Patent classifications
H01S3/2391
Optical isolation module
An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.
Laser systems and optical devices for manipulating laser beams
Various embodiments of a multi-laser system are disclosed. In some embodiments, the multi-laser system includes a plurality of lasers, a plurality of laser beams, a beam positioning system, a thermally stable enclosure, and a temperature controller. The thermally stable enclosure is substantially made of a material with high thermal conductivity such as at least 5 W/(m K). The thermally stable enclosure can help maintain alignment of the laser beams to a target object over a range of ambient temperatures. Various embodiments of an optical system for directing light for optical measurements such laser-induced fluorescence and spectroscopic analysis are disclosed. In some embodiments, the optical system includes a thermally conductive housing and a thermoelectric controller, a plurality of optical fibers, and one or more optical elements to direct light emitted by the optical fibers to illuminate a flow cell. The housing is configured to attach to a flow cell.
A FIBER LASER SYSTEM
The present invention provides a fiber laser system, comprising: a master laser cavity for generating a master laser beam; a beam splitter for splitting the master laser beam into a first beam for generating a first color pulsed laser beam and a second beam for generating a second color pulsed laser beam; and a synchronization component configured to synchronize the first color pulsed laser beam and a second color pulsed laser beam based on coherent wavelength generation.
MITIGATING STIMULATED BRILLOUIN SCATTERING IN HIGH POWER OPTICAL AMPLIFIER SYSTEM
A system has fiber amplifiers that amplify a seed signal into a high power signal. Control circuity drives the fiber amplifiers. An auxiliary broad-linewidth signal can be selectively introduced to mitigate the onset of Stimulated Brillouin Scattering (SBS) when the primary input seed source does not meet the requirements of power and/or linewidth. To determine whether to mitigate SBS, an input photodiode can detect the seed signal, and the control circuity can detect an operational parameter associated with a detected signal indicative of an onset of SBS on the optical path. In response to the detection, the control circuitry introduces an auxiliary broad-linewidth signal from a broad-linewidth source, which can mitigate the onset of SBS on the optical path.
LIGHT AMPLIFICATION DEVICE, LIGHT TRANSMISSION SYSTEM, AND LIGHT AMPLIFICATION METHOD
Light amplification devices using coupled multi-core optical fibers have a figure of merit that temporally varies, which makes it difficult to perform performance evaluation and to build a light transmission system using the same. Accordingly, a light amplification device of the present invention comprises: a band control means that controls the wavelength band of a light carrier to generate a band control light; and a band control light amplification means that has a plurality of light amplification media through which the band control light propagates, wherein the band control light amplification means amplifies the band control light in a coupled state in which the light propagating through the plurality of light amplification media induces a crosstalk and wherein the band control means controls the wavelength band such that the band control light having propagated through the plurality of light amplification media has a reduced coherence.
PLASMA GRATINGS FOR HIGH-INTENSITY LASER PULSE COMPRESSION
A diffractive optical element, such as a plasma grating, can be made by directing two laser beams so that they overlap in a nonlinear material to form an interference pattern in the nonlinear material. The interference pattern can modify the index of refraction in the nonlinear material to produce the diffractive optical element. A chirped pulse amplification system can stretch, amplify, and then compress a laser pulse, and the plasma grating can be used to compress the laser pulse since the plasma optic can withstand the high light intensity of the compressed pulse.
Laser apparatus and extreme ultraviolet light generation system
A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.
AMPLIFICATION FIBER AND OPTICAL AMPLIFIER
An objective of the present invention is to provide an amplification fiber having a cladding excitation configuration that improves amplification efficiency and an optical amplifier. An amplification fiber (10) according to the present invention is a multi-core amplification fiber having, from one end (E1) to the other end (EE), a plurality of cores (11b) in a cladding (11a), and a total distance from the one end (E1) to the other end (EE) in which rare earth ions are doped differs depending on the types of cores (11b). The cores (11b) are preferably disposed such that the cores of the same type are not adjacent to each other. By arranging the types of the cores in this manner, requirements for inter-core crosstalk can be mitigated since the bands of signal light in the adjacent cores are different. As a result, a density of cladding excitation light can be increased by shortening the inter-core distance, and thus the amplification efficiency can be improved.
SPECTRALLY AND COHERENTLY COMBINED LASER ARRAY
A laser system includes a signal source configured to generate input pulses, a diffraction grating module configured to stretch and split the input pulses into a plurality of spectral channels, a set of phase control devices, each phase control device being configured for spectral phase control of a respective spectral channel of the plurality of spectral channels, a power amplifier array of amplifier modules, each amplifier module of the power amplifier array being configured to amplify a respective spectral channel of the plurality of spectral channels, a spectral combiner configured to spectrally combine the plurality of spectral channels via diffraction grating-based pulse compression, and a feedback controller coupled to the spectral combiner to provide feedback to the set of phase control devices for pulse shaping.
EHz ultrafast modulated pulse scanning laser and distributed fiber sensing system
An EHz ultrafast modulated pulse scanning laser and a distributed fiber sensing system. A plurality of phase-shift gratings are engraved on a doped fiber, the phase-shift gratings having different central window wavelengths and a wavelength interval between the adjacent central window wavelengths being a preset fixed value. When a pump light emitted by a pump laser source is coupled by a wavelength division multiplexer and enters the doped fiber, a single-mode narrow-linewidth laser light having multiple wavelengths with a wavelength interval being a preset fixed value can be generated, by using the phase-shift gratings graved on the doped fiber. The ultrafast modulation is completed by using a time-domain control method based on an EOM. An internally frequency converted pulse light formed by splicing pulse lights whose frequencies linearly increase is obtained, thus forming the EHz ultrafast modulation of a distributed feedback fiber laser. In this way, a coherence length of an output laser light is increased while a frequency of the laser light is remained.