Systems and methods are described herein for dynamic random access memory (DRAM) devices. In one aspect, a plurality of DRAM cells forms a stacked structure. Individual DRAM cells may include a substantially planar capacitive element formed of two substantially planar electrodes separated by an insulating layer. Individual DRAM cells may also include a transistor in communication with and substantially planar to the capacitive element, and a word line, which activates the access gate of the transistor when a voltage is applied to the access gate, formed proximate to and substantially parallel with the capacitive element. Individual DRAM cells may share at least one data line, oriented in a vertical direction relative to the stacked structure, that is in communication with capacitive elements through the access gate of individual DRAM cells and is operable to store and access charge stored in individual capacitive elements of individual DRAM cells.

The disclosure provides a semiconductor structure comprising a plurality of bit line structures and a method for manufacturing the same. In the present disclosure, by allowing at least one of the bit line structures to have a width at its top less than a width at its bottom, the semiconductor structure may have an increased total tungsten volume. The contact surface between the bit line structures and the landing pad is increased, so the landing pad resistance can be decreased. Therefore, the performance of the semiconductor structure can be enhanced.

The present disclosure relates to a memory device with a vertical field effect transistor (VFET) and a method for preparing the memory device. The memory device includes a capacitor contact disposed in a first semiconductor substrate, and a channel structure disposed over a top surface of the first semiconductor substrate. The memory device also includes a first gate structure disposed on a first sidewall of the channel structure, and a second gate structure disposed on a second sidewall of the channel structure. The second sidewall of the channel structure is opposite to the first sidewall of the channel structure. The memory device further includes a bit line contact disposed over the channel structure. The channel structure is electrically connected to a capacitor and a bit line through the capacitor contact and the bit line contact.

A semiconductor memory device according to an embodiment includes: a first oxide semiconductor layer between a first conductive layer and a second conductive layer; a first gate electrode; a first electrode; a second electrode; a first capacitor insulating film between the first electrode and the second electrode including a first region and a second region between the first region and the second electrode, concentration of the Ti is higher in the second region than the first region; a third conductive layer; a second oxide semiconductor layer between the third conductive layer and a fourth conductive layer; a second gate electrode; a third electrode; a fourth electrode; and a second capacitor insulating film between the third electrode and the fourth electrode, and including a third region and a fourth region between the third region and the fourth electrode, concentration of Ti is higher in the fourth region than the third region.

A semiconductor device includes a first conductive layer extending along a first direction, a semiconductor layer extending along a second direction crossing the first direction, penetrating the first conductive layer, and including an oxide semiconductor, a first insulating layer between the first conductive layer and the semiconductor layer, a second conductive layer provided on one side of the semiconductor layer in the second direction and electrically connected thereto, a third conductive layer provided on the other side of the semiconductor layer in the second direction and electrically connected thereto, an electric conductor extending from the third conductive layer toward the second conductive layer along the semiconductor layer, and a charge storage film between the semiconductor layer and the electric conductor.

Present invention relates to a semiconductor memory device. A semiconductor memory device according to the present invention may comprise: a memory cell array including a plurality of memory cells over a substrate, the plurality of memory cells repeatedly arranged in horizontal direction and a vertical direction, the horizontal direction parallel to a surface of the substrate, the vertical direction perpendicular to the surface of the substrate, a bit line coupled to the memory cells arranged in the vertical direction, and a word line coupled to the memory cells arranged in the horizontal direction, wherein each of the memory cells comprises a capacitor comprising a storage node and a plate node, and the plate nodes of the capacitors are coupled to each other in the vertical direction and are spaced apart from each other in the horizontal direction.

A semiconductor memory device includes a word line extending in a vertical direction, a semiconductor pattern having a ring-shaped horizontal cross-section that extends around the word line, a bit line disposed at a first end of the semiconductor pattern, and a capacitor structure disposed at second end of the semiconductor pattern. The capacitor structure includes a lower electrode layer electrically connected to the second end of the semiconductor pattern, having a ring-shaped horizontal cross-section, and including a connector extending in the vertical direction. A first segment extends in a horizontal direction from an upper end of the connector, and a second segment extends in the horizontal direction from a lower end of the connector. An upper electrode layer surrounded by the lower electrode layer, extends in the vertical direction, and a capacitor dielectric layer is between the lower electrode layer and the upper electrode layer.

A semiconductor device of an embodiment includes a first electrode, a second electrode, a first oxide semiconductor layer between the first electrode and the second electrode, the first oxide semiconductor layer containing in, Zn, and a first metal element, and the first metal element being at least one metal of Ga, Mg, or Mn, a second oxide semiconductor layer between the first oxide semiconductor layer and the second electrode, the second oxide semiconductor layer containing In, Zn, and the first metal element, a third oxide semiconductor layer between the first oxide semiconductor layer and the second oxide semiconductor layer, the third oxide semiconductor layer containing in, Zn, and a second metal element, the second metal element being at least one metal of Al, Hf, La, Sn, Ta, Ti, W, Y, or Zr, a gate electrode facing the third oxide semiconductor layer, and a gate insulating.

Embodiments herein describe techniques for a semiconductor device including a substrate, a first inter-level dielectric (ILD) layer above the substrate, and a second ILD layer above the first ILD layer. A first capacitor and a second capacitor are formed within the first ILD layer and the second ILD layer. A first top plate of the first capacitor and a second top plate of the second capacitor are formed at a boundary between the first ILD layer and the second ILD layer. The first capacitor and the second capacitor are separated by a dielectric area in the first ILD layer. The dielectric area includes a first dielectric area that is coplanar with the first top plate or the second top plate, and a second dielectric area above the first dielectric area and to separate the first top plate and the second top plate. Other embodiments may be described and/or claimed.

Systems, methods, and apparatuses are provided for self-aligned etch back for vertical three dimensional (3D) memory. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes removing portions of the semiconductor material to form first horizontal openings and depositing a fill in the first horizontal openings. The method can further include forming third vertical openings to expose third vertical sidewalls in the vertical stack and selectively removing the fill material to form a plurality of second horizontal openings in which to form horizontally oriented storage nodes.