Patent classifications
H01S3/0971
LASER SOURCE DEVICE AND EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE
A device includes a laser source, an amplifier, an optical sensor and a spectrometer. The laser source is configured to produce a seed laser beam. The amplifier includes gain medium and a discharging unit. The discharging unit is configured to pump the gain medium for amplifying power of the seed laser beam. The optical sensor is coupled to the amplifier and configured for sensing an optical emission generated in the amplifier while the gain medium is discharging. The spectrometer is coupled with the optical sensor and configured to measure a spectrum of the optical emission.
Solid-state laser device, solid-state laser system, and laser device for exposure device
A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.
Solid-state laser device, solid-state laser system, and laser device for exposure device
A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.
LASER APPARATUS AND EUV LIGHT GENERATING SYSTEM
A laser apparatus includes an optical element disposed on a laser beam axis, an actuator configured to displace the optical element to displace the laser beam axis, a driving amount monitor configured to monitor a driving amount of the actuator, an optical axis monitor disposed along the laser beam axis and configured to monitor the laser beam axis, and a control unit configured to control the actuator based on a monitoring result of the optical axis monitor and determine abnormality of the optical element based on a monitoring result of the driving amount monitor.
Optical resonators that utilize plasma confinement of a laser gain media
Laser amplification utilizing plasma confinement of a gas laser gain media is described. The gas laser gain media is compressed into plasma utilizing a self-reinforcing magnetic field referred to a plasma pinch (e.g., a flow stabilized z-pinch). In the plasma pinch, the gas laser gain media is compressed to a high density, which improves the gain of the media. An optical resonator partially surrounds the plasma pinch and utilizes the laser gain media compressed within the plasma pinch to generate an output of coherent light.
Laser apparatus
A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element; and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.
Radio frequency laser
A radio frequency laser includes: a power box, a radio frequency cavity, an electrode, and a first metal blocking ring. A bottom plate of the power box is provided with a first installation hole and a first installation groove, and the first installation groove is arranged around the first installation hole. A top plate of the radio frequency cavity is provided with a second installation hole and a second installation groove, and the second installation groove is arranged around the second installation hole. When the power box is assembled with the radio frequency cavity, the second installation hole corresponds to the first installation hole, and the second installation groove corresponds to the first installation groove.
Radio frequency laser
A radio frequency laser includes: a power box, a radio frequency cavity, an electrode, and a first metal blocking ring. A bottom plate of the power box is provided with a first installation hole and a first installation groove, and the first installation groove is arranged around the first installation hole. A top plate of the radio frequency cavity is provided with a second installation hole and a second installation groove, and the second installation groove is arranged around the second installation hole. When the power box is assembled with the radio frequency cavity, the second installation hole corresponds to the first installation hole, and the second installation groove corresponds to the first installation groove.
OPTICAL RESONATORS THAT UTILIZE PLASMA CONFINEMENT OF A LASER GAIN MEDIA
Laser amplification utilizing plasma confinement of a gas laser gain media is described. The gas laser gain media is compressed into plasma utilizing a self-reinforcing magnetic field referred to a plasma pinch (e.g., a flow stabilized z-pinch). In the plasma pinch, the gas laser gain media is compressed to a high density, which improves the gain of the media. An optical resonator partially surrounds the plasma pinch and utilizes the laser gain media compressed within the plasma pinch to generate an output of coherent light.
Multilayer electrode assembly
Systems and techniques for multilayer electrode assemblies are generally described. In some examples, a multilayer electrode assembly may comprise a first dielectric material. In some examples, the first dielectric material may be shaped so as to form a channel defined by an interior surface. In various examples the multilayer electrode assemblies may comprise a first metal layer disposed adjacent to a first portion of the exterior surface of the first dielectric material. In various further examples, the multilayer electrode assemblies may comprise a second metal layer disposed adjacent to a second portion of the exterior surface of the first dielectric material. In some examples, the first metal layer may be disposed in a first spaced relationship with the second metal layer. In various examples, a substantially uniform electric field may be generated in the channel of the first dielectric material when a voltage is applied to the multilayer electrode assembly.