A laser chamber apparatus according to an aspect of the present disclosure includes a chamber, a first discharge electrode, a second discharge electrode, an electrically conductive holder configured to hold the first discharge electrode, a first dielectric pipe disposed along the first discharge electrode, a second dielectric pipe facing the first dielectric pipe and disposed along the second discharge electrode, a first preliminary ionization electrode disposed in an inner space of the first dielectric pipe, a second preliminary ionization electrode disposed in an inner space of the second dielectric pipe, a first insulating holder disposed in the electrically conductive holder and holding one-side end portions of the first dielectric pipe and the second dielectric pipe, and a second insulating holder disposed in the electrically conductive holder and holding another-side end portions of the first dielectric pipe and the second dielectric pipe.

A laser chamber apparatus according to an aspect of the present disclosure includes a chamber, a first discharge electrode, a second discharge electrode, an electrically conductive holder configured to hold the first discharge electrode, a first dielectric pipe disposed along the first discharge electrode, a second dielectric pipe facing the first dielectric pipe and disposed along the second discharge electrode, a first preliminary ionization electrode disposed in an inner space of the first dielectric pipe, a second preliminary ionization electrode disposed in an inner space of the second dielectric pipe, a first insulating holder disposed in the electrically conductive holder and holding one-side end portions of the first dielectric pipe and the second dielectric pipe, and a second insulating holder disposed in the electrically conductive holder and holding another-side end portions of the first dielectric pipe and the second dielectric pipe.