A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

A dielectric resonator is excited at its natural resonant frequency to produce a highly uniform electric field for the generation of plasma. The plasma may be used in a optical or mass spectrometer.

A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.

A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.

A chamber device includes a pair of discharge electrodes arranged with a longitudinal direction oriented along a predetermined direction as being apart from and facing each other; a chamber having an internal space where the pair of discharge electrodes are arranged; capacitors arranged in parallel along the predetermined direction; a power supply terminal electrically connecting one discharge electrode and one terminal of each capacitor to a high-voltage power source; and a connection member extending in the predetermined direction, electrically connected to the other terminal of each capacitor, and having a portion away from a side electrically connected to the other terminal in the direction perpendicular to the predetermined direction be connected to the ground. The connection member includes an inductance compensation structure that makes a distribution of inductance due to a distance between the power supply terminal and the one terminal of each of the capacitors close to be uniform.

A chamber device includes a pair of discharge electrodes arranged with a longitudinal direction oriented along a predetermined direction as being apart from and facing each other; a chamber having an internal space where the pair of discharge electrodes are arranged; capacitors arranged in parallel along the predetermined direction; a power supply terminal electrically connecting one discharge electrode and one terminal of each capacitor to a high-voltage power source; and a connection member extending in the predetermined direction, electrically connected to the other terminal of each capacitor, and having a portion away from a side electrically connected to the other terminal in the direction perpendicular to the predetermined direction be connected to the ground. The connection member includes an inductance compensation structure that makes a distribution of inductance due to a distance between the power supply terminal and the one terminal of each of the capacitors close to be uniform.