The disclosure relates to a linear actuator including a base, a linear motor, a load cell and a rotary motor. The linear motor is disposed on the base and includes a fixed coil module and a movable magnetic backplane. The fixed coil module is fixed on the base, and the movable magnetic backplane is configured to slide relative to the fixed coil module along a first direction. The rotary motor is rotated around a central axis in parallel with the first direction. The load cell has two opposite sides parallel to the first direction, respectively. The movable magnetic backplane of the linear motor and the rotary motor are connected to the two opposite sides of the load cell, respectively. The load cell is subjected to a force applied thereto by the rotary motor and parallel to the first direction, and configured to convert the force into an electrical signal.

A stator module for driving a rotor of an electrical planar-drive system comprises a power module, a stator assembly arranged on a top surface of the power module, and a connector. The power module is embodied to provide drive currents for driving the rotor. The stator assembly comprises coil conductors electrically connected to the power module via the connector for charging with the drive currents. The power module and the stator assembly each have a plate-shaped embodiment. The power module is mechanically fastened to the stator assembly by the connector. The stator assembly comprises a contact structure with contact holes arranged side by side, and the power module comprises a connecting arrangement with further contact holes arranged side by side. The connector comprises contact pins arranged side by side to engage in the further contact holes of the connecting arrangement, and in the contact holes of the contact structure.

A method for moving a rotor in a planar drive system having a first and second stator modules and a rotor. The stator modules are arranged at a distance, forming a gap. First and second magnetic fields are generated by the first and stator modules. The first and second magnetic fields hold the rotor in a vertical position, at a distance from a surface of the first and/or second stator module. The first and/or second magnetic fields have a first magnetic field strength to maintain the rotor in the vertical position, and may be used to change a horizontal position of the rotor. The first stator module has a first close range adjacent the gap, where the first magnetic field has a second field strength when the rotor is moved across the gap, greater than the first magnetic field strength.

A linear drive system for an elevator installation having an elevator car includes a stationary part for alignment with a hoistway wall of the elevator installation and a movable part that moves along the stationary part. The movable part is connected to the elevator car or to a counterweight, wherein the stationary part is shaped so as to substantially envelope the movable part.

A linear motor system includes: a mover including permanent magnets arranged in a traveling direction in a plane parallel to a plane formed by the traveling direction and a vertical direction; and a stator including an armature including an iron core in which projections around which windings are wound are arranged in the traveling direction, the armature being disposed to face the permanent magnets of the mover. The mover includes a mover body including a first main roller engaged with a first traveling surface disposed on the stator, a placing table on which a conveyance object is placed, and a sub-roller engaged with a second traveling surface disposed on an upper surface of the stator. The first main roller supports a magnetic attraction force generated between the stator and the mover, and the sub-roller supports a force in a direction opposite the magnetic attraction force acting on the mover.

Various aspects of the present disclosure are directed to a transport device in the form of a planar motor. In one example embodiment, the transport device includes at least one transport segment that forms a transport plane, at least one first transport unit that moves at least two-dimensionally on the transport plane, and a plurality of drive coils arranged on the at least one segment. The transport device further includes at least one first and at least one second magnet group arranged on the at least one first transport unit. Each magnet group has a plurality of drive magnets with a different direction of magnetization arranged one behind the other in a specific arrangement direction with a specific pole pitch. The transport device further includes a first coil group having a first plurality of drive coils, and a second coil group having a second plurality of drive coils.

Modified magnetic levitation system for flying vehicle Modified magnetic levitation system for flying vehicle includes a propeller system (11, 12, 13), an axial levitation system (101, 102), radial levitation system (part of 201), rotary propulsion system (part of 201) and passive magnetic bearing system (301). An axial levitation system includes plurality of halbach array pairs connected on rotor and special short circuited coil windings connected on stator. A propulsion mechanism (part of 201) is provided for rotating rotor along the centre axis. Radial levitation and propulsion system (201) includes halbach arrays (53) located at outer circumference of rotor and interweaved active and passive coil windings (43) located at inner circumference of stator. Passive magnetic bearing system (301) includes parts of rotor and stator around centre axis of the system. Passive magnetic bearing (PMB) is utilized to levitate rotor at rest, below lift-off speed, and start and end condition of rotations.

A magnetic linear actuator includes a stator and a rotor. The stator includes a first helical array of magnets. The rotor is disposed within the stator and includes a second helical array of magnets. The second helical array of magnets includes a first helical band of magnets and a second helical band of magnets. A first of the magnets of the first helical band coupled to at least one other of the magnets of the first helical band. A first of the magnets of the second helical band coupled to at least one other of the magnets of the second helical band.

A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.

The present disclosure provides a substrate transfer apparatus. According to an aspect of the present disclosure, the substrate transfer apparatus includes: a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.