A coherent fiber array laser power projection system scalable to large number of subapertures and includes sensors that produce signals dependent upon beam characteristics, and controllers configured to control beam characteristics to achieve either phasing of outgoing beams at transmitter plane or coherent beam combining at a remote target or both.

A method is disclosed for controlling a pulse repetition rate of pulsed laser beam 1 created by pulsed laser oscillator 100, includes generating beam 1 by oscillator 100, splitting beam 1 into first pulsed split beam 1a and second pulsed split beam 1b, time-delaying split beam 1a relative to split beam 1b by optical delay device 220, generating timing baseband signal Sc including a timing jitter of the pulse repetition rate based on split beam 1a and second split beam 1b by timing detector device 230, generating feedback signal Sf based on timing baseband signal Sc, and applying feedback signal Sf on oscillator 100 and controlling the pulse repetition rate of beam 1 based on the feedback signal Sf. Furthermore, repetition rate control apparatus 200 for controlling a pulse repetition rate of pulsed laser oscillator 100 and pulsed laser oscillator 100, comprising repetition rate control apparatus 200 are described.

A laser system includes a signal source configured to generate input pulses, a diffraction grating module configured to stretch and split the input pulses into a plurality of spectral channels, a set of phase control devices, each phase control device being configured for spectral phase control of a respective spectral channel of the plurality of spectral channels, a power amplifier array of amplifier modules, each amplifier module of the power amplifier array being configured to amplify a respective spectral channel of the plurality of spectral channels, a spectral combiner configured to spectrally combine the plurality of spectral channels via diffraction grating-based pulse compression, and a feedback controller coupled to the spectral combiner to provide feedback to the set of phase control devices for pulse shaping.

An information processing device includes a processor and a storage device. The processor is configured to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read from the storage device.

A laser processing apparatus includes a semiconductor laser element, a waveform output unit for outputting input waveform data, a driver circuit for supplying a drive current having a time waveform according to the input waveform data to the semiconductor laser element, and a processing optical system for irradiating a processing object with laser light. The semiconductor laser element outputs the laser light in which two or more light pulse groups each including one or a plurality of light pulses are provided with a time interval therebetween. Time waveforms of at least two light pulse are different from each other. The time waveform includes at least one of a time waveform of each of the one or plurality of light pulses, a time width of each of the one or plurality of light pulses, and a time interval of the plurality of light pulses.

A single-frequency laser apparatus comprises a mirror and a volume Bragg grating (VBG) reflector defining a laser cavity therebetween and an optical gain material for emitting and amplifying an intra-cavity beam in the laser cavity. The optical gain material comprises a transition-metal doped crystal such as a crystal doped with transition-metal ions selected from one or more of Ti.sup.3+ ions, Cr.sup.2+ ions, Cr.sup.3+ ions or Cr.sup.4+ ions. A reflectivity spectrum of the VBG reflector and an optical length of the laser cavity are selected so that a beam output from the laser cavity is a single-frequency output beam and/or includes only one longitudinal mode of the laser cavity. The laser apparatus may provide a robust, compact, low cost, high-power wavelength adjustable (from approximately 650 to 950 nm), narrow linewidth (<100 kHz), single frequency laser source which is suitable for a wide range of applications from laser sensing, spectroscopy, and high precision frequency metrology sectors.

A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.

The invention provides an excimer laser system including a means for calibrating laser output to compensate for increased variation in laser optical fibers.

There is provided a laser controller comprising: an electromagnetic radiation source operable to transmit radiation into the environment; a backscatter detector operable to detect backscattered radiation from the environment; and a processor operable to generate a laser control signal based on characteristics of the detected backscattered radiation.

Provided are a time and frequency control method and system for optical comb. The method includes: controlling an optical comb measuring system to start and to generate an optical comb; obtaining monitoring data, wherein the monitoring data comprises a working temperature, a mode-locked frequency and a light pump power, wherein the mode-locked frequency comprises a repetition frequency and a carrier envelope phase locked at the end of starting the optical comb measuring system; determining whether an offset of the mode-locked frequency exceeds a self-feedback adjustment range of a hardware adjustment circuit; and in response to any of the repetition frequency and the carrier envelope phase exceeds the self-feedback adjustment range, adjusting the working temperature and the light pump power until the mode-locked frequency returns back into the self-feedback adjustment range.