Patent classifications
H01S3/1306
MEASUREMENT OF PULSED LASER OUTPUT USING OPTICAL DETECTION OF DUTY CYCLE
Systems and methods are disclosed for measuring pulsed laser output. An example system comprises a laser configured to emit output in pulses; at least one sensor positioned to sense laser output and configured to convert that output into electrical signals; an edge detector configured to detect at least leading edges of a plurality of laser pulses; an analog to digital converter configured to convert electrical signals from a sensor into digital signals indicative of laser power output; and a controller; wherein, based on the detection of at least the leading edges of the laser pulses, the controller is configured to obtain samples of laser power output during the laser pulses. The system may refrain from sampling laser power output between laser pulses or may sample laser power output between laser pulses at a reduced sample rate. The system may use the samples of laser power output in a feedback loop to automatically adjust laser power.
DEVICE AND METHOD FOR GENERATING LASER PULSES BY KERR LENS BASED MODE LOCKING WITH A LOSS-MODULATION DEVICE AS A KERR MEDIUM
A laser device (100), being configured for generating laser pulses by Ken lens based mode locking, comprises a laser resonator (10) with a plurality of resonator mirrors (11.1, 11.2, 11.3) spanning a resonator beam path (12), a solid state gain medium (20) being arranged in the laser resonator (10), a Kerr medium device (30) being arranged with a distance from the gain medium (20) in the laser resonator (10), wherein the Kerr medium device (30) includes at least one Ken medium being arranged in a focal range of the resonator beam path and being configured for forming the laser pulses by the nonlinear Kerr effect, and a loss-modulation device (31, 32) having a modulator medium, which is capable of modulating a power loss of the laser pulses generated in the laser resonator (10), wherein the Kerr medium device (30) includes the modulator medium of the loss-modulation device (31, 32) as the at least one Kerr medium having an optical non-linearity being adapted for both of creating the Kerr lens based mode-locking in the laser resonator and modulating the power loss in the laser resonator. Furthermore, a method of generating laser pulses by Kerr lens based mode locking is described, wherein a loss-modulation device (31, 32) is used for both of introducing a Ken effect in the laser resonator (10) and modulating the power loss.
ALL SOLID-STATE LASER LIGHT SOURCE DEVICE
An all solid-state laser light source device comprises a diode-pump laser and the following devices sequentially arranged in an optical path direction of laser light: a coupling optical fiber, a coupling lens assembly, and a resonant cavity. An anisotropic laser crystal is provided in the resonant cavity. Absorption spectra of the anisotropic laser crystal comprise a polarization absorption spectrum and a polarization absorption spectrum. Each of the polarization absorption spectrum and the polarization absorption spectrum has a peak pump region and a left pump region and a right pump region arranged on either side of the peak pump region. Pump light outputted by diode-pump laser has a wavelength falling within the left pump region or the right pump region.
MONITORING APPARATUS FOR OPTICAL AMPLIFIER, OPTICAL AMPLIFYING SYSTEM, AND METHOD OF MONITORING AMPLIFIED OPTICAL SIGNAL
It is difficult to flatten the gain profile of an optical amplifier without increasing the power consumption, the cost, and the size of the optical amplifier; therefore, a monitoring apparatus for optical amplifier according to an exemplary aspect of the invention includes an optical filtering means for receiving a monitor light beam of the optical amplifier and transmitting a filtered monitor light beam with a set range of wavelength band; a photoelectric conversion means for converting the filtered monitor light beam into a monitoring signal; and a spectrum information generating means for generating spectrum information based on the monitoring signal, the spectrum information including information on a spectrum profile of output of the optical amplifier.
FAST INTENSITY STABILIZATION OF MULTIPLE CONTROLLER BEAMS WITH CONTINUOUS INTEGRATING FILTER
Aspects of the present disclosure describe techniques for fast stabilization of multiple controller beams with continuous integrating filter. For example, a method is described for intensity stabilization of laser beams (e.g., ion controller beams) in a trapped ion system, where the method includes applying a linear array of laser beams to respective ions in a linear array of ions in a trap, performing, in response to the laser beams being applied, parallel measurements on the ions, the parallel measurements including multiple, separate measurements on each of the ions to identify fluctuations in intensity in the respective laser beams at each ion, and adjusting the intensity of one or more of the laser beams in response to fluctuations being identified from the parallel measurements. A corresponding system for intensity stabilization of laser beams in a trapped ion system is also described.
Fast intensity stabilization of multiple controller beams with continuous integrating filter
Aspects of the present disclosure describe techniques for fast stabilization of multiple controller beams with continuous integrating filter. For example, a method is described for intensity stabilization of laser beams (e.g., ion controller beams) in a trapped ion system, where the method includes applying a linear array of laser beams to respective ions in a linear array of ions in a trap, performing, in response to the laser beams being applied, parallel measurements on the ions, the parallel measurements including multiple, separate measurements on each of the ions to identify fluctuations in intensity in the respective laser beams at each ion, and adjusting the intensity of one or more of the laser beams in response to fluctuations being identified from the parallel measurements. A corresponding system for intensity stabilization of laser beams in a trapped ion system is also described.
Control System and Method
A control system for controlling a laser, comprising a sensor for sensing a physical value indicative of a characteristic of a laser beam emitted by the laser, a switch, a first controller and a second controller. Each controller is configured, to receive a further sensor value from the sensor, adjust a received setpoint value based on the received further sensor value to give an output value and cause the laser to operate in accordance with the output value. The switch is configured to switch between the controllers such that output values are provided from each controller in a cyclic fashion.
LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser gas regenerating apparatus regenerates a discharged gas discharged from at least one ArF excimer laser apparatus and supplies the regenerated gas to the at least one ArF excimer laser apparatus connected to a first laser gas supply source that supplies a first laser gas and to a second laser gas supply source that supplies a second laser gas. The laser gas regenerating apparatus includes a data obtaining unit that obtains data on a supply amount of the second laser gas supplied to the at least one ArF excimer laser apparatus; a xenon adding unit that adds, to the regenerated gas, a third laser gas; and a control unit that controls, based on the supply amount, an addition amount of the third laser gas by the xenon adding unit.
LASER CHAMBER, METHOD FOR MANUFACTURING SEAL MEMBER, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.
Optical fiber laser device
An optical fiber laser device generates laser light by using an optical amplifying fiber as an amplification medium in a laser oscillator and includes: an optical outputting fiber configured to emit laser light to an outside; a return-light-attenuating portion configured to perform an attenuation process to return light propagating through at least the optical outputting fiber in a reverse direction of the laser light; a thermal conversion unit provided at the return-light-attenuating portion and configured to convert the return light into heat; a temperature-monitoring device configured to measure an increase in a temperature, of the return-light-attenuating portion, caused by the heat converted by the thermal conversion unit; and a control unit configured to decrease or stop an output of the laser light when the temperature measured by the temperature-monitoring device becomes a predetermined threshold temperature or higher.