In a crystal resonator plate (2), a support part (24) extends from only one corner part positioned in the +X direction and in the −Z′ direction of a vibrating part (22) to an external frame part (23) in the −Z′ direction. The vibrating part (22) and at least part of the support part (24) form an etching region (Eg) having a thickness thinner than a thickness of the external frame part (23). A stepped part is formed at a boundary of the etching region (Eg), and a first lead-out wiring (223) is formed over the support part (24) to the external frame part (23) so as to overlap with the stepped part. At least part of the stepped part that is superimposed on the first lead-out wiring (223) is formed so as not to be parallel to the X axis in plan view.

A resonator includes a vibration portion with a vibration arm extending from a base and having an open end that performs bending vibration. The vibration portion includes upper and lower electrodes with a piezoelectric film disposed therebetween that causes bending vibration of the vibration arm when a voltage is applied between the upper and lower electrodes. A protective film faces the piezoelectric film with the upper electrode interposed therebetween and a conductive film faces the piezoelectric film with the protective film interposed therebetween. Moreover, the conductive film is exposed in a region at the open end and a via electrode is formed in the protective film to electrically connect the conductive film to one of the upper and lower electrodes. The via electrode is positioned closer to a first region than the open end in the second region of the vibration arm in a plan view of the piezoelectric film.

A resonator is provided that includes a vibrator with two portions that vibrate in phases opposite to each other; a frame that is disposed to surround at least part of the vibrator; and a holding unit that supports a boundary between the two portions and connects the vibrator to the frame. Moreover, a frequency adjustment film is disposed on a surface of the vibrator in an area between a connection portion of the holding unit connected to the vibrator and an end of the vibrator that faces the connection portion in a direction along the boundary between the two portions.

A crystal vibration element that includes a crystal piece that has a prescribed crystal orientation, and a first direction and a second direction in a plan view thereof; and excitation electrodes that are respectively provided on front and rear surfaces of the crystal piece in order to excite a thickness shear vibration in the crystal piece upon application of an alternating electric field. A vibration distribution of the crystal piece has a vibration region that extends in a band-like shape in the second direction of the crystal piece and non-vibration regions that are adjacent to opposed sides of the vibration region in the first direction of the crystal piece.

The resonator includes a vibrating portion that has three or more vibrating arms each having a fixed end and an open end and at least two vibrating arms undergoing out-of-plane bending in different phases. Moreover, the resonator includes a first base portion having a first front end connected to the fixed ends and a first rear end facing the first front end, a second base portion having a second front end facing the first rear end and a second rear end facing the second front end, and a connecting portion connected between a vicinity of a center of the first rear end and a vicinity of a center of the second front end, a holding portion that is provided in at least a part of a periphery of the vibrating portion, and a holding arm that is provided between the vibrating portion and the holding portion.

The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal, wherein each of the tines has formed on one or both of opposing sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction, wherein the pair of groove structures are separated in a horizontal widthwise direction by a line structure. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction.

A quartz crystal device includes a crystal element, a container, a conductive adhesive having flexibility, first pillow portions, and a second pillow portion. The first pillow portions hold the crystal element floated from an inner bottom surface of the container at the proximities of the two positions. The second pillow portion opposes the crystal element at a proximity of a second side. The second side opposes the first side of the crystal element. A height of the first pillow portion is represented as h and a length of the first pillow portion in a direction perpendicular to the first side is represented as X1, where the h is 20 μm to 50 μm and the X1 is 150 μm or less. The conductive adhesive covers at least a top surface and a side surface of the first pillow portion. The side surface is in a center side of the crystal element.

A resonator is provided that includes a vibration portion having a first and second electrodes, a piezoelectric film disposed therebetween and having a first face opposing the first electrode, and at least two temperature characteristic adjustment films formed to oppose the first face of the piezoelectric film with the first electrode interposed therebetween. Moreover, the resonator includes a frame that surrounds at least part of the vibration portion; and a holding arm connecting the vibration portion to the holding portion. The vibration portion includes a surface opposing the first face of the piezoelectric film and having first and second regions in which an average amount of displacement is larger than an average amount of displacement in the first region when the vibration portion vibrates.

A resonator that includes a substrate, an insulating film that is formed on the substrate, and vibration regions each of which is formed on the insulating film and includes lower electrodes that are formed on the insulating film, a piezoelectric film that is formed on the lower electrodes, and an upper electrode that is formed on the piezoelectric film. At least one lower electrode of the lower electrodes that are formed on the insulating film has an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region vibrates in antiphase with another vibration region. Moreover, a package seals a resonator and includes the substrate, the insulating film, and the vibration regions and includes a ground terminal for grounding the substrate.

A resonator is provided that includes a vibration part, a frame, and a support arm. The vibration part includes an Si substrate that has a principal surface with a width W in an X-axis direction and a length L in a Y-axis direction. The vibration part is configured to vibrate mainly in a contour vibration mode. The support arm extends in the Y-axis direction and connects the frame to one of two ends in the Y-axis direction of the vibration part. When the principal surface of the Si substrate is viewed in a plan view, the width W is at its maximum Wmax at a point in the Y-axis direction and decreases with increasing proximity to the one of the two end portions in the Y-axis direction of the vibration part and with increasing proximity to the other end portion in the Y-axis direction of the vibration part.