A first region includes first transfer column regions distributed in a first direction. A second region includes second transfer column regions distributed in the first direction. The second region is positioned downstream of the first region in a charge transfer direction. Lengths in a second direction of the first transfer column regions are equal. Lengths in the second direction of the second transfer column regions are longer than the length of the first transfer column region, and increase as the second transfer column region is positioned downstream in the charge transfer direction. A third region is disposed to correspond to the first region and extends along the first direction. A fourth region is disposed to correspond to the second region and extends such that an interval between the fourth region and a pixel region increases in response to a change in the lengths of the second transfer column regions.

A method for controlling time delay and integration, TDI, imaging includes acquiring image information using an array of pixels being arranged in rows and columns. Each pixel is configured to generate an electric charge proportional to intensity of electro-magnetic radiation incident on the pixel. The pixels are configured to transfer generated charges along columns of the array for accumulating the generated charges in the pixels along the columns from a first row towards a second row in the array of pixels. The method further includes non-destructively sensing, at an intermediate row between the first and the second row, a signal level of accumulated charges in at least one column; and destructively sensing, at the second row, a signal level of accumulated charges in the at least one column.

A system for time-stamping the passage of a moving object is provided. The system includes a telescope, a satellite geolocating system and an electronic processor, the telescope comprising a focusing optic, a mechanical shutter and a CCD sensor comprising the function referred to as time delay and integration. When the moving object passes through the field of the telescope during a period wherein the mechanical shutter is open, the shift of the charge of a pixel in the rows of the CCD sensor ensured by the TDI function is carried out at least once at a time defined by the satellite geolocating system, shifting the trace of light left by the image of the moving object along a column of pixels, the electronic data processor determining the exact position of the moving object at the defined time depending on knowledge of this column and of the position of the telescope.

Metrology systems and methods are provided, which derive metrology target position on the wafer and possibly the target focus position during the movement of the wafer on the system's stage. The positioning data is derived before the target arrives its position (on-the-fly), sparing the time required in the prior art for the acquisition stage and increasing the throughput of the systems and methods. The collection channel may be split to provide for an additional moving-imaging channel comprising at least one TDI (time delay and integration) sensor with an associated analysis unit configured to derive wafer surface information, positioning and/or focusing information of the metrology targets with respect to the objective lens, during wafer positioning movements towards the metrology targets. Additional focusing-during-movement module and possibly feedbacking derived position and/or focus information to the stage may enhance the accuracy of the stopping of the stage.

A pixel sensor element (200) including a photodetector (201) and a storage assembly having N storage arrays (205), each having an input shift register (207) and an output shift register (215) each with a number M of storage cells arranged in a column, and a storage shift register (207) to the output shift register (215). A number N of independently driveable signal transfer regions (203) transfer the signal from the photodetector (201) to a first cell (210) of one of a respective one of the input shift registers (207). A number N of signal read-out regions (219) read the signal from a last cell (217) of a respective one of the output shift registers (215). N is 2 or more. M is 1 or more. P is 1 or more. Image sensors, imaging devices, storage assemblies, and methods are also provided.

A device for time delay and integration imaging comprises: an array of pixels being arranged in rows and columns extending in a first and second direction, respectively. Pixels may accumulate generated charges in response to received electro-magnetic radiation along each column. The rows comprise at least one lateral charge shifting row to selectively shift accumulated charges in a column to an adjacent column and a controller configured to receive at least two angle correction input values. Each angle correction input value is based on a received intensity of electro-magnetic radiation on a measurement line, wherein the at least two angle correction input values are acquired by measurement lines extending in directions defining different angles in relation to the second direction, wherein the controller is configured to, based on the received at least two angle correction input values, control activation of the at least one lateral charge shifting row.

In time-delay-and-integrate (TDI) imaging, a charge-couple device (CCD) integrates and transfers charge across its columns. Unfortunately, the limited well depth of the CCD limits the dynamic range of the resulting image. Fortunately, TDI imaging can be implemented with a digital focal plane array (DFPA) that includes a detector, analog-to-digital converter (ADC), and counter in each pixel and transfer circuitry connected adjacent pixels. During each integration period in the TDI scan, each detector in the DFPA generates a photocurrent that the corresponding ADC turns into digital pulses, which the corresponding counter counts. Between integration periods, the DFPA transfers the counts from one column to the next, just like in a TDI CCD. The DFPA also non-destructively transfers some or all of the counts to a separate memory. A processor uses these counts to estimate photon flux and correct any rollovers caused by saturation of the counters.

Disclosed are image data acquisition methods and systems that utilizes selective temporal co-adding of detector integration samples to construct improved high-resolution output imagery for arrays with selectable line rates. Configurable TDI arrays are used to construct output imagery of various resolutions dependent upon array commanding, the acquisition geometry, and temporal sampling. The image acquisition techniques may be applied to any optical sensor system and to optical systems with multiple sensors at various relative rotations which enable simultaneous image acquisitions of two or more sensors. Acquired image data may be up-sampled onto a multitude of image grids of various resolution.

Disclosed are image data acquisition methods and systems that utilizes selective temporal co-adding of detector integration samples to construct improved high-resolution output imagery for arrays with selectable line rates. Configurable TDI arrays are used to construct output imagery of various resolutions dependent upon array commanding, the acquisition geometry, and temporal sampling. The image acquisition techniques may be applied to any optical sensor system and to optical systems with multiple sensors at various relative rotations which enable simultaneous image acquisitions of two or more sensors. Acquired image data may be up-sampled onto a multitude of image grids of various resolution.

Disclosed are image data acquisition methods and systems that utilizes selective temporal co-adding of detector integration samples to construct improved high-resolution output imagery for arrays with selectable line rates. Configurable TDI arrays are used to construct output imagery of various resolutions dependent upon array commanding, the acquisition geometry, and temporal sampling. The image acquisition techniques may be applied to any optical sensor system and to optical systems with multiple sensors at various relative rotations which enable simultaneous image acquisitions of two or more sensors. Acquired image data may be up-sampled onto a multitude of image grids of various resolution.