A nozzle for a plasma generator having a body defining a plasma generating chamber with a gas inlet at one end and a plasma outlet at the opposite end defining the flow direction from the inlet to the outlet. An inner electrode is positioned around an inner wall of the body and an outer earthed electrode is provided around an outer wall of the body. The inner electrode and the outer electrode overlap one another in the flow direction.

A plasma propulsion nozzle incorporates a cylinder having an inlet and an outlet. A plurality of substantially cylindrical planarly disbanded electrodes with sandwiched dielectric spacers is cascaded in an array to be concentrically expanding from the inlet through an interior chamber to the outlet for a nozzle. A voltage source applies aperiodic signal with rapidly reversing polarity to the electrodes with differential phase applied to adjacent electrodes in the array creating and expelling plasma clusters at each dielectric spacer inducing flow from the nozzle outlet to produce thrust.

A device for generating plasma (1) comprises a high voltage electrode (10) as well as at least one external electrode (11, 12), wherein the high voltage electrode (10) at least in one coordinate direction (34) is arranged between conductive material of at least one external electrode (11, 12). The high voltage electrode (10) is covered with a dielectric (21) at least one side facing an external electrode (11, 12). Between the respective external electrode (11, 12) and the high voltage electrode (10) over its longitudinal extension at least one spacer element (20) is present, which at least in the region of its arrangement electrically insulates the respective external electrode (11,12) from the high voltage electrode (10) and which positions the respective external electrode (11, 12) at a constant distance from the high voltage electrode (10), wherein the spacer element is a gas-permeable foil.

Apparatus for plasma processing of a continuous fiber, comprising a first and a second plasma torch. Each plasma torch comprises oppositely arranged electrodes to define a plasma discharge chamber between the electrodes. The plasma discharge chamber comprises an inlet and an outlet for passing a plasma forming gas between the electrodes. The apparatus further comprises an afterglow chamber in fluid communication with the outlets of the plasma discharge chambers, which comprises a substrate inlet and a substrate outlet arranged at opposite sides of the outlets of the plasma discharge chambers. A transport system is configured to continuously transport the fiber from the substrate inlet to the substrate outlet through the afterglow chamber. The substrate inlet comprises an aperture having a cross-sectional size substantially smaller than a cross-sectional size of the afterglow chamber. The outlets of the plasma torches face each other and exhaust plasma activated species into the afterglow chamber.

An apparatus for and methods of repairing and manufacturing integrated circuits using the apparatus. The apparatus, comprising: a vacuum chamber containing: a movable stage configured to hold a substrate; an inspection and analysis probe; a heat source; a gas injector; and a gas manifold connecting multiple gas sources to the gas injector.

A treatment-object modifying device lowers a pH value of a surface of a treatment object by using dielectric-barrier discharge. The treatment-object modifying device includes discharge electrodes disposed over a conveying route of the treatment object; and a counter electrode disposed to face the discharge electrodes across the conveying route so as to correspond to the respective discharge electrodes. Each discharge electrode has a columnar shape or a cylindrical shape. Curved surfaces of the discharge electrodes faces the counter electrode. Curved surfaces of the discharge electrodes face one another. A distance between the adjacent discharge electrodes is equal to or less than 2 millimeters.

A device for air decontamination comprises a housing (10) having an air inlet (14), an air outlet (16) and an air flow passage (12) therebetween, the housing including at least one non-thermal plasma cell (22); wherein the non-thermal plasma cell is sized and positioned relative to the internal dimensions of the housing such that a portion of air entering the housing from the air inlet is adapted to pass through and across the non-thermal plasma cell and a portion of air entering the housing from the air inlet is adapted to pass outside of the external surface of the non-thermal plasma cell. A method of decontaminating air is also disclosed.

An apparatus for and methods of repairing and manufacturing integrated circuits using the apparatus. The apparatus, comprising: a vacuum chamber containing: a movable stage configured to hold a substrate; an inspection and analysis probe; a heat source; a gas injector; and a gas manifold connecting multiple gas sources to the gas injector.

A method for producing a tetrahydroborate includes a hydrogenating step (step S14) of exposing a borate to a hydrogen plasma while grinding the borate.

An aerosol generation device is provided. The device is configured to heat an aerosol-generating product to generate an aerosol. The device includes a plasma generator configured to generate plasma to heat the aerosol-generating product through the plasma. In the aerosol generation devices, the plasma generator provides the plasma to the aerosol-generating product to heat the aerosol-generating product.