The present invention discloses a high-peak-power single-frequency narrow-linewidth nanosecond fiber laser based on a triangular pulse, wherein the laser includes: pulsed laser generated by the laser seed injecting into a first power pre-amplifier through a first isolator, and then injecting into a second pre-amplifier and then injecting into a power amplifier; wherein triangle-shaped pulsed laser with fast rising edge is obtained by using electro-optic and acousto-optic modulator to modulate continuous wave single-frequency laser or a single-frequency semiconductor laser directly modulated by radio frequency signal; single-frequency triangle-shaped pulsed laser is employed as the laser source according to the characteristics of narrow intrinsic linewidth and suppression of linewidth broadening caused by SPM, and the power of pulsed laser is amplified through the MOPA system.

A method and apparatus for control of a dose of extreme ultraviolet (EUV) radiation generated by a laser produced plasma (LPP) EUV light source that combines pulse control mode and pulse modulation. The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined, a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. If the desired pulse energy for the next droplet is within the range of one or more pulse modulation actuators, the pulse is modulated; otherwise, the pulse is fired to miss the droplet. This provides greater control of the accumulated dose as well as uniformity of the EUV energy over time, greater ability to compensate for pulses that generate EUV energy that is higher or lower than nominal expected values, and ability to provide an average EUV energy per pulse that is less than the nominal minimum EUV energy per pulse of the system.

Exemplary apparatus and method are provided. In particular, an electromagnetic radiation can be emitted with, e.g. a light source arrangement. For example, the light source arrangement can include a cavity and a filter, and a spectrum of the electromagnetic radiation can be controlled, e.g., with such cavity and filter, to have a mean frequency that changes (i) at an absolute rate that is greater than about 100 terahertz per millisecond, and (ii) over a range that is greater than about 10 terahertz. Additionally or alternatively, the light source arrangement can include a frequency shifting device which can shift the mean frequency of the electromagnetic radiation.

An optical device including an acousto-optic modulator (AOM), a laser, an upstream optical fibre extending between the laser and the AOM, a downstream optical fibre located downstream of the AOM and a reflector connected to the fibre downstream of the AOM. The optical device including the upstream fibre is a polarisation-maintaining optical fibre, and/or the downstream fibre is arranged so that a transit time of the optical beam through said downstream fibre from the AOM to the reflecting means is nonzero and shorter than or equal to half an open duration of the AOM, and/or the AOM includes a crystal in which the entrance/exit faces are planar and are at a nonzero angle to each other, and/or at least one of the two entrance/exit faces is at a nonzero angle to a direction of propagation of the acoustic wave in the crystal.

A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.

The present invention discloses a high-peak-power single-frequency narrow-linewidth nanosecond fiber laser based on a triangular pulse, wherein the laser includes: pulsed laser generated by the laser seed injecting into a first power pre-amplifier through a first isolator, and then injecting into a second pre-amplifier and then injecting into a power amplifier; wherein triangle-shaped pulsed laser with fast rising edge is obtained by using electro-optic and acousto-optic modulator to modulate continuous wave single-frequency laser or a single-frequency semiconductor laser directly modulated by radio frequency signal; single-frequency triangle-shaped pulsed laser is employed as the laser source according to the characteristics of narrow intrinsic linewidth and suppression of linewidth broadening caused by SPM, and the power of pulsed laser is amplified through the MOPA system.

A femtosecond pulse laser apparatus includes a pump light source configured to provide a pump light, a gain medium configured to obtain a gain of a laser light using the pump light, a first curved mirror and a second curved mirror, which are provided at both sides of the gain medium, an output mirror configured to transmit a portion of the laser light and reflect the other portion of the laser light to the gain medium, a mode locking portion configured to generate a femtosecond pulse of the laser light, and an acoustic wave generator configured to provide an acoustic wave into the gain medium so as to adjust self-phase modulation of the laser light.

Provided is a laser oscillation device including; a plurality of semiconductor laser diodes (1a to 1e); optical component (5) that directs a plurality of laser beams emitted from the plurality of semiconductor laser diodes in a specific direction to generate a superimposed laser beam including the plurality of laser beams and propagating in the specific direction; and optical switching element (130) that receives the superimposed laser beam from optical component (5). The superimposed laser beam has a plurality of wavelengths.

A beam positioner for deflecting a beam path, along which a diffracted beam of linearly polarized laser light is propagatable, within a two-dimensional scan field, the beam positioner includes a first acousto-optic deflectors (AOD) to deflect the beam path within a first one-dimensional scan field extending along a first axis of the two-dimensional scan field, a second AOD to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field, a phase retarder arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD and a mirror arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD.

A laser resonator includes a gain medium that produces light from pump energy and a variable light attenuator, which receives light and emits either (i) a first light including a continuous series of micropulses, or (ii) a second light including a series of macropulses at spaced time intervals, where each macropulse includes a series of micropulses. Each micropulse has a duration of 0.1 to 10 microseconds, and a duration of each macropulse is less than the time interval between each macropulse, and the micropulses have a frequency of 5 kHz to 40 kHz.