Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.

A heat storage unit, at least comprises one single-layer closed case (2) that has at least one heat exchange surface (8, 9) and a non-heat exchange surface; the internal space of the closed housing (2) is filled with a foam skeleton (4); the phase change medium (6) is homogeneous distributed in the voids of the foam skeleton (4), and forms a composite material (02) together with the foam skeleton (4), the composite material has a higher thermal conductivity coefficient than that of the pure phase transition medium (6); vibration particles (3) are made of shape memory alloy, pressed into strips and then filled into the voids of the foam copper frame (4) by filtration; the ultrasonic generator (05) emits ultrasonic to induce the vibration particles (3) to generate vibration, the vibration converts the liquid phase transition medium (6) from natural convection or pure heat conduction to forced convection.

A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include fluid coolant channels. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include fluid coolant channels. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

A laser-heated cavity system includes: a first cavity provided with a first top end part and a first bottom end part that are arranged opposite each other; wherein the first top end part is provided with a first widow and the first bottom end part is provided with an opening; a second cavity disposed inside the first cavity, provided with a second top end part and a second bottom end part that are arranged opposite each other, and disposed with a second window and a sample bearer; a laser heating assembly disposed outside the first cavity; wherein at least one laser beam provided by the laser heating assembly is passed through the first and second windows, and then focused on the sample bearer; and a mobile platform assembly. The first cavity is a vacuum cavity, and the pressure in the second cavity ranges from vacuum to 30 atm.

A laser-heated cavity system includes: a first cavity provided with a first top end part and a first bottom end part that are arranged opposite each other; wherein the first top end part is provided with a first widow and the first bottom end part is provided with an opening; a second cavity disposed inside the first cavity, provided with a second top end part and a second bottom end part that are arranged opposite each other, and disposed with a second window and a sample bearer; a laser heating assembly disposed outside the first cavity; wherein at least one laser beam provided by the laser heating assembly is passed through the first and second windows, and then focused on the sample bearer; and a mobile platform assembly. The first cavity is a vacuum cavity, and the pressure in the second cavity ranges from vacuum to 30 atm.

A positive high-voltage laser having a super-long discharge tube, including a gas storage tube having two ends respectively provided with a reflecting mirror and a light emitting surface; a water cooling tube in the gas storage tube; and a discharge tube inside the water cooling tube having two ends, each provided with an electrode. A liquid circulation space is between the discharge tube and the water cooling tube, and the water cooling tube extends outside the gas storage tube by water inlet and outlet tubes. A cathode is in a cathode chamber at the end of the discharge tube closest to the light emitting surface; a spiral gas return tube communicates with the cathode chamber; an anode circumscribes the outside of the water cooling tube at the other end of the discharge tube. The positive high-voltage laser can increase power with a limited length.

A positive high-voltage laser having a super-long discharge tube, including a gas storage tube having two ends respectively provided with a reflecting mirror and a light emitting surface; a water cooling tube in the gas storage tube; and a discharge tube inside the water cooling tube having two ends, each provided with an electrode. A liquid circulation space is between the discharge tube and the water cooling tube, and the water cooling tube extends outside the gas storage tube by water inlet and outlet tubes. A cathode is in a cathode chamber at the end of the discharge tube closest to the light emitting surface; a spiral gas return tube communicates with the cathode chamber; an anode circumscribes the outside of the water cooling tube at the other end of the discharge tube. The positive high-voltage laser can increase power with a limited length.

A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include any direct fluid-cooling means. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include any direct fluid-cooling means. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.