Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.

A laser marking system for marking a product comprising a laser source for providing a laser beam, a marking head for projecting the laser beam on to the product, a housing comprising an extraction device configured to generate a flow of extraction fluid for extracting matter generated by an interaction between the laser beam and the product, and a controller for controlling the laser source and the marking head. The laser marking system further comprises an umbilical assembly connecting the housing to the marking head.

A laser marking system for marking a product comprising a laser source for providing a laser beam, a marking head for projecting the laser beam on to the product, a housing comprising an extraction device configured to generate a flow of extraction fluid for extracting matter generated by an interaction between the laser beam and the product, and a controller for controlling the laser source and the marking head. The laser marking system further comprises an umbilical assembly connecting the housing to the marking head.

The invention relates to a resonator mirror (4) for an optical resonator (1) of a laser device (2), especially of a gas laser or a slab waveguide laser, comprising a reflective surface (6) with a structured area (5) which spans across a region of the reflective surface (6) centered about the optical axis (5). According to one variant of the principle underlying the invention, the structured area (5) has at least one reflective surface cross-section (8, 18, 28, 38, 48, 58, 68) which is offset with respect to the reflective surface (6) outside the structured area (5) and parallel to the optical axis (A) by half of a predefined wavelength or by a whole multiple of half the predefined wavelength. According to another variant, the structured area (5) has at least two surface cross-sections (8, 18, 28, 38, 48, 58, 68) which are offset against each other and parallel to the optical axis (A) by half of a predefined wavelength or by a whole multiple of half the predefined wavelength. In addition, the invention relates to a laser device (2) whose optical resonator (1) comprises a resonator mirror (4) designed in such a manner.

A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.

A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.

Disclosed is an exchangeable laser unit and an array thereof. The exchangeable laser unit includes cartridge receivers and housings having a uniform shape and uniform optical interfaces. The cartridge receiver adopts the optical interface including a tapered cavity and cylindrical cavity, so that a precise mechanical connection can be achieved between the output of laser of the cartridge receiver and the output of the optical fiber of the housing without professional tools, facilitating standardization of the output components of the laser elements of the cartridge receiver. In addition, the upper-lower guide rails and the upper-lower channels having certain of inclination degree can realize the precise positioning of the cartridge receiver and the housing. When replacing one laser element by a laser element that emits laser with a different wavelength, it is only necessary to replace the cartridge receiver inside the housing. That is, the replacement of laser elements having different wavelengths is converted to the replacement of cartridge receivers, which greatly reduces the difficulty for medical personnel to switch laser wavelengths, and improves the popularization of laser therapeutic instruments in the medical field. In the exchangeable laser array of the disclosure, the cartridge receiver inside the housing can be replaced by other cartridge receiver that emits laser with a different wavelength, and the plurality of housings can be connected with a plurality of wavelength switchers in the back to realize selective output of the wavelength.

A positive high-voltage laser having a super-long discharge tube, including a gas storage tube having two ends respectively provided with a reflecting mirror and a light emitting surface; a water cooling tube in the gas storage tube; and a discharge tube inside the water cooling tube having two ends, each provided with an electrode. A liquid circulation space is between the discharge tube and the water cooling tube, and the water cooling tube extends outside the gas storage tube by water inlet and outlet tubes. A cathode is in a cathode chamber at the end of the discharge tube closest to the light emitting surface; a spiral gas return tube communicates with the cathode chamber; an anode circumscribes the outside of the water cooling tube at the other end of the discharge tube. The positive high-voltage laser can increase power with a limited length.

A positive high-voltage laser having a super-long discharge tube, including a gas storage tube having two ends respectively provided with a reflecting mirror and a light emitting surface; a water cooling tube in the gas storage tube; and a discharge tube inside the water cooling tube having two ends, each provided with an electrode. A liquid circulation space is between the discharge tube and the water cooling tube, and the water cooling tube extends outside the gas storage tube by water inlet and outlet tubes. A cathode is in a cathode chamber at the end of the discharge tube closest to the light emitting surface; a spiral gas return tube communicates with the cathode chamber; an anode circumscribes the outside of the water cooling tube at the other end of the discharge tube. The positive high-voltage laser can increase power with a limited length.

To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.