A light emitting unit includes a light emitting sealed body and a voltage application circuit. The light emitting sealed body includes a container to which laser light for maintaining plasma is incident and from which light from the plasma is emitted, a first electrode which includes a first discharge portion, and a second electrode which includes a second discharge portion. An end portion of the first discharge portion has a shape in which a thickness is thinned as it goes toward the second discharge portion and an end surface of the second discharge portion extends along a plane perpendicular to an extending direction of the first discharge portion. The voltage application circuit controls a potential difference between the first electrode and the second electrode by adjusting a voltage applied to at least the first electrode.

A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.

A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.

A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.

A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.

A laser gas regenerating apparatus regenerates a discharged gas discharged from at least one ArF excimer laser apparatus and supplies the regenerated gas to the at least one ArF excimer laser apparatus connected to a first laser gas supply source that supplies a first laser gas and to a second laser gas supply source that supplies a second laser gas. The laser gas regenerating apparatus includes a data obtaining unit that obtains data on a supply amount of the second laser gas supplied to the at least one ArF excimer laser apparatus; a xenon adding unit that adds, to the regenerated gas, a third laser gas; and a control unit that controls, based on the supply amount, an addition amount of the third laser gas by the xenon adding unit.

A light emitting unit includes a light emitting sealed body and a voltage application circuit. The light emitting sealed body includes a container to which laser light for maintaining plasma is incident and from which light from the plasma is emitted, a first electrode which includes a first discharge portion, and a second electrode which includes a second discharge portion. An end portion of the first discharge portion has a shape in which a thickness is thinned as it goes toward the second discharge portion and an end surface of the second discharge portion extends along a plane perpendicular to an extending direction of the first discharge portion. The voltage application circuit controls a potential difference between the first electrode and the second electrode by adjusting a voltage applied to at least the first electrode.

An improved dental laser system has been developed to cut enamel quickly and precisely, without detrimental residual energy, to provide a replacement for conventional high speed rotary burrs and commercially available dental laser systems.

A control device that can apply a laser oscillator control device to various types of systems. The control device includes an analog signal input unit configured to receive an output control signal for controlling a laser output of the laser oscillator or a mode control signal for controlling an operation mode of the laser oscillator as an analog signal; a digital signal input unit configured to receive the output control signal or the mode control signal as a digital signal; and a controller configured to transmit a laser command for controlling the laser output to the laser oscillator in response to the output control signal received by the analog signal input unit or the digital signal input unit, and transmit an operation command for operating the laser oscillator to the laser oscillator in the operation mode in response to the mode control signal received by the analog signal input unit or the digital signal input unit.