A vibration-type actuator that is capable of reducing an unnecessary vibration during driving includes a vibration body configured by connecting an electro-mechanical energy conversion element and an elastic body. A driven body is in pressure contact with the vibration body. A controller moves the vibration body and the driven body relatively by a vibration that is excited in the vibration body by applying driving voltage to the electro-mechanical energy conversion element so that a difference between a resonance frequency in a natural vibration mode of the vibration body that is higher than an upper limit frequency of a predetermined driving frequency range and that is nearest to the upper limit frequency and a frequency of the driving voltage is greater than a difference between a resonance frequency in a natural vibration mode used for moving the vibration body and the driven body relatively and the frequency of the driving voltage.

A control apparatus is capable of improving responsiveness in a minute movement of a vibration-type actuator that has a vibration body (a piezoelectric device and an elastic body) and a driven body that pressure contacts with the vibration body. A driving unit moves the driven body by causing a thrust-up vibration in a pressurizing direction and a conveyance vibration in a perpendicular direction in the vibration body by applying alternating voltages to the piezoelectric device. A control unit feedback-controls a position of the driven body by using a first operational parameter that defines an amplitude ratio of the conveyance vibration to the thrust-up vibration and a second operational parameter that defines amplitudes of the conveyance vibration and the thrust-up vibration. A correction unit corrects a control amount of the first or second operational parameter so as to increase as the amplitude ratio decreases.

A control apparatus is capable of improving responsiveness in a minute movement of a vibration-type actuator that has a vibration body (a piezoelectric device and an elastic body) and a driven body that pressure contacts with the vibration body. A driving unit moves the driven body by causing a thrust-up vibration in a pressurizing direction and a conveyance vibration in a perpendicular direction in the vibration body by applying alternating voltages to the piezoelectric device. A control unit feedback-controls a position of the driven body by using a first operational parameter that defines an amplitude ratio of the conveyance vibration to the thrust-up vibration and a second operational parameter that defines amplitudes of the conveyance vibration and the thrust-up vibration. A correction unit corrects a control amount of the first or second operational parameter so as to increase as the amplitude ratio decreases.

A method and device are disclosed for actuating a piezoelectric motor by two driving electrodes by applying periodic control voltages to the driving electrodes. A simplified closed-loop control of the piezoelectric motor is realized by reducing the static friction of a friction contact between a friction element of the piezo-electric motor and an output element to be driven by the friction element without a propulsion of the output element at the same time. In exemplary embodiments, the periodic control voltages are applied with a phase shift to the driving electrodes in a first step of the method, and in a second step of the method, the amplitude ratio of the periodic control voltages is changed with respect to the first step.

A method for controlling an ultrasonic motor. From a starting velocity or starting position of the driven element, the method includes adjusting the frequency of the electrical excitation voltage such that it is equal to or close to the mechanical resonance frequency of the ultrasonic actuator; changing the frequency of the electrical excitation voltage using the signal of the velocity sensor or the position sensor towards the anti-resonance frequency of the ultrasonic actuator until an end velocity or an end position of the driven element is reached; and controlling the end velocity or position of the driven element with a predetermined accuracy by means of antiphase frequency change. Also disclosed is a corresponding control arrangement for an ultrasonic motor having an ultrasonic actuator with at least two acoustic wave generators, a driven element and a generator via a frequency adjustment.

At least one of a first beam portion and second beam portions is provided with an out-of-plane vibration suppressing structure configured to suppress vibration of a movable portion in an out-of-plane direction vertical to an in-plane direction. Thus, unintentional occurrence of unintentional movement in the out-of-plane direction vertical to the in-plane direction can be suppressed. Furthermore, in this case, a size reduction of a device can be achieved in comparison with a case where a device includes a motor disposed for rotation driving, for example.

A piezoelectric driving device includes a piezoelectric vibrating body and a driving circuit. The piezoelectric vibrating body includes a contact which comes into contact with a driven member, and a piezoelectric element which generates vibration in accordance with a driving voltage. The driving circuit sets a driving frequency of the driving voltage to a first frequency and starts the driving at the time of initiation from a stopped state, and sets the driving frequency of the driving voltage to a second frequency lower than the first frequency in a driving state after the initiation.

A control apparatus of a vibration actuator performs control of the vibration actuator using a control amount calculated using both of a first deviation which is a difference between a command value and a relative position, and a gain changed in accordance with a second deviation which is a difference between a target position and the relative position, so as to reduce the gain in accordance with reduction of the second deviation.

A microelectromechanical system includes a piezoelectric drive and a control unit coupled to the piezoelectric drive and designed to control the piezoelectric drive based on a change of the admittance and/or the impedance of the piezoelectric drive.

A control apparatus controls driving a vibratory actuator. The control apparatus applies a signal to an electromechanical energy conversion device of a vibrator of the vibratory actuator to excite vibration on the vibrator and cause the vibrator and a driven object contacting the vibrator to move relative to one another by the vibration. If the vibratory actuator decelerates, the control apparatus changes a driving frequency of the signal to a frequency higher than a start-up frequency of the vibratory actuator and a preceding frequency at a deceleration start position. After changing the driving frequency of the signal, the control apparatus controls the signal driving frequency to perform deceleration control and fixes voltage of the signal in a deceleration period in which the vibratory actuator is decelerated.