a dehumidification controller that controls the dehumidifier and is supplied with electric power by the second primary power supply.
EXCHANGEABLE LASER AND ARRAY THEREOF
Disclosed is an exchangeable laser and an array thereof. The exchangeable laser includes a cartridge receiver having a uniform shape and a uniform electrical interface, and including laser elements inside thereof, and a housing for clamping a cartridge receiver. The power supply and parameter controls of the laser element are realized by cylindrical protrusions with a certain degree of inclination on clip-lock panel and electronic interfaces within cylindrical slots of the cartridge receiver, and the cylindrical protrusions and cylindrical slots with the certain degree of inclination can realize precise positioning of the cartridge receiver and the housing. In the exchangeable laser array of the disclosure, the cartridge receiver inside each housing can be replaced by other cartridge receiver that emits laser with a different wavelength, and the plurality of housings can be connected with a plurality of wavelength switchers in the back to realize selective output of the wavelength.
Exchangeable laser and array thereof
Disclosed is an exchangeable laser and an array thereof. The exchangeable laser includes a cartridge receiver having a uniform shape and a uniform electrical interface, and including laser elements inside thereof, and a housing for clamping a cartridge receiver. The power supply and parameter controls of the laser element are realized by cylindrical protrusions with a certain degree of inclination on clip-lock panel and electronic interfaces within cylindrical slots of the cartridge receiver, and the cylindrical protrusions and cylindrical slots with the certain degree of inclination can realize precise positioning of the cartridge receiver and the housing. In the exchangeable laser array of the disclosure, the cartridge receiver inside each housing can be replaced by other cartridge receiver that emits laser with a different wavelength, and the plurality of housings can be connected with a plurality of wavelength switchers in the back to realize selective output of the wavelength.
OPTICAL SYSTEM ELEMENT, FOR RECEIVING A PRESSURISED FUNCTIONAL FLUID
An optical system element includes a first enclosure designed for receiving in circulation a functional fluid and at least one inlet and/or outlet window located on the first enclosure and through which a light beam can pass. The inlet and/or outlet window includes two viewports which delimit a spacer cavity adjacent to the first enclosure. The spacer cavity is designed to receive a second fluid with a predetermined optical index and is equipped with a device for adjusting the pressure therein. Degradation of a beam during its passage through the inlet and/or outlet window can be limited by careful selection of the optical index of the second fluid and the pressure in the spacer cavity.
Laser processing machine
Provided is a laser processing machine having a Peltier refrigeration element for cooling a cooling medium of a laser oscillator in a body of a small household laser processing machine. A laser processing machine 1 includes a device body 10, a laser oscillator 71 received in the device body 10, a cooling medium flow path provided in the device body 10 for allowing a cooling medium of the laser oscillator 71 to flow, and a cooling device 45 provided with a Peltier refrigeration element for refrigerating the cooling medium flowing in the cooling flow path. A cooling fin 621 for discharging heat generated by the Peltier refrigeration element is connected to the cooling device 45. The cooling fin 621 is installed directly upstream of an airflow direction of an air outlet 121 for discharging air in the device body 10 out of the device body 10.
OPTICAL PULSE STRETCHER, LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
An optical pulse stretcher includes a separation optical element configured to separate pulsed laser light incident on a first surface thereof into first transmitted light and first reflected light, a reflective optical system configured to guide the first reflected light to be incident on a second surface of the separation optical element that is the surface opposite the first surface, and a holding member that has a through hole having an opening area smaller than the area of a reflective surface of a reflective optical element provided in the reflective optical system, is disposed on the rear side of the reflective optical element, and is configured to hold the reflective optical element.
LASER OSCILLATOR UNIT AND LASER MACHINING DEVICE
A laser oscillator unit includes an amplification unit configured to amplify laser light and emit amplified laser light from an emitting portion; a case covering the amplification unit; and an outer support mechanism and an inner support mechanism provided on the case. The case is formed with a window portion. An outer movable leg allows the case to slide in a radial direction around an outer fixed leg. An inner movable leg allows the amplification unit to slide in the radial direction around an inner fixed leg. A straight line passing through a center of the outer fixed leg and a center of the inner fixed leg intersects with a straight line passing through the emitting portion and the window, and a laser optical axis emitted from the emitting portion and a laser optical axis emitted from the window portion coincide with each other.