A vertical comb-drive actuator comprising a support base and a movable body is described. The support base comprises first comb electrodes and a first surface wherein the first comb electrodes extend from the first surface. The movable body attached to the support base comprises second comb electrodes and a second surface wherein the second comb electrodes extend from the second surface. The movable body may rotate about a rotation axis and the first comb electrodes are interdigitated with the second comb electrodes correspondingly. The second comb electrodes extend along a first direction, the rotation axis extends along a second direction, and the first comb electrodes extend along a third direction. The distance between the first lateral face of the first comb electrode and the second surface is shorter than the second length defined as the distance between the end surface of the second comb electrode and the second surface.

An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.

A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

A device can comprise an outer frame, a platform, and a motion control mechanism. The motion control mechanism can be adapted to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame. An actuator can be contained at least partially within the motion control mechanism.

In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.

MEMS actuators having micro spring structures and methods of fabricating the same are provided. An example MEMS actuator includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arms spaced from each other in the first horizontal direction. The first and the second micromechanical arm arrays are interposed in the first horizontal direction. The MEMS actuator further includes a metal connection structure connected to each first micromechanical arm, and a vertical micro spring structure disposed between the metal connection structure and one of the second micromechanical arms. The vertical micro spring structure includes an upper portion connected to the metal connection structure and a lower portion connected to a top end of the second micromechanical arm.

MEMS actuator including: a substrate; a first and a second semiconductive layer; a frame including transverse regions formed by the second semiconductive layer, elongated parallel to a first direction and offset along a second direction, the frame being movable parallel to the second direction. The MEMS actuator includes, for each transverse region: corresponding front rotor regions, which are fixed to the transverse region and are suspended above the substrate; a first and a second stator region, which are formed by the first semiconductive layer in such a way that, when the frame is in rest position, the transverse region is laterally offset with respect to the first and the second stator regions and a first front rotor region partially faces the first stator region, and in such a way that, during a translation of the frame along the second direction, the first and/or a second front rotor region at least partially face the second stator region, when the transverse region begins to superimpose on the first stator region.

Microelectromechanical electrostatic actuator apparatus configured to be driven by an attractive aka pulling electrostatic force between electrically isolated electrically conductive elements, to generate motion, the elements comprising: at least three stators fixed to a substrate such as a MEMS handle layer, and (at least one) movable rotor which may be connected to a compliant suspension or spring structure and wherein driving voltage introduces electrical potential difference between the stators and/or rotor to yield the attractive electrostatic force which generates the motion by displacing the rotor toward the stator/s.

In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.