A carbon fiber recycling method utilizes a carbon fiber recycling device for recycling carbon fiber from a carbon fiber polymer composite by using a microwave. The carbon fiber recycling device has a cavity and at least one microwave supplying unit. The carbon fiber recycling method adjusts the microwave supplying unit to change the angle between the long axis direction of the cavity and the electric field direction, and to make the long axis direction of the carbon fiber parallel to the electric field direction. By radiating the microwave on the carbon fiber polymer composite, energy of the microwave is quickly absorbed by the carbon fiber to quickly increase a temperature of the carbon fiber, and the carbon fiber polymer composite is effectively and quickly decomposed to remove most polymer matrix of the carbon fiber polymer composite, so as to achieve the objective of recycling the carbon fiber indeed.

A continuous process provides direct reduction of iron ore in a solid state. Briquettes of iron ore fragments and biomass are transported through a preheating chamber and preheated to a temperature of at least 400° C. The preheated briquettes are transported through a heating/reduction chamber that has an anoxic environment, and iron ore and biomass in the briquettes are exposed to electromagnetic energy in the form of microwave energy under anoxic conditions. Microwave energy generates heat within iron ore, and biomass acts as a reductant and reduces iron ore in a solid state, as the briquettes move through the heating/reduction chamber.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of process chambers for performing a first process using a microwave energy; one microwave generator for generating a microwave; a wave guide connecting to each of the plurality of process chambers and the microwave generator; and a microwave path changing member provided at a microwave transfer path of the wave guide and changing the microwave transfer path of one chosen chamber among the plurality of process chambers.

Methods and apparatus for a substrate processing chamber are provided herein. In some embodiments, a substrate processing chamber includes a chamber body having sidewalls defining an interior volume having a polygon shape; a selectively sealable elongated opening disposed in an upper portion of the chamber body for transferring one or more substrates into or out of the chamber body; a funnel disposed at a first end of the chamber body, wherein the funnel increases in size along a direction from an outer surface of the chamber body to the interior volume; and a pump port disposed at a second end of the chamber body opposite the funnel.

Embodiments disclosed herein include a housing for a source assembly. In an embodiment, the housing comprises a conductive body with a first surface and a second surface opposite from the first surface, and a plurality of openings through a thickness of the conductive body between the first surface and the second surface. In an embodiment, the housing further comprises a channel into the first surface of the conductive body, and a cover over the channel. In an embodiment, a first stem over the cover extends away from the first surface, and a second stem over the cover extends away from the first surface. In an embodiment, the first stem and the second stem open into the channel.

A microwave separated field reconstructed device includes: a microwave field reconstructed cavity, a first short circuit plane, a third waveguide flange and coupling windows, wherein connection ports are provided on four ends of the microwave field reconstructed cavity; the microwave field reconstructed cavity is provided with a first waveguide flange, and a second waveguide flange is provided one end of the microwave field reconstructed cavity perpendicular to the first waveguide flange; the first short circuit plane is connected to one end of the first waveguide flange away from the microwave field reconstructed cavity; a second short circuit plane is connected to one end of the second waveguide flange away from the microwave field reconstructed cavity. The input ports are distributed at two ends of the microwave field reconstructed cavity to introduce electric and magnetic fields.

A microwave heater comprises a cylindrical housing having an inner surface defining an internal cavity. A microwave generator is secured adjacent a first end of the housing and received inside the internal cavity is a sample holder that comprises an annular base member positioned adjacent the first end has a central axis coinciding with a longitudinal axis of the housing. A first opening is formed along the central axis, an outlet of the microwave generator extending through the first opening along the central axis for emitting into the internal cavity electromagnetic waves centered at a given microwave wavelength. A circular support plate substantially parallel to the base member and concentric therewith, a cavity portion defined therebetween, is separated from the base member by a distance less than the given microwave wavelength for establishing a Transverse Magnetic (TM) 01 mode as a predominant resonance mode inside the cavity portion.

In order to provide a chemical reaction apparatus that can suppress a situation where microwaves are concentrated on a partial portion in a reactor, and that can more uniformly irradiate a content with the microwaves, a chemical reaction apparatus includes: a horizontal flow-type reactor in which a liquid content horizontally flows with an unfilled space being provided thereabove; a microwave generator that generates microwaves; and a waveguide that transmits the microwaves generated by the microwave generator to the unfilled space in the reactor, wherein a top of the reactor is curved with respect to a flow direction of the content.

A microwave-based thermal coupling chemical looping gasification method and device. The device includes: a microwave radiation cavity; a loading recess of a microwave absorbing material; and a quartz pipe reaction cavity between the microwave radiation cavity and the loading recess of a microwave absorbing material. A microwave generator consisting of magnetrons is provided at a central portion of the microwave radiation cavity and below the loading recess. An infrared temperature-measuring probe group is arranged at two ends of the magnetrons. Two ends of the microwave radiation cavity are connected to a first and second three-way valves, in communication with the ambient atmosphere and a protection gas charging device. A protection gas cooling device and a protection gas circulating fan are sequentially connected in series on a pipeline between the valves.

A process chamber configured to process at least one substrate; at least one heating device to heat the at least one substrate using an electromagnetic wave; a non-contact type temperature measurement device configured to measure a temperature of the at least one substrate; and a controller configured to acquire temperature data measured by the temperature measurement device, compare the measured temperature with a preset upper limit temperature and a preset lower limit temperature, lower an output of the at least one heating device or turn off a power supply of the at least one heating device when the measured temperature from the temperature data is higher than the upper limit temperature, and lower an output of the at least one heating device or turn off a power supply of the at least one heating device when the measured temperature from the temperature data is lower than the lower limit temperature.