A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential V.sub.B and a second biasing potential V.sub.B2, each resonator biased to a potential Vi between V.sub.B and V.sub.B2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential V.sub.IN, the actuation voltage of each resonator being equal to V.sub.INVi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential V.sub.out. The means for adjusting the frequency response varies the common control potential and/or at least one of the biasing potentials.

An elastic wave device including a substrate, an interdigital transducer (IDT) electrode provided on an upper surface of the substrate, a first wiring electrode provided on the upper surface of the substrate and connected to the IDT electrode, a dielectric film that does not cover a first region of the first wiring electrode but covers a second region of the first wiring electrode above the substrate, the first wiring electrode including a cutout in the second region, and a second wiring electrode that covers an upper surface of the first wiring electrode in the first region and an upper surface of the dielectric film in the second region above the substrate.

Several embodiments are disclosed that provide for a frequency selective surface that can be placed like a radome on top of or under an existing radome or as a new radome on top of one or more radiating or receiving apertures or antennas to provide for a high-Q filter function to remove unwanted neighboring frequency interferences. The conformal structure comprises of an array of subwavelength electrically connected broken metallic rings and/or broken wires loaded with electromechanical resonators such as quartz or LiNbO.sub.3 crystal resonators, Bulk Acoustic Wave (BAW) resonators, and/or Surface Acoustic Wave (SAW) resonators at said breaks. When excited by an incident electromagnetic wave this collection of loaded rings and/or wires behaves as a filter which is capable of rejecting and/or passing frequencies over a narrow bandwidth. This medium can be formed into conformal shapes which can be placed over antennas and apertures as a frequency selective material, to introduce these frequency characteristics into the radiation pattern of the antenna, thereby reducing the gain of the antenna very sharply near the outside edges of the intended operating band. By loading the elements of this FSS with capacitors and/or inductors, additional spectral features can be added to the frequency response of the material to introduce broad pass and reject bands, to enable additional design flexibility for shared apertures. These reject or pass bands are significantly more narrow than achievable with traditional LC loaded FSS structures.

Several embodiments are disclosed that provide for a frequency selective surface that can be placed like a radome on top of or under an existing radome or as a new radome on top of one or more radiating or receiving apertures or antennas to provide for a high-Q filter function to remove unwanted neighboring frequency interferences. The conformal structure comprises of an array of subwavelength electrically connected broken metallic rings and/or broken wires loaded with electromechanical resonators such as quartz or LiNbO.sub.3 crystal resonators, Bulk Acoustic Wave (BAW) resonators, and/or Surface Acoustic Wave (SAW) resonators at said breaks. When excited by an incident electromagnetic wave this collection of loaded rings and/or wires behaves as a filter which is capable of rejecting and/or passing frequencies over a narrow bandwidth. This medium can be formed into conformal shapes which can be placed over antennas and apertures as a frequency selective material, to introduce these frequency characteristics into the radiation pattern of the antenna, thereby reducing the gain of the antenna very sharply near the outside edges of the intended operating band. By loading the elements of this FSS with capacitors and/or inductors, additional spectral features can be added to the frequency response of the material to introduce broad pass and reject bands, to enable additional design flexibility for shared apertures. These reject or pass bands are significantly more narrow than achievable with traditional LC loaded FSS structures.

A high-frequency module includes a filter unit and first and second external connection terminals. The filter unit includes first and second terminals and a plurality of SAW resonators. The plurality of SAW resonators are connected to one another by connection conductors. A matching element is connected between the first terminal and the first external connection terminal, and a matching element is connected between the second terminal and the second external connection terminal. At least one of the matching elements is inductively coupled or capacitively coupled to at least one of the connection conductors located at a position such that at least one of the SAW resonators is interposed between the matching element and the connection conductor.

A high-frequency module includes a filter unit and first and second external connection terminals. The filter unit includes first and second terminals and a plurality of SAW resonators. The plurality of SAW resonators are connected to one another by connection conductors. A matching element is connected between the first terminal and the first external connection terminal, and a matching element is connected between the second terminal and the second external connection terminal. At least one of the matching elements is inductively coupled or capacitively coupled to at least one of the connection conductors located at a position such that at least one of the SAW resonators is interposed between the matching element and the connection conductor.

An acoustic wave device includes a first acoustic wave filter, a first conductor portion between the first acoustic wave filter and a second acoustic wave filter and connected to a second functional conductor portion of the second acoustic wave filter. The first acoustic wave filter includes a signal electrode on a second main surface of a first piezoelectric substrate and connected to the first conductor portion, a ground electrode on the second main surface of the first piezoelectric substrate, and a second conductor portion connected to the ground electrode. The ground electrode overlaps a first functional conductor portion and does not overlap the signal electrode in a thickness direction of the first piezoelectric substrate. The second conductor portion is located between first and second main surfaces of the first piezoelectric substrate and spaced apart from the first main surface.

An acoustic wave device includes a first acoustic wave filter, a first conductor portion between the first acoustic wave filter and a second acoustic wave filter and connected to a second functional conductor portion of the second acoustic wave filter. The first acoustic wave filter includes a signal electrode on a second main surface of a first piezoelectric substrate and connected to the first conductor portion, a ground electrode on the second main surface of the first piezoelectric substrate, and a second conductor portion connected to the ground electrode. The ground electrode overlaps a first functional conductor portion and does not overlap the signal electrode in a thickness direction of the first piezoelectric substrate. The second conductor portion is located between first and second main surfaces of the first piezoelectric substrate and spaced apart from the first main surface.

An acoustic transformer in a transmitter chain is disclosed. In one aspect, a differential power amplifier may produce a differential signal that is provided to an acoustic transformer coupled to an acoustic filter. The acoustic transformer provides a single-ended output signal for use by the acoustic filter. To facilitate operation in multiple bands, multiple acoustic transformer-acoustic filter pairs may be provided with a switching network used to route the amplified signal to the appropriate transformer-filter pair.

The present description concerns electronic filter circuit comprising an integrated passive device; a bulk acoustic wave filter stacked on the integrated passive device on the side of a first surface of the integrated passive device; and at least one conductive pillar crossing the integrated passive device and connecting an electrode of the bulk acoustic wave filter to a contacting element located on a second surface of the integrated passive device opposite to the first surface and intended to be connected to an external element.