Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.

MEMS devices having micro spring structures are provided. An example MEMS device includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arms spaced from each other in the first horizontal direction. The first and the second micromechanical arm arrays are interposed in the first horizontal direction. The MEMS device further includes a metal connection structure connected to each first micromechanical arm, and a vertical micro spring structure disposed between the metal connection structure and one of the second micromechanical arms. The vertical micro spring structure includes a first layer having a first coefficient of thermal expansion (CTE) and a second layer having a second CTE different from the first CTE. The second layer is bonded to the first layer.

The present disclosure, in some embodiments, relates to a MEMS (Microelectromechanical systems) structure. The MEMS structure includes a first comb structure having a first plurality of comb fingers extending outward from a first branch. A second comb structure has a second plurality of comb fingers extending outward from a second branch. The first plurality of comb fingers are laterally interleaved between the second plurality of comb fingers. The first plurality of comb fingers respectively include a weighted core material and one or more peripheral materials. The weighted core material has a larger density than the one or more peripheral materials.

A micro-electromechanical system (MEMS) structure is useful as an actuator for moving an image sensor for optical image stabilization. The MEMS actuator includes one or more micromechanical arm arrays. Each arm array includes a first array of spaced-apart fingers formed from a piezoelectric material, and a second array of spaced-apart fingers formed from an electrically conductive material. The distal ends of the first array of fingers and the distal ends of the second array of fingers are interposed between each other. Micro-springs connect the interposed distal ends of each set of adjacent fingers together. A metal cap is present above the distal ends of the first array of fingers and the distal ends of the second array of fingers. Micro-springs connect the metal cap to the distal end of each finger of the first array of fingers. This structure has increased stability and strength.

A micro-electromechanical system (MEMS) structure is useful as an actuator for optical image stabilization. The MEMS actuator includes one or more micromechanical arm arrays. Each arm array includes a first array of spaced-apart fingers and a second array of spaced-apart fingers, the fingers being formed from an electrically conductive material. The fingers of the first array are offset from the fingers of the second array. The distal ends of the first array of fingers and the distal ends of the second array of fingers are separated from each other by a lateral trench. Micro-springs connect the distal ends of fingers in the first array to the distal ends of fingers in the second array. A metal cap may be present above one or both arrays of fingers. Rivets may extend from the metal cap into the fingers themselves. The resulting structure has increased stability and strength.

A soft haptic device and a local control method are disclosed. The soft haptic device includes a soft actuator. The soft actuator includes an electroactive polymer film, a patterned electrode, and a dielectric liquid injected between the electroactive polymer film and the patterned electrode. The soft actuator generates a reconfigurable shape such that a form of an output shape and a number of outputtable shapes are changed depending on the number of electrodes constituting the patterned electrode, a shape of the electrodes, and an arrangement of the electrodes.

A transducer wiring board includes a movable unit, a fixing unit, plural suspensions, plural X-axis actuators, and plural Y-axis actuators. The movable unit includes a first movable section and plural second movable sections. The second movable sections are disposed on two sides of the first movable section along a Y axial direction. The fixing unit is spaced apart from the movable unit and includes plural fixing sections. The fixing sections are disposed on another two sides of the first movable section along an X axial direction. Each suspension connects the movable unit and the fixing unit. Each X-axis actuator connects one of the fixing sections and the first movable section. Each Y-axis actuator connects the first movable section and one of the second movable section.