A radiation system for controlling pulses of radiation comprising an optical element configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, an actuator configured to actuate the optical element according to a control signal received from a controller, the control signal at least partially depending on a reference pulse repetition rate of the radiation system and, a processor configured to receive pulse information from the controller and use the pulse information to determine an adjustment to the control signal. The radiation system may be used to improve an accuracy of a lithographic apparatus operating in a multi-focal imaging mode.

A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.

A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.

A multisection digital supermode-distributed Bragg reflector (MSDS-DBR) comprising: a plurality P of digital supermode Bragg reflector (DS-DBR) grating sections arranged along a waveguide; wherein each DS-DBR grating section is configured to pass or reflect light over a given spectral region, the given spectral region being different from the spectral regions of the other DS-DBR grating sections; wherein each DS-DBR grating section comprises a plurality M of grating sub-regions, each sub-region corresponding to a spectral sub-band within the spectral region of the DS-DBR grating section, and wherein each grating sub-region includes a positive electrical contact and a negative electrical contact; said grating sub-region being configured to pass or reflect light of its spectral sub-band when an electrical bias is provided between its positive and negative electrical contacts.

A tunable laser has a first mirror, a second mirror, a gain medium, and a directional coupler. The first mirror and the second mirror form an optical resonator. The gain medium and the directional coupler are, at least partially, in an optical path of the optical resonator. The first mirror and the second mirror comprise binary super gratings. Both the first mirror and the second mirror have high reflectivity. The directional coupler provides an output coupler for the tunable laser.

A tunable laser has a first mirror, a second mirror, a gain medium, and a directional coupler. The first mirror and the second mirror form an optical resonator. The gain medium and the directional coupler are, at least partially, in an optical path of the optical resonator. The first mirror and the second mirror comprise binary super gratings. Both the first mirror and the second mirror have high reflectivity. The directional coupler provides an output coupler for the tunable laser.

Examples of robust self-starting passively mode locked fiber oscillators are described. In certain implementations, the oscillators are configured as Fabry-Perot cavities containing an optical loop mirror on one cavity end and a bulk mirror or saturable absorber on the other end. The loop mirror can be further configured with an adjustable line phase delay to optimize modelocking. All intra-cavity fiber(s) can be polarization maintaining. Dispersion compensation components such as, e.g., dispersion compensation fibers, bulk diffraction gratings or fiber Bragg gratings may be included. The oscillators may include a bandpass filter to obtain high pulse energies when operating in the similariton regime. The oscillator output can be amplified and used whenever high power short pulses are required. For example the oscillators can be configured as frequency comb sources or supercontinuum sources. In conjunction with repetition rate modulation, applications include dual scanning delay lines and trace gas detection.

Examples of robust self-starting passively mode locked fiber oscillators are described. In certain implementations, the oscillators are configured as Fabry-Perot cavities containing an optical loop mirror on one cavity end and a bulk mirror or saturable absorber on the other end. The loop mirror can be further configured with an adjustable line phase delay to optimize modelocking. All intra-cavity fiber(s) can be polarization maintaining. Dispersion compensation components such as, e.g., dispersion compensation fibers, bulk diffraction gratings or fiber Bragg gratings may be included. The oscillators may include a bandpass filter to obtain high pulse energies when operating in the similariton regime. The oscillator output can be amplified and used whenever high power short pulses are required. For example the oscillators can be configured as frequency comb sources or supercontinuum sources. In conjunction with repetition rate modulation, applications include dual scanning delay lines and trace gas detection.

Provided are a tunable wavelength filter with an embedded metal temperature sensor and an external-cavity type tunable wavelength laser module. In detail, the tunable wavelength filter with an embedded metal temperature sensor and the external-cavity type tunable wavelength laser module achieve wavelength stability by forming a metal temperature sensor using a resistance change of a metal thin film according to temperature on a point on an isothermal layer having the same temperature distribution as the optical waveguide during a process for fabricating the optical waveguide with polymer to accurately measure a temperature of an optical waveguide.

The multi wavelength laser device includes a laser light source 10 that emits a plurality of laser lights 20 whose fundamental wavelengths differ from one another, a dispersing element 30 that changes the traveling direction of each of the plurality of laser lights according to the wavelength and the incidence direction, and that emits the laser lights in a state in which the laser lights are superposed on the same axis, and a wavelength conversion element 40 that has a plurality of polarization layers disposed therein and having different periods, and that performs wavelength conversion on the fundamental wave laser lights emitted from the dispersing element 30 and placed in the state in which the laser lights are superposed on the same axis, and emits a plurality of laser lights 50 acquired through the wavelength conversion in a state in which the laser lights are superposed on the same axis.